2/19/2012	1:39:23 AM	Run finished at 1:39 AM
2/19/2012	6:29:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2012	6:29:47 AM	Recipe started at 6:29 AM
2/19/2012	6:29:47 AM	Helium valve closed
2/19/2012	6:29:47 AM	H2 valve closed
2/19/2012	6:29:47 AM	BCl3 valve closed
2/19/2012	6:29:47 AM	PH3 valve closed
2/19/2012	6:29:47 AM	SiCl4 pre valve closed
2/19/2012	6:29:47 AM	SiCl4 post valve closed
2/19/2012	6:29:47 AM	Main Vac valve closed
2/19/2012	6:29:47 AM	Bypass valve closed
2/19/2012	6:29:47 AM	Bubbler valve closed
2/19/2012	6:29:47 AM	Helium MFC set to  0.000000
2/19/2012	6:29:47 AM	H2 MFC set to  0.000000
2/19/2012	6:29:47 AM	BCl3 MFC set to  0.000000
2/19/2012	6:29:47 AM	PH3 MFC set to  0.000000
2/19/2012	6:29:47 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:29:47 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:29:48 AM	Tube furnace set to 0
2/19/2012	6:29:51 AM	H2 valve closed
2/19/2012	6:29:51 AM	BCl3 valve closed
2/19/2012	6:29:51 AM	PH3 valve closed
2/19/2012	6:29:51 AM	SiCl4 pre valve closed
2/19/2012	6:29:51 AM	SiCl4 post valve closed
2/19/2012	6:29:51 AM	Main Vac valve closed
2/19/2012	6:29:51 AM	Bypass valve closed
2/19/2012	6:29:51 AM	Bubbler valve closed
2/19/2012	6:29:51 AM	Helium valve opened
2/19/2012	6:29:51 AM	Helium MFC set to  500.000000
2/19/2012	6:29:51 AM	H2 MFC set to  0.000000
2/19/2012	6:29:51 AM	BCl3 MFC set to  0.000000
2/19/2012	6:29:51 AM	PH3 MFC set to  0.000000
2/19/2012	6:29:51 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:29:51 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:29:51 AM	Tube furnace set to 0
2/19/2012	6:30:56 AM	Helium valve closed
2/19/2012	6:30:56 AM	H2 valve closed
2/19/2012	6:30:56 AM	BCl3 valve closed
2/19/2012	6:30:56 AM	PH3 valve closed
2/19/2012	6:30:56 AM	SiCl4 pre valve closed
2/19/2012	6:30:56 AM	SiCl4 post valve closed
2/19/2012	6:30:56 AM	Main Vac valve closed
2/19/2012	6:30:56 AM	Bypass valve closed
2/19/2012	6:30:56 AM	Bubbler valve closed
2/19/2012	6:30:56 AM	Helium MFC set to  0.000000
2/19/2012	6:30:56 AM	H2 MFC set to  0.000000
2/19/2012	6:30:56 AM	BCl3 MFC set to  0.000000
2/19/2012	6:30:56 AM	PH3 MFC set to  0.000000
2/19/2012	6:30:56 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:30:56 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:30:56 AM	Tube furnace set to 0
2/19/2012	6:30:57 AM	Run finished at 6:30 AM
2/19/2012	6:30:57 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2012	6:35:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	6:35:01 AM	Recipe started at 6:35 AM
2/19/2012	6:35:01 AM	Helium valve closed
2/19/2012	6:35:01 AM	H2 valve closed
2/19/2012	6:35:01 AM	BCl3 valve closed
2/19/2012	6:35:01 AM	PH3 valve closed
2/19/2012	6:35:01 AM	SiCl4 pre valve closed
2/19/2012	6:35:01 AM	SiCl4 post valve closed
2/19/2012	6:35:01 AM	Main Vac valve closed
2/19/2012	6:35:01 AM	Bubbler valve closed
2/19/2012	6:35:01 AM	Bypass valve opened
2/19/2012	6:35:01 AM	Helium MFC set to  0.000000
2/19/2012	6:35:01 AM	H2 MFC set to  0.000000
2/19/2012	6:35:01 AM	BCl3 MFC set to  0.000000
2/19/2012	6:35:01 AM	PH3 MFC set to  0.000000
2/19/2012	6:35:01 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:35:01 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:35:02 AM	Tube furnace set to 0
2/19/2012	6:36:04 AM	Helium valve closed
2/19/2012	6:36:04 AM	H2 valve closed
2/19/2012	6:36:04 AM	BCl3 valve closed
2/19/2012	6:36:04 AM	PH3 valve closed
2/19/2012	6:36:04 AM	SiCl4 pre valve closed
2/19/2012	6:36:04 AM	SiCl4 post valve closed
2/19/2012	6:36:04 AM	Main Vac valve closed
2/19/2012	6:36:04 AM	Bubbler valve closed
2/19/2012	6:36:04 AM	Bypass valve opened
2/19/2012	6:36:04 AM	Helium MFC set to  0.000000
2/19/2012	6:36:04 AM	H2 MFC set to  0.000000
2/19/2012	6:36:04 AM	BCl3 MFC set to  0.000000
2/19/2012	6:36:04 AM	PH3 MFC set to  0.000000
2/19/2012	6:36:04 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:36:04 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:36:04 AM	Tube furnace set to 0
2/19/2012	6:37:04 AM	Helium valve closed
2/19/2012	6:37:04 AM	H2 valve closed
2/19/2012	6:37:04 AM	BCl3 valve closed
2/19/2012	6:37:04 AM	PH3 valve closed
2/19/2012	6:37:04 AM	SiCl4 pre valve closed
2/19/2012	6:37:04 AM	SiCl4 post valve closed
2/19/2012	6:37:04 AM	Bypass valve closed
2/19/2012	6:37:04 AM	Bubbler valve closed
2/19/2012	6:37:04 AM	Main Vac valve opened
2/19/2012	6:37:04 AM	Helium MFC set to  0.000000
2/19/2012	6:37:04 AM	H2 MFC set to  0.000000
2/19/2012	6:37:04 AM	BCl3 MFC set to  0.000000
2/19/2012	6:37:04 AM	PH3 MFC set to  0.000000
2/19/2012	6:37:04 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:37:04 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:37:05 AM	Tube furnace set to 0
2/19/2012	6:37:06 AM	Run finished at 6:37 AM
2/19/2012	6:37:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	6:37:44 AM	Recipe started at 6:37 AM
2/19/2012	6:37:44 AM	H2 valve closed
2/19/2012	6:37:44 AM	BCl3 valve closed
2/19/2012	6:37:44 AM	PH3 valve closed
2/19/2012	6:37:44 AM	SiCl4 pre valve closed
2/19/2012	6:37:44 AM	SiCl4 post valve closed
2/19/2012	6:37:44 AM	Main Vac valve closed
2/19/2012	6:37:44 AM	Bypass valve closed
2/19/2012	6:37:44 AM	Bubbler valve closed
2/19/2012	6:37:44 AM	Helium valve opened
2/19/2012	6:37:44 AM	Helium MFC set to  500.000000
2/19/2012	6:37:44 AM	H2 MFC set to  0.000000
2/19/2012	6:37:44 AM	BCl3 MFC set to  0.000000
2/19/2012	6:37:44 AM	PH3 MFC set to  0.000000
2/19/2012	6:37:44 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:37:44 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:37:44 AM	Tube furnace set to 180
2/19/2012	6:38:53 AM	H2 valve closed
2/19/2012	6:38:53 AM	BCl3 valve closed
2/19/2012	6:38:53 AM	PH3 valve closed
2/19/2012	6:38:53 AM	SiCl4 pre valve closed
2/19/2012	6:38:53 AM	SiCl4 post valve closed
2/19/2012	6:38:53 AM	Main Vac valve closed
2/19/2012	6:38:53 AM	Bypass valve closed
2/19/2012	6:38:53 AM	Helium valve opened
2/19/2012	6:38:53 AM	Bubbler valve opened
2/19/2012	6:38:53 AM	Helium MFC set to  500.000000
2/19/2012	6:38:53 AM	H2 MFC set to  0.000000
2/19/2012	6:38:53 AM	BCl3 MFC set to  0.000000
2/19/2012	6:38:53 AM	PH3 MFC set to  0.000000
2/19/2012	6:38:53 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:38:53 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:38:53 AM	Tube furnace set to 180
2/19/2012	6:39:53 AM	Helium valve closed
2/19/2012	6:39:53 AM	H2 valve closed
2/19/2012	6:39:53 AM	BCl3 valve closed
2/19/2012	6:39:53 AM	PH3 valve closed
2/19/2012	6:39:53 AM	SiCl4 pre valve closed
2/19/2012	6:39:53 AM	SiCl4 post valve closed
2/19/2012	6:39:53 AM	Main Vac valve closed
2/19/2012	6:39:53 AM	Bubbler valve closed
2/19/2012	6:39:53 AM	Bypass valve opened
2/19/2012	6:39:53 AM	Helium MFC set to  0.000000
2/19/2012	6:39:53 AM	H2 MFC set to  0.000000
2/19/2012	6:39:53 AM	BCl3 MFC set to  0.000000
2/19/2012	6:39:53 AM	PH3 MFC set to  0.000000
2/19/2012	6:39:53 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:39:53 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:39:53 AM	Tube furnace set to 180
2/19/2012	6:40:44 AM	Helium valve closed
2/19/2012	6:40:44 AM	H2 valve closed
2/19/2012	6:40:44 AM	BCl3 valve closed
2/19/2012	6:40:44 AM	PH3 valve closed
2/19/2012	6:40:44 AM	SiCl4 pre valve closed
2/19/2012	6:40:44 AM	SiCl4 post valve closed
2/19/2012	6:40:44 AM	Main Vac valve closed
2/19/2012	6:40:44 AM	Bubbler valve closed
2/19/2012	6:40:44 AM	Bypass valve opened
2/19/2012	6:40:44 AM	Helium MFC set to  0.000000
2/19/2012	6:40:44 AM	H2 MFC set to  0.000000
2/19/2012	6:40:44 AM	BCl3 MFC set to  0.000000
2/19/2012	6:40:44 AM	PH3 MFC set to  0.000000
2/19/2012	6:40:44 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:40:44 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:40:44 AM	Tube furnace set to 180
2/19/2012	6:41:44 AM	Helium valve closed
2/19/2012	6:41:44 AM	H2 valve closed
2/19/2012	6:41:44 AM	BCl3 valve closed
2/19/2012	6:41:44 AM	PH3 valve closed
2/19/2012	6:41:44 AM	SiCl4 pre valve closed
2/19/2012	6:41:44 AM	SiCl4 post valve closed
2/19/2012	6:41:44 AM	Bypass valve closed
2/19/2012	6:41:44 AM	Bubbler valve closed
2/19/2012	6:41:44 AM	Main Vac valve opened
2/19/2012	6:41:44 AM	Helium MFC set to  0.000000
2/19/2012	6:41:44 AM	H2 MFC set to  0.000000
2/19/2012	6:41:44 AM	BCl3 MFC set to  0.000000
2/19/2012	6:41:44 AM	PH3 MFC set to  0.000000
2/19/2012	6:41:44 AM	SiCl4 MFC set to  0.000000
2/19/2012	6:41:44 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:41:44 AM	Tube furnace set to 180
2/19/2012	8:11:44 AM	H2 valve closed
2/19/2012	8:11:44 AM	BCl3 valve closed
2/19/2012	8:11:44 AM	PH3 valve closed
2/19/2012	8:11:44 AM	SiCl4 pre valve closed
2/19/2012	8:11:44 AM	SiCl4 post valve closed
2/19/2012	8:11:44 AM	Bypass valve closed
2/19/2012	8:11:44 AM	Bubbler valve closed
2/19/2012	8:11:44 AM	Helium valve opened
2/19/2012	8:11:44 AM	Main Vac valve opened
2/19/2012	8:11:44 AM	Helium MFC set to  10.000000
2/19/2012	8:11:44 AM	H2 MFC set to  0.000000
2/19/2012	8:11:44 AM	BCl3 MFC set to  0.000000
2/19/2012	8:11:44 AM	PH3 MFC set to  0.000000
2/19/2012	8:11:44 AM	SiCl4 MFC set to  0.000000
2/19/2012	8:11:44 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:11:44 AM	Tube furnace set to 180
2/19/2012	8:12:14 AM	Helium valve closed
2/19/2012	8:12:14 AM	H2 valve closed
2/19/2012	8:12:14 AM	BCl3 valve closed
2/19/2012	8:12:14 AM	PH3 valve closed
2/19/2012	8:12:14 AM	SiCl4 pre valve closed
2/19/2012	8:12:14 AM	SiCl4 post valve closed
2/19/2012	8:12:14 AM	Bypass valve closed
2/19/2012	8:12:14 AM	Bubbler valve closed
2/19/2012	8:12:14 AM	Main Vac valve opened
2/19/2012	8:12:14 AM	Helium MFC set to  0.000000
2/19/2012	8:12:14 AM	H2 MFC set to  0.000000
2/19/2012	8:12:14 AM	BCl3 MFC set to  0.000000
2/19/2012	8:12:14 AM	PH3 MFC set to  0.000000
2/19/2012	8:12:14 AM	SiCl4 MFC set to  0.000000
2/19/2012	8:12:14 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:12:14 AM	Tube furnace set to 180
2/19/2012	8:12:44 AM	H2 valve closed
2/19/2012	8:12:44 AM	BCl3 valve closed
2/19/2012	8:12:44 AM	PH3 valve closed
2/19/2012	8:12:44 AM	SiCl4 pre valve closed
2/19/2012	8:12:44 AM	SiCl4 post valve closed
2/19/2012	8:12:44 AM	Bypass valve closed
2/19/2012	8:12:44 AM	Bubbler valve closed
2/19/2012	8:12:44 AM	Helium valve opened
2/19/2012	8:12:44 AM	Main Vac valve opened
2/19/2012	8:12:44 AM	Helium MFC set to  10.000000
2/19/2012	8:12:44 AM	H2 MFC set to  0.000000
2/19/2012	8:12:44 AM	BCl3 MFC set to  0.000000
2/19/2012	8:12:44 AM	PH3 MFC set to  0.000000
2/19/2012	8:12:44 AM	SiCl4 MFC set to  0.000000
2/19/2012	8:12:44 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:12:45 AM	Tube furnace set to 180
2/19/2012	8:13:15 AM	Helium valve closed
2/19/2012	8:13:15 AM	H2 valve closed
2/19/2012	8:13:15 AM	BCl3 valve closed
2/19/2012	8:13:15 AM	PH3 valve closed
2/19/2012	8:13:15 AM	SiCl4 pre valve closed
2/19/2012	8:13:15 AM	SiCl4 post valve closed
2/19/2012	8:13:15 AM	Bypass valve closed
2/19/2012	8:13:15 AM	Bubbler valve closed
2/19/2012	8:13:15 AM	Main Vac valve opened
2/19/2012	8:13:15 AM	Helium MFC set to  0.000000
2/19/2012	8:13:15 AM	H2 MFC set to  0.000000
2/19/2012	8:13:15 AM	BCl3 MFC set to  0.000000
2/19/2012	8:13:15 AM	PH3 MFC set to  0.000000
2/19/2012	8:13:15 AM	SiCl4 MFC set to  0.000000
2/19/2012	8:13:15 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:13:15 AM	Tube furnace set to 180
2/19/2012	8:15:15 AM	Helium valve closed
2/19/2012	8:15:15 AM	BCl3 valve closed
2/19/2012	8:15:15 AM	PH3 valve closed
2/19/2012	8:15:15 AM	SiCl4 pre valve closed
2/19/2012	8:15:15 AM	SiCl4 post valve closed
2/19/2012	8:15:15 AM	Main Vac valve closed
2/19/2012	8:15:15 AM	Bypass valve closed
2/19/2012	8:15:15 AM	Bubbler valve closed
2/19/2012	8:15:15 AM	H2 valve opened
2/19/2012	8:15:15 AM	Helium MFC set to  0.000000
2/19/2012	8:15:15 AM	H2 MFC set to  500.000000
2/19/2012	8:15:15 AM	BCl3 MFC set to  0.000000
2/19/2012	8:15:15 AM	PH3 MFC set to  0.000000
2/19/2012	8:15:15 AM	SiCl4 MFC set to  0.000000
2/19/2012	8:15:15 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:15:15 AM	Tube furnace set to 1000
2/19/2012	8:16:19 AM	Helium valve closed
2/19/2012	8:16:19 AM	BCl3 valve closed
2/19/2012	8:16:19 AM	PH3 valve closed
2/19/2012	8:16:19 AM	SiCl4 pre valve closed
2/19/2012	8:16:19 AM	SiCl4 post valve closed
2/19/2012	8:16:19 AM	Main Vac valve closed
2/19/2012	8:16:19 AM	Bypass valve closed
2/19/2012	8:16:19 AM	H2 valve opened
2/19/2012	8:16:19 AM	Bubbler valve opened
2/19/2012	8:16:19 AM	Helium MFC set to  0.000000
2/19/2012	8:16:19 AM	H2 MFC set to  500.000000
2/19/2012	8:16:19 AM	BCl3 MFC set to  0.000000
2/19/2012	8:16:19 AM	PH3 MFC set to  0.000000
2/19/2012	8:16:19 AM	SiCl4 MFC set to  0.000000
2/19/2012	8:16:19 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:16:19 AM	Tube furnace set to 1000
2/19/2012	8:16:20 AM	Helium valve closed
2/19/2012	8:16:20 AM	BCl3 valve closed
2/19/2012	8:16:20 AM	PH3 valve closed
2/19/2012	8:16:20 AM	SiCl4 pre valve closed
2/19/2012	8:16:20 AM	SiCl4 post valve closed
2/19/2012	8:16:20 AM	Main Vac valve closed
2/19/2012	8:16:20 AM	Bypass valve closed
2/19/2012	8:16:20 AM	H2 valve opened
2/19/2012	8:16:20 AM	Bubbler valve opened
2/19/2012	8:16:20 AM	Helium MFC set to  0.000000
2/19/2012	8:16:20 AM	H2 MFC set to  500.000000
2/19/2012	8:16:20 AM	BCl3 MFC set to  0.000000
2/19/2012	8:16:20 AM	PH3 MFC set to  0.000000
2/19/2012	8:16:20 AM	SiCl4 MFC set to  0.000000
2/19/2012	8:16:20 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:16:21 AM	Tube furnace set to 1000
2/19/2012	8:41:21 AM	Helium valve closed
2/19/2012	8:41:21 AM	PH3 valve closed
2/19/2012	8:41:21 AM	Main Vac valve closed
2/19/2012	8:41:21 AM	Bypass valve closed
2/19/2012	8:41:21 AM	H2 valve opened
2/19/2012	8:41:21 AM	BCl3 valve opened
2/19/2012	8:41:21 AM	SiCl4 pre valve opened
2/19/2012	8:41:21 AM	SiCl4 post valve opened
2/19/2012	8:41:21 AM	Bubbler valve opened
2/19/2012	8:41:21 AM	Helium MFC set to  0.000000
2/19/2012	8:41:21 AM	H2 MFC set to  500.000000
2/19/2012	8:41:21 AM	BCl3 MFC set to  1.500000
2/19/2012	8:41:21 AM	PH3 MFC set to  0.000000
2/19/2012	8:41:21 AM	SiCl4 MFC set to  50.000000
2/19/2012	8:41:21 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:41:21 AM	Tube furnace set to 1000
2/19/2012	8:59:21 AM	Helium valve closed
2/19/2012	8:59:21 AM	BCl3 valve closed
2/19/2012	8:59:21 AM	PH3 valve closed
2/19/2012	8:59:21 AM	SiCl4 pre valve closed
2/19/2012	8:59:21 AM	SiCl4 post valve closed
2/19/2012	8:59:21 AM	Main Vac valve closed
2/19/2012	8:59:21 AM	Bypass valve closed
2/19/2012	8:59:21 AM	H2 valve opened
2/19/2012	8:59:21 AM	Bubbler valve opened
2/19/2012	8:59:21 AM	Helium MFC set to  0.000000
2/19/2012	8:59:21 AM	H2 MFC set to  500.000000
2/19/2012	8:59:21 AM	BCl3 MFC set to  0.000000
2/19/2012	8:59:21 AM	PH3 MFC set to  0.000000
2/19/2012	8:59:21 AM	SiCl4 MFC set to  0.000000
2/19/2012	8:59:21 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:59:21 AM	Tube furnace set to 975
2/19/2012	9:00:51 AM	Helium valve closed
2/19/2012	9:00:51 AM	BCl3 valve closed
2/19/2012	9:00:51 AM	PH3 valve closed
2/19/2012	9:00:51 AM	SiCl4 pre valve closed
2/19/2012	9:00:51 AM	SiCl4 post valve closed
2/19/2012	9:00:51 AM	Main Vac valve closed
2/19/2012	9:00:51 AM	Bypass valve closed
2/19/2012	9:00:51 AM	H2 valve opened
2/19/2012	9:00:51 AM	Bubbler valve opened
2/19/2012	9:00:51 AM	Helium MFC set to  0.000000
2/19/2012	9:00:51 AM	H2 MFC set to  500.000000
2/19/2012	9:00:51 AM	BCl3 MFC set to  0.000000
2/19/2012	9:00:51 AM	PH3 MFC set to  0.000000
2/19/2012	9:00:51 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:00:51 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:00:51 AM	Tube furnace set to 950
2/19/2012	9:02:21 AM	Helium valve closed
2/19/2012	9:02:21 AM	BCl3 valve closed
2/19/2012	9:02:21 AM	PH3 valve closed
2/19/2012	9:02:21 AM	SiCl4 pre valve closed
2/19/2012	9:02:21 AM	SiCl4 post valve closed
2/19/2012	9:02:21 AM	Main Vac valve closed
2/19/2012	9:02:21 AM	Bypass valve closed
2/19/2012	9:02:21 AM	H2 valve opened
2/19/2012	9:02:21 AM	Bubbler valve opened
2/19/2012	9:02:21 AM	Helium MFC set to  0.000000
2/19/2012	9:02:21 AM	H2 MFC set to  500.000000
2/19/2012	9:02:21 AM	BCl3 MFC set to  0.000000
2/19/2012	9:02:21 AM	PH3 MFC set to  0.000000
2/19/2012	9:02:21 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:02:21 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:02:21 AM	Tube furnace set to 925
2/19/2012	9:03:51 AM	Helium valve closed
2/19/2012	9:03:51 AM	BCl3 valve closed
2/19/2012	9:03:51 AM	PH3 valve closed
2/19/2012	9:03:51 AM	SiCl4 pre valve closed
2/19/2012	9:03:51 AM	SiCl4 post valve closed
2/19/2012	9:03:51 AM	Main Vac valve closed
2/19/2012	9:03:51 AM	Bypass valve closed
2/19/2012	9:03:51 AM	H2 valve opened
2/19/2012	9:03:51 AM	Bubbler valve opened
2/19/2012	9:03:51 AM	Helium MFC set to  0.000000
2/19/2012	9:03:51 AM	H2 MFC set to  500.000000
2/19/2012	9:03:51 AM	BCl3 MFC set to  0.000000
2/19/2012	9:03:51 AM	PH3 MFC set to  0.000000
2/19/2012	9:03:51 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:03:51 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:03:52 AM	Tube furnace set to 900
2/19/2012	9:05:22 AM	H2 valve closed
2/19/2012	9:05:22 AM	BCl3 valve closed
2/19/2012	9:05:22 AM	PH3 valve closed
2/19/2012	9:05:22 AM	SiCl4 pre valve closed
2/19/2012	9:05:22 AM	SiCl4 post valve closed
2/19/2012	9:05:22 AM	Main Vac valve closed
2/19/2012	9:05:22 AM	Bypass valve closed
2/19/2012	9:05:22 AM	Helium valve opened
2/19/2012	9:05:22 AM	Bubbler valve opened
2/19/2012	9:05:22 AM	Helium MFC set to  500.000000
2/19/2012	9:05:22 AM	H2 MFC set to  0.000000
2/19/2012	9:05:22 AM	BCl3 MFC set to  0.000000
2/19/2012	9:05:22 AM	PH3 MFC set to  0.000000
2/19/2012	9:05:22 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:05:22 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:05:22 AM	Tube furnace set to 875
2/19/2012	9:06:52 AM	H2 valve closed
2/19/2012	9:06:52 AM	BCl3 valve closed
2/19/2012	9:06:52 AM	PH3 valve closed
2/19/2012	9:06:52 AM	SiCl4 pre valve closed
2/19/2012	9:06:52 AM	SiCl4 post valve closed
2/19/2012	9:06:52 AM	Main Vac valve closed
2/19/2012	9:06:52 AM	Bypass valve closed
2/19/2012	9:06:52 AM	Helium valve opened
2/19/2012	9:06:52 AM	Bubbler valve opened
2/19/2012	9:06:52 AM	Helium MFC set to  500.000000
2/19/2012	9:06:52 AM	H2 MFC set to  0.000000
2/19/2012	9:06:52 AM	BCl3 MFC set to  0.000000
2/19/2012	9:06:52 AM	PH3 MFC set to  0.000000
2/19/2012	9:06:52 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:06:52 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:06:52 AM	Tube furnace set to 850
2/19/2012	9:08:22 AM	H2 valve closed
2/19/2012	9:08:22 AM	BCl3 valve closed
2/19/2012	9:08:22 AM	PH3 valve closed
2/19/2012	9:08:22 AM	SiCl4 pre valve closed
2/19/2012	9:08:22 AM	SiCl4 post valve closed
2/19/2012	9:08:22 AM	Main Vac valve closed
2/19/2012	9:08:22 AM	Bypass valve closed
2/19/2012	9:08:22 AM	Helium valve opened
2/19/2012	9:08:22 AM	Bubbler valve opened
2/19/2012	9:08:22 AM	Helium MFC set to  500.000000
2/19/2012	9:08:22 AM	H2 MFC set to  0.000000
2/19/2012	9:08:22 AM	BCl3 MFC set to  0.000000
2/19/2012	9:08:22 AM	PH3 MFC set to  0.000000
2/19/2012	9:08:22 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:08:22 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:08:22 AM	Tube furnace set to 825
2/19/2012	9:09:52 AM	H2 valve closed
2/19/2012	9:09:52 AM	BCl3 valve closed
2/19/2012	9:09:52 AM	PH3 valve closed
2/19/2012	9:09:52 AM	SiCl4 pre valve closed
2/19/2012	9:09:52 AM	SiCl4 post valve closed
2/19/2012	9:09:52 AM	Main Vac valve closed
2/19/2012	9:09:52 AM	Bypass valve closed
2/19/2012	9:09:52 AM	Helium valve opened
2/19/2012	9:09:52 AM	Bubbler valve opened
2/19/2012	9:09:52 AM	Helium MFC set to  500.000000
2/19/2012	9:09:52 AM	H2 MFC set to  0.000000
2/19/2012	9:09:52 AM	BCl3 MFC set to  0.000000
2/19/2012	9:09:52 AM	PH3 MFC set to  0.000000
2/19/2012	9:09:52 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:09:52 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:09:52 AM	Tube furnace set to 800
2/19/2012	9:11:22 AM	H2 valve closed
2/19/2012	9:11:22 AM	BCl3 valve closed
2/19/2012	9:11:22 AM	PH3 valve closed
2/19/2012	9:11:22 AM	SiCl4 pre valve closed
2/19/2012	9:11:22 AM	SiCl4 post valve closed
2/19/2012	9:11:22 AM	Main Vac valve closed
2/19/2012	9:11:22 AM	Bypass valve closed
2/19/2012	9:11:22 AM	Helium valve opened
2/19/2012	9:11:22 AM	Bubbler valve opened
2/19/2012	9:11:22 AM	Helium MFC set to  500.000000
2/19/2012	9:11:22 AM	H2 MFC set to  0.000000
2/19/2012	9:11:22 AM	BCl3 MFC set to  0.000000
2/19/2012	9:11:22 AM	PH3 MFC set to  0.000000
2/19/2012	9:11:22 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:11:22 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:11:23 AM	Tube furnace set to 0
2/19/2012	9:26:22 AM	Helium valve closed
2/19/2012	9:26:22 AM	H2 valve closed
2/19/2012	9:26:23 AM	BCl3 valve closed
2/19/2012	9:26:23 AM	PH3 valve closed
2/19/2012	9:26:23 AM	SiCl4 pre valve closed
2/19/2012	9:26:23 AM	SiCl4 post valve closed
2/19/2012	9:26:23 AM	Main Vac valve closed
2/19/2012	9:26:23 AM	Bypass valve closed
2/19/2012	9:26:23 AM	Bubbler valve closed
2/19/2012	9:26:23 AM	Helium MFC set to  0.000000
2/19/2012	9:26:23 AM	H2 MFC set to  0.000000
2/19/2012	9:26:23 AM	BCl3 MFC set to  0.000000
2/19/2012	9:26:23 AM	PH3 MFC set to  0.000000
2/19/2012	9:26:23 AM	SiCl4 MFC set to  0.000000
2/19/2012	9:26:23 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:26:23 AM	Tube furnace set to 0
2/19/2012	10:26:23 AM	H2 valve closed
2/19/2012	10:26:23 AM	BCl3 valve closed
2/19/2012	10:26:23 AM	PH3 valve closed
2/19/2012	10:26:23 AM	SiCl4 pre valve closed
2/19/2012	10:26:23 AM	SiCl4 post valve closed
2/19/2012	10:26:23 AM	Main Vac valve closed
2/19/2012	10:26:23 AM	Bypass valve closed
2/19/2012	10:26:23 AM	Bubbler valve closed
2/19/2012	10:26:23 AM	Helium valve opened
2/19/2012	10:26:23 AM	Helium MFC set to  500.000000
2/19/2012	10:26:23 AM	H2 MFC set to  0.000000
2/19/2012	10:26:23 AM	BCl3 MFC set to  0.000000
2/19/2012	10:26:23 AM	PH3 MFC set to  0.000000
2/19/2012	10:26:23 AM	SiCl4 MFC set to  0.000000
2/19/2012	10:26:23 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:26:23 AM	Tube furnace set to 0
2/19/2012	10:26:28 AM	H2 valve closed
2/19/2012	10:26:28 AM	BCl3 valve closed
2/19/2012	10:26:28 AM	PH3 valve closed
2/19/2012	10:26:28 AM	SiCl4 pre valve closed
2/19/2012	10:26:28 AM	SiCl4 post valve closed
2/19/2012	10:26:28 AM	Main Vac valve closed
2/19/2012	10:26:28 AM	Bypass valve closed
2/19/2012	10:26:28 AM	Helium valve opened
2/19/2012	10:26:28 AM	Bubbler valve opened
2/19/2012	10:26:28 AM	Helium MFC set to  500.000000
2/19/2012	10:26:28 AM	H2 MFC set to  0.000000
2/19/2012	10:26:28 AM	BCl3 MFC set to  0.000000
2/19/2012	10:26:28 AM	PH3 MFC set to  0.000000
2/19/2012	10:26:28 AM	SiCl4 MFC set to  0.000000
2/19/2012	10:26:28 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:26:28 AM	Tube furnace set to 0
2/19/2012	10:28:28 AM	Helium valve closed
2/19/2012	10:28:28 AM	H2 valve closed
2/19/2012	10:28:28 AM	BCl3 valve closed
2/19/2012	10:28:28 AM	PH3 valve closed
2/19/2012	10:28:28 AM	SiCl4 pre valve closed
2/19/2012	10:28:28 AM	SiCl4 post valve closed
2/19/2012	10:28:28 AM	Main Vac valve closed
2/19/2012	10:28:28 AM	Bypass valve closed
2/19/2012	10:28:28 AM	Bubbler valve closed
2/19/2012	10:28:28 AM	Helium MFC set to  0.000000
2/19/2012	10:28:28 AM	H2 MFC set to  0.000000
2/19/2012	10:28:28 AM	BCl3 MFC set to  0.000000
2/19/2012	10:28:28 AM	PH3 MFC set to  0.000000
2/19/2012	10:28:28 AM	SiCl4 MFC set to  0.000000
2/19/2012	10:28:28 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:28:29 AM	Tube furnace set to 0
2/19/2012	10:28:30 AM	Helium valve closed
2/19/2012	10:28:30 AM	H2 valve closed
2/19/2012	10:28:30 AM	BCl3 valve closed
2/19/2012	10:28:30 AM	PH3 valve closed
2/19/2012	10:28:30 AM	SiCl4 pre valve closed
2/19/2012	10:28:30 AM	SiCl4 post valve closed
2/19/2012	10:28:30 AM	Main Vac valve closed
2/19/2012	10:28:30 AM	Bubbler valve closed
2/19/2012	10:28:30 AM	Bypass valve opened
2/19/2012	10:28:30 AM	Helium MFC set to  0.000000
2/19/2012	10:28:30 AM	H2 MFC set to  0.000000
2/19/2012	10:28:30 AM	BCl3 MFC set to  0.000000
2/19/2012	10:28:30 AM	PH3 MFC set to  0.000000
2/19/2012	10:28:30 AM	SiCl4 MFC set to  0.000000
2/19/2012	10:28:30 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:28:30 AM	Tube furnace set to 0
2/19/2012	10:29:16 AM	Helium valve closed
2/19/2012	10:29:16 AM	H2 valve closed
2/19/2012	10:29:16 AM	BCl3 valve closed
2/19/2012	10:29:16 AM	PH3 valve closed
2/19/2012	10:29:16 AM	SiCl4 pre valve closed
2/19/2012	10:29:16 AM	SiCl4 post valve closed
2/19/2012	10:29:16 AM	Main Vac valve closed
2/19/2012	10:29:16 AM	Bubbler valve closed
2/19/2012	10:29:16 AM	Bypass valve opened
2/19/2012	10:29:16 AM	Helium MFC set to  0.000000
2/19/2012	10:29:16 AM	H2 MFC set to  0.000000
2/19/2012	10:29:16 AM	BCl3 MFC set to  0.000000
2/19/2012	10:29:16 AM	PH3 MFC set to  0.000000
2/19/2012	10:29:16 AM	SiCl4 MFC set to  0.000000
2/19/2012	10:29:16 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:29:16 AM	Tube furnace set to 0
2/19/2012	10:30:17 AM	Helium valve closed
2/19/2012	10:30:17 AM	H2 valve closed
2/19/2012	10:30:17 AM	BCl3 valve closed
2/19/2012	10:30:17 AM	PH3 valve closed
2/19/2012	10:30:17 AM	SiCl4 pre valve closed
2/19/2012	10:30:17 AM	SiCl4 post valve closed
2/19/2012	10:30:17 AM	Bypass valve closed
2/19/2012	10:30:17 AM	Bubbler valve closed
2/19/2012	10:30:17 AM	Main Vac valve opened
2/19/2012	10:30:17 AM	Helium MFC set to  0.000000
2/19/2012	10:30:17 AM	H2 MFC set to  0.000000
2/19/2012	10:30:17 AM	BCl3 MFC set to  0.000000
2/19/2012	10:30:17 AM	PH3 MFC set to  0.000000
2/19/2012	10:30:17 AM	SiCl4 MFC set to  0.000000
2/19/2012	10:30:17 AM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:30:17 AM	Tube furnace set to 0
2/19/2012	12:11:03 PM	Run finished at 12:11 PM
2/19/2012	12:11:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2012	12:11:32 PM	Recipe started at 12:11 PM
2/19/2012	12:11:32 PM	Helium valve closed
2/19/2012	12:11:32 PM	H2 valve closed
2/19/2012	12:11:32 PM	BCl3 valve closed
2/19/2012	12:11:32 PM	PH3 valve closed
2/19/2012	12:11:32 PM	SiCl4 pre valve closed
2/19/2012	12:11:32 PM	SiCl4 post valve closed
2/19/2012	12:11:32 PM	Main Vac valve closed
2/19/2012	12:11:32 PM	Bypass valve closed
2/19/2012	12:11:32 PM	Bubbler valve closed
2/19/2012	12:11:32 PM	Helium MFC set to  0.000000
2/19/2012	12:11:32 PM	H2 MFC set to  0.000000
2/19/2012	12:11:32 PM	BCl3 MFC set to  0.000000
2/19/2012	12:11:32 PM	PH3 MFC set to  0.000000
2/19/2012	12:11:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:11:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:11:32 PM	Tube furnace set to 0
2/19/2012	12:11:35 PM	H2 valve closed
2/19/2012	12:11:35 PM	BCl3 valve closed
2/19/2012	12:11:35 PM	PH3 valve closed
2/19/2012	12:11:35 PM	SiCl4 pre valve closed
2/19/2012	12:11:35 PM	SiCl4 post valve closed
2/19/2012	12:11:35 PM	Main Vac valve closed
2/19/2012	12:11:35 PM	Bypass valve closed
2/19/2012	12:11:35 PM	Bubbler valve closed
2/19/2012	12:11:35 PM	Helium valve opened
2/19/2012	12:11:35 PM	Helium MFC set to  500.000000
2/19/2012	12:11:35 PM	H2 MFC set to  0.000000
2/19/2012	12:11:35 PM	BCl3 MFC set to  0.000000
2/19/2012	12:11:35 PM	PH3 MFC set to  0.000000
2/19/2012	12:11:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:11:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:11:35 PM	Tube furnace set to 0
2/19/2012	12:12:38 PM	Helium valve closed
2/19/2012	12:12:38 PM	H2 valve closed
2/19/2012	12:12:38 PM	BCl3 valve closed
2/19/2012	12:12:38 PM	PH3 valve closed
2/19/2012	12:12:38 PM	SiCl4 pre valve closed
2/19/2012	12:12:38 PM	SiCl4 post valve closed
2/19/2012	12:12:38 PM	Main Vac valve closed
2/19/2012	12:12:38 PM	Bypass valve closed
2/19/2012	12:12:38 PM	Bubbler valve closed
2/19/2012	12:12:38 PM	Helium MFC set to  0.000000
2/19/2012	12:12:38 PM	H2 MFC set to  0.000000
2/19/2012	12:12:38 PM	BCl3 MFC set to  0.000000
2/19/2012	12:12:38 PM	PH3 MFC set to  0.000000
2/19/2012	12:12:38 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:12:38 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:12:38 PM	Tube furnace set to 0
2/19/2012	12:12:39 PM	Run finished at 12:12 PM
2/19/2012	12:12:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2012	12:22:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	12:22:36 PM	Recipe started at 12:22 PM
2/19/2012	12:22:36 PM	Helium valve closed
2/19/2012	12:22:36 PM	H2 valve closed
2/19/2012	12:22:36 PM	BCl3 valve closed
2/19/2012	12:22:36 PM	PH3 valve closed
2/19/2012	12:22:36 PM	SiCl4 pre valve closed
2/19/2012	12:22:36 PM	SiCl4 post valve closed
2/19/2012	12:22:36 PM	Main Vac valve closed
2/19/2012	12:22:36 PM	Bubbler valve closed
2/19/2012	12:22:36 PM	Bypass valve opened
2/19/2012	12:22:36 PM	Helium MFC set to  0.000000
2/19/2012	12:22:36 PM	H2 MFC set to  0.000000
2/19/2012	12:22:36 PM	BCl3 MFC set to  0.000000
2/19/2012	12:22:36 PM	PH3 MFC set to  0.000000
2/19/2012	12:22:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:22:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:22:36 PM	Tube furnace set to 0
2/19/2012	12:23:41 PM	Helium valve closed
2/19/2012	12:23:41 PM	H2 valve closed
2/19/2012	12:23:41 PM	BCl3 valve closed
2/19/2012	12:23:41 PM	PH3 valve closed
2/19/2012	12:23:41 PM	SiCl4 pre valve closed
2/19/2012	12:23:41 PM	SiCl4 post valve closed
2/19/2012	12:23:41 PM	Main Vac valve closed
2/19/2012	12:23:41 PM	Bubbler valve closed
2/19/2012	12:23:41 PM	Bypass valve opened
2/19/2012	12:23:41 PM	Helium MFC set to  0.000000
2/19/2012	12:23:41 PM	H2 MFC set to  0.000000
2/19/2012	12:23:41 PM	BCl3 MFC set to  0.000000
2/19/2012	12:23:41 PM	PH3 MFC set to  0.000000
2/19/2012	12:23:41 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:23:41 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:23:42 PM	Tube furnace set to 0
2/19/2012	12:24:42 PM	Helium valve closed
2/19/2012	12:24:42 PM	H2 valve closed
2/19/2012	12:24:42 PM	BCl3 valve closed
2/19/2012	12:24:42 PM	PH3 valve closed
2/19/2012	12:24:42 PM	SiCl4 pre valve closed
2/19/2012	12:24:42 PM	SiCl4 post valve closed
2/19/2012	12:24:42 PM	Bypass valve closed
2/19/2012	12:24:42 PM	Bubbler valve closed
2/19/2012	12:24:42 PM	Main Vac valve opened
2/19/2012	12:24:42 PM	Helium MFC set to  0.000000
2/19/2012	12:24:42 PM	H2 MFC set to  0.000000
2/19/2012	12:24:42 PM	BCl3 MFC set to  0.000000
2/19/2012	12:24:42 PM	PH3 MFC set to  0.000000
2/19/2012	12:24:42 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:24:42 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:24:42 PM	Tube furnace set to 0
2/19/2012	12:24:43 PM	Run finished at 12:24 PM
2/19/2012	12:24:43 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	12:25:32 PM	Recipe started at 12:25 PM
2/19/2012	12:25:32 PM	Helium valve closed
2/19/2012	12:25:32 PM	H2 valve closed
2/19/2012	12:25:32 PM	BCl3 valve closed
2/19/2012	12:25:32 PM	PH3 valve closed
2/19/2012	12:25:32 PM	SiCl4 pre valve closed
2/19/2012	12:25:32 PM	SiCl4 post valve closed
2/19/2012	12:25:32 PM	Bypass valve closed
2/19/2012	12:25:32 PM	Bubbler valve closed
2/19/2012	12:25:32 PM	Main Vac valve opened
2/19/2012	12:25:32 PM	Helium MFC set to  0.000000
2/19/2012	12:25:32 PM	H2 MFC set to  0.000000
2/19/2012	12:25:32 PM	BCl3 MFC set to  0.000000
2/19/2012	12:25:32 PM	PH3 MFC set to  0.000000
2/19/2012	12:25:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:25:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:25:32 PM	Tube furnace set to 150
2/19/2012	12:26:02 PM	H2 valve closed
2/19/2012	12:26:02 PM	BCl3 valve closed
2/19/2012	12:26:02 PM	PH3 valve closed
2/19/2012	12:26:02 PM	SiCl4 pre valve closed
2/19/2012	12:26:02 PM	SiCl4 post valve closed
2/19/2012	12:26:02 PM	Bypass valve closed
2/19/2012	12:26:02 PM	Bubbler valve closed
2/19/2012	12:26:02 PM	Helium valve opened
2/19/2012	12:26:02 PM	Main Vac valve opened
2/19/2012	12:26:02 PM	Helium MFC set to  20.000000
2/19/2012	12:26:02 PM	H2 MFC set to  0.000000
2/19/2012	12:26:02 PM	BCl3 MFC set to  0.000000
2/19/2012	12:26:02 PM	PH3 MFC set to  0.000000
2/19/2012	12:26:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:26:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:26:02 PM	Tube furnace set to 150
2/19/2012	12:26:32 PM	Helium valve closed
2/19/2012	12:26:32 PM	H2 valve closed
2/19/2012	12:26:32 PM	BCl3 valve closed
2/19/2012	12:26:32 PM	PH3 valve closed
2/19/2012	12:26:32 PM	SiCl4 pre valve closed
2/19/2012	12:26:32 PM	SiCl4 post valve closed
2/19/2012	12:26:32 PM	Bypass valve closed
2/19/2012	12:26:32 PM	Bubbler valve closed
2/19/2012	12:26:32 PM	Main Vac valve opened
2/19/2012	12:26:32 PM	Helium MFC set to  0.000000
2/19/2012	12:26:32 PM	H2 MFC set to  0.000000
2/19/2012	12:26:32 PM	BCl3 MFC set to  0.000000
2/19/2012	12:26:32 PM	PH3 MFC set to  0.000000
2/19/2012	12:26:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:26:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:26:32 PM	Tube furnace set to 150
2/19/2012	12:27:02 PM	H2 valve closed
2/19/2012	12:27:02 PM	BCl3 valve closed
2/19/2012	12:27:02 PM	PH3 valve closed
2/19/2012	12:27:02 PM	SiCl4 pre valve closed
2/19/2012	12:27:02 PM	SiCl4 post valve closed
2/19/2012	12:27:02 PM	Bypass valve closed
2/19/2012	12:27:02 PM	Bubbler valve closed
2/19/2012	12:27:02 PM	Helium valve opened
2/19/2012	12:27:02 PM	Main Vac valve opened
2/19/2012	12:27:02 PM	Helium MFC set to  20.000000
2/19/2012	12:27:02 PM	H2 MFC set to  0.000000
2/19/2012	12:27:02 PM	BCl3 MFC set to  0.000000
2/19/2012	12:27:02 PM	PH3 MFC set to  0.000000
2/19/2012	12:27:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:27:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:27:03 PM	Tube furnace set to 150
2/19/2012	12:27:33 PM	Helium valve closed
2/19/2012	12:27:33 PM	H2 valve closed
2/19/2012	12:27:33 PM	BCl3 valve closed
2/19/2012	12:27:33 PM	PH3 valve closed
2/19/2012	12:27:33 PM	SiCl4 pre valve closed
2/19/2012	12:27:33 PM	SiCl4 post valve closed
2/19/2012	12:27:33 PM	Bypass valve closed
2/19/2012	12:27:33 PM	Bubbler valve closed
2/19/2012	12:27:33 PM	Main Vac valve opened
2/19/2012	12:27:33 PM	Helium MFC set to  0.000000
2/19/2012	12:27:33 PM	H2 MFC set to  0.000000
2/19/2012	12:27:33 PM	BCl3 MFC set to  0.000000
2/19/2012	12:27:33 PM	PH3 MFC set to  0.000000
2/19/2012	12:27:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:27:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:27:33 PM	Tube furnace set to 150
2/19/2012	12:28:03 PM	H2 valve closed
2/19/2012	12:28:03 PM	BCl3 valve closed
2/19/2012	12:28:03 PM	PH3 valve closed
2/19/2012	12:28:03 PM	SiCl4 pre valve closed
2/19/2012	12:28:03 PM	SiCl4 post valve closed
2/19/2012	12:28:03 PM	Bypass valve closed
2/19/2012	12:28:03 PM	Bubbler valve closed
2/19/2012	12:28:03 PM	Helium valve opened
2/19/2012	12:28:03 PM	Main Vac valve opened
2/19/2012	12:28:03 PM	Helium MFC set to  20.000000
2/19/2012	12:28:03 PM	H2 MFC set to  0.000000
2/19/2012	12:28:03 PM	BCl3 MFC set to  0.000000
2/19/2012	12:28:03 PM	PH3 MFC set to  0.000000
2/19/2012	12:28:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:28:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:28:03 PM	Tube furnace set to 150
2/19/2012	12:28:33 PM	Helium valve closed
2/19/2012	12:28:33 PM	H2 valve closed
2/19/2012	12:28:33 PM	BCl3 valve closed
2/19/2012	12:28:33 PM	PH3 valve closed
2/19/2012	12:28:33 PM	SiCl4 pre valve closed
2/19/2012	12:28:33 PM	SiCl4 post valve closed
2/19/2012	12:28:33 PM	Bypass valve closed
2/19/2012	12:28:33 PM	Bubbler valve closed
2/19/2012	12:28:33 PM	Main Vac valve opened
2/19/2012	12:28:33 PM	Helium MFC set to  0.000000
2/19/2012	12:28:33 PM	H2 MFC set to  0.000000
2/19/2012	12:28:33 PM	BCl3 MFC set to  0.000000
2/19/2012	12:28:33 PM	PH3 MFC set to  0.000000
2/19/2012	12:28:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:28:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:28:33 PM	Tube furnace set to 150
2/19/2012	12:29:03 PM	H2 valve closed
2/19/2012	12:29:03 PM	BCl3 valve closed
2/19/2012	12:29:03 PM	PH3 valve closed
2/19/2012	12:29:03 PM	SiCl4 pre valve closed
2/19/2012	12:29:03 PM	SiCl4 post valve closed
2/19/2012	12:29:03 PM	Bypass valve closed
2/19/2012	12:29:03 PM	Bubbler valve closed
2/19/2012	12:29:03 PM	Helium valve opened
2/19/2012	12:29:03 PM	Main Vac valve opened
2/19/2012	12:29:03 PM	Helium MFC set to  20.000000
2/19/2012	12:29:03 PM	H2 MFC set to  0.000000
2/19/2012	12:29:03 PM	BCl3 MFC set to  0.000000
2/19/2012	12:29:03 PM	PH3 MFC set to  0.000000
2/19/2012	12:29:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:29:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:29:03 PM	Tube furnace set to 150
2/19/2012	12:29:33 PM	Helium valve closed
2/19/2012	12:29:33 PM	H2 valve closed
2/19/2012	12:29:33 PM	BCl3 valve closed
2/19/2012	12:29:33 PM	PH3 valve closed
2/19/2012	12:29:33 PM	SiCl4 pre valve closed
2/19/2012	12:29:33 PM	SiCl4 post valve closed
2/19/2012	12:29:33 PM	Bypass valve closed
2/19/2012	12:29:33 PM	Bubbler valve closed
2/19/2012	12:29:33 PM	Main Vac valve opened
2/19/2012	12:29:33 PM	Helium MFC set to  0.000000
2/19/2012	12:29:33 PM	H2 MFC set to  0.000000
2/19/2012	12:29:33 PM	BCl3 MFC set to  0.000000
2/19/2012	12:29:33 PM	PH3 MFC set to  0.000000
2/19/2012	12:29:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:29:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:29:34 PM	Tube furnace set to 150
2/19/2012	12:30:04 PM	H2 valve closed
2/19/2012	12:30:04 PM	BCl3 valve closed
2/19/2012	12:30:04 PM	PH3 valve closed
2/19/2012	12:30:04 PM	SiCl4 pre valve closed
2/19/2012	12:30:04 PM	SiCl4 post valve closed
2/19/2012	12:30:04 PM	Bypass valve closed
2/19/2012	12:30:04 PM	Bubbler valve closed
2/19/2012	12:30:04 PM	Helium valve opened
2/19/2012	12:30:04 PM	Main Vac valve opened
2/19/2012	12:30:04 PM	Helium MFC set to  20.000000
2/19/2012	12:30:04 PM	H2 MFC set to  0.000000
2/19/2012	12:30:04 PM	BCl3 MFC set to  0.000000
2/19/2012	12:30:04 PM	PH3 MFC set to  0.000000
2/19/2012	12:30:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:30:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:30:04 PM	Tube furnace set to 150
2/19/2012	12:30:34 PM	Helium valve closed
2/19/2012	12:30:34 PM	H2 valve closed
2/19/2012	12:30:34 PM	BCl3 valve closed
2/19/2012	12:30:34 PM	PH3 valve closed
2/19/2012	12:30:34 PM	SiCl4 pre valve closed
2/19/2012	12:30:34 PM	SiCl4 post valve closed
2/19/2012	12:30:34 PM	Bypass valve closed
2/19/2012	12:30:34 PM	Bubbler valve closed
2/19/2012	12:30:34 PM	Main Vac valve opened
2/19/2012	12:30:34 PM	Helium MFC set to  0.000000
2/19/2012	12:30:34 PM	H2 MFC set to  0.000000
2/19/2012	12:30:34 PM	BCl3 MFC set to  0.000000
2/19/2012	12:30:34 PM	PH3 MFC set to  0.000000
2/19/2012	12:30:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:30:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:30:34 PM	Tube furnace set to 150
2/19/2012	12:31:04 PM	H2 valve closed
2/19/2012	12:31:04 PM	BCl3 valve closed
2/19/2012	12:31:04 PM	PH3 valve closed
2/19/2012	12:31:04 PM	SiCl4 pre valve closed
2/19/2012	12:31:04 PM	SiCl4 post valve closed
2/19/2012	12:31:04 PM	Bypass valve closed
2/19/2012	12:31:04 PM	Bubbler valve closed
2/19/2012	12:31:04 PM	Helium valve opened
2/19/2012	12:31:04 PM	Main Vac valve opened
2/19/2012	12:31:04 PM	Helium MFC set to  20.000000
2/19/2012	12:31:04 PM	H2 MFC set to  0.000000
2/19/2012	12:31:04 PM	BCl3 MFC set to  0.000000
2/19/2012	12:31:04 PM	PH3 MFC set to  0.000000
2/19/2012	12:31:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:31:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:31:04 PM	Tube furnace set to 150
2/19/2012	12:31:34 PM	Helium valve closed
2/19/2012	12:31:34 PM	H2 valve closed
2/19/2012	12:31:34 PM	BCl3 valve closed
2/19/2012	12:31:34 PM	PH3 valve closed
2/19/2012	12:31:34 PM	SiCl4 pre valve closed
2/19/2012	12:31:34 PM	SiCl4 post valve closed
2/19/2012	12:31:34 PM	Bypass valve closed
2/19/2012	12:31:34 PM	Bubbler valve closed
2/19/2012	12:31:34 PM	Main Vac valve opened
2/19/2012	12:31:34 PM	Helium MFC set to  0.000000
2/19/2012	12:31:34 PM	H2 MFC set to  0.000000
2/19/2012	12:31:34 PM	BCl3 MFC set to  0.000000
2/19/2012	12:31:34 PM	PH3 MFC set to  0.000000
2/19/2012	12:31:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:31:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:31:34 PM	Tube furnace set to 150
2/19/2012	12:32:04 PM	H2 valve closed
2/19/2012	12:32:04 PM	BCl3 valve closed
2/19/2012	12:32:04 PM	PH3 valve closed
2/19/2012	12:32:04 PM	SiCl4 pre valve closed
2/19/2012	12:32:04 PM	SiCl4 post valve closed
2/19/2012	12:32:04 PM	Bypass valve closed
2/19/2012	12:32:04 PM	Bubbler valve closed
2/19/2012	12:32:04 PM	Helium valve opened
2/19/2012	12:32:04 PM	Main Vac valve opened
2/19/2012	12:32:04 PM	Helium MFC set to  20.000000
2/19/2012	12:32:04 PM	H2 MFC set to  0.000000
2/19/2012	12:32:04 PM	BCl3 MFC set to  0.000000
2/19/2012	12:32:05 PM	PH3 MFC set to  0.000000
2/19/2012	12:32:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:32:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:32:05 PM	Tube furnace set to 150
2/19/2012	12:32:35 PM	Helium valve closed
2/19/2012	12:32:35 PM	H2 valve closed
2/19/2012	12:32:35 PM	BCl3 valve closed
2/19/2012	12:32:35 PM	PH3 valve closed
2/19/2012	12:32:35 PM	SiCl4 pre valve closed
2/19/2012	12:32:35 PM	SiCl4 post valve closed
2/19/2012	12:32:35 PM	Bypass valve closed
2/19/2012	12:32:35 PM	Bubbler valve closed
2/19/2012	12:32:35 PM	Main Vac valve opened
2/19/2012	12:32:35 PM	Helium MFC set to  0.000000
2/19/2012	12:32:35 PM	H2 MFC set to  0.000000
2/19/2012	12:32:35 PM	BCl3 MFC set to  0.000000
2/19/2012	12:32:35 PM	PH3 MFC set to  0.000000
2/19/2012	12:32:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:32:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:32:35 PM	Tube furnace set to 150
2/19/2012	12:33:05 PM	H2 valve closed
2/19/2012	12:33:05 PM	BCl3 valve closed
2/19/2012	12:33:05 PM	PH3 valve closed
2/19/2012	12:33:05 PM	SiCl4 pre valve closed
2/19/2012	12:33:05 PM	SiCl4 post valve closed
2/19/2012	12:33:05 PM	Bypass valve closed
2/19/2012	12:33:05 PM	Bubbler valve closed
2/19/2012	12:33:05 PM	Helium valve opened
2/19/2012	12:33:05 PM	Main Vac valve opened
2/19/2012	12:33:05 PM	Helium MFC set to  20.000000
2/19/2012	12:33:05 PM	H2 MFC set to  0.000000
2/19/2012	12:33:05 PM	BCl3 MFC set to  0.000000
2/19/2012	12:33:05 PM	PH3 MFC set to  0.000000
2/19/2012	12:33:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:33:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:33:05 PM	Tube furnace set to 150
2/19/2012	12:33:35 PM	Helium valve closed
2/19/2012	12:33:35 PM	H2 valve closed
2/19/2012	12:33:35 PM	BCl3 valve closed
2/19/2012	12:33:35 PM	PH3 valve closed
2/19/2012	12:33:35 PM	SiCl4 pre valve closed
2/19/2012	12:33:35 PM	SiCl4 post valve closed
2/19/2012	12:33:35 PM	Bypass valve closed
2/19/2012	12:33:35 PM	Bubbler valve closed
2/19/2012	12:33:35 PM	Main Vac valve opened
2/19/2012	12:33:35 PM	Helium MFC set to  0.000000
2/19/2012	12:33:35 PM	H2 MFC set to  0.000000
2/19/2012	12:33:35 PM	BCl3 MFC set to  0.000000
2/19/2012	12:33:35 PM	PH3 MFC set to  0.000000
2/19/2012	12:33:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:33:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:33:35 PM	Tube furnace set to 150
2/19/2012	12:34:05 PM	H2 valve closed
2/19/2012	12:34:05 PM	BCl3 valve closed
2/19/2012	12:34:05 PM	PH3 valve closed
2/19/2012	12:34:05 PM	SiCl4 pre valve closed
2/19/2012	12:34:05 PM	SiCl4 post valve closed
2/19/2012	12:34:05 PM	Bypass valve closed
2/19/2012	12:34:05 PM	Bubbler valve closed
2/19/2012	12:34:05 PM	Helium valve opened
2/19/2012	12:34:05 PM	Main Vac valve opened
2/19/2012	12:34:05 PM	Helium MFC set to  20.000000
2/19/2012	12:34:05 PM	H2 MFC set to  0.000000
2/19/2012	12:34:05 PM	BCl3 MFC set to  0.000000
2/19/2012	12:34:05 PM	PH3 MFC set to  0.000000
2/19/2012	12:34:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:34:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:34:05 PM	Tube furnace set to 150
2/19/2012	12:34:36 PM	Helium valve closed
2/19/2012	12:34:36 PM	H2 valve closed
2/19/2012	12:34:36 PM	BCl3 valve closed
2/19/2012	12:34:36 PM	PH3 valve closed
2/19/2012	12:34:36 PM	SiCl4 pre valve closed
2/19/2012	12:34:36 PM	SiCl4 post valve closed
2/19/2012	12:34:36 PM	Bypass valve closed
2/19/2012	12:34:36 PM	Bubbler valve closed
2/19/2012	12:34:36 PM	Main Vac valve opened
2/19/2012	12:34:36 PM	Helium MFC set to  0.000000
2/19/2012	12:34:36 PM	H2 MFC set to  0.000000
2/19/2012	12:34:36 PM	BCl3 MFC set to  0.000000
2/19/2012	12:34:36 PM	PH3 MFC set to  0.000000
2/19/2012	12:34:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:34:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:34:36 PM	Tube furnace set to 150
2/19/2012	12:35:06 PM	H2 valve closed
2/19/2012	12:35:06 PM	BCl3 valve closed
2/19/2012	12:35:06 PM	PH3 valve closed
2/19/2012	12:35:06 PM	SiCl4 pre valve closed
2/19/2012	12:35:06 PM	SiCl4 post valve closed
2/19/2012	12:35:06 PM	Bypass valve closed
2/19/2012	12:35:06 PM	Bubbler valve closed
2/19/2012	12:35:06 PM	Helium valve opened
2/19/2012	12:35:06 PM	Main Vac valve opened
2/19/2012	12:35:06 PM	Helium MFC set to  20.000000
2/19/2012	12:35:06 PM	H2 MFC set to  0.000000
2/19/2012	12:35:06 PM	BCl3 MFC set to  0.000000
2/19/2012	12:35:06 PM	PH3 MFC set to  0.000000
2/19/2012	12:35:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:35:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:35:06 PM	Tube furnace set to 150
2/19/2012	12:35:36 PM	Helium valve closed
2/19/2012	12:35:36 PM	H2 valve closed
2/19/2012	12:35:36 PM	BCl3 valve closed
2/19/2012	12:35:36 PM	PH3 valve closed
2/19/2012	12:35:36 PM	SiCl4 pre valve closed
2/19/2012	12:35:36 PM	SiCl4 post valve closed
2/19/2012	12:35:36 PM	Bypass valve closed
2/19/2012	12:35:36 PM	Bubbler valve closed
2/19/2012	12:35:36 PM	Main Vac valve opened
2/19/2012	12:35:36 PM	Helium MFC set to  0.000000
2/19/2012	12:35:36 PM	H2 MFC set to  0.000000
2/19/2012	12:35:36 PM	BCl3 MFC set to  0.000000
2/19/2012	12:35:36 PM	PH3 MFC set to  0.000000
2/19/2012	12:35:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:35:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:35:36 PM	Tube furnace set to 150
2/19/2012	12:35:37 PM	Run finished at 12:35 PM
2/19/2012	12:35:58 PM	Recipe started at 12:35 PM
2/19/2012	12:35:58 PM	Helium valve closed
2/19/2012	12:35:58 PM	H2 valve closed
2/19/2012	12:35:58 PM	BCl3 valve closed
2/19/2012	12:35:58 PM	PH3 valve closed
2/19/2012	12:35:58 PM	SiCl4 pre valve closed
2/19/2012	12:35:58 PM	SiCl4 post valve closed
2/19/2012	12:35:58 PM	Bypass valve closed
2/19/2012	12:35:58 PM	Bubbler valve closed
2/19/2012	12:35:58 PM	Main Vac valve opened
2/19/2012	12:35:58 PM	Helium MFC set to  0.000000
2/19/2012	12:35:58 PM	H2 MFC set to  0.000000
2/19/2012	12:35:58 PM	BCl3 MFC set to  0.000000
2/19/2012	12:35:58 PM	PH3 MFC set to  0.000000
2/19/2012	12:35:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:35:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:35:58 PM	Tube furnace set to 150
2/19/2012	12:35:58 PM	H2 valve closed
2/19/2012	12:35:58 PM	BCl3 valve closed
2/19/2012	12:35:58 PM	PH3 valve closed
2/19/2012	12:35:58 PM	SiCl4 pre valve closed
2/19/2012	12:35:58 PM	SiCl4 post valve closed
2/19/2012	12:35:58 PM	Bypass valve closed
2/19/2012	12:35:58 PM	Bubbler valve closed
2/19/2012	12:35:58 PM	Helium valve opened
2/19/2012	12:35:58 PM	Main Vac valve opened
2/19/2012	12:35:58 PM	Helium MFC set to  20.000000
2/19/2012	12:35:58 PM	H2 MFC set to  0.000000
2/19/2012	12:35:58 PM	BCl3 MFC set to  0.000000
2/19/2012	12:35:58 PM	PH3 MFC set to  0.000000
2/19/2012	12:35:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:35:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:35:58 PM	Tube furnace set to 150
2/19/2012	12:36:28 PM	Helium valve closed
2/19/2012	12:36:28 PM	H2 valve closed
2/19/2012	12:36:28 PM	BCl3 valve closed
2/19/2012	12:36:28 PM	PH3 valve closed
2/19/2012	12:36:28 PM	SiCl4 pre valve closed
2/19/2012	12:36:28 PM	SiCl4 post valve closed
2/19/2012	12:36:28 PM	Bypass valve closed
2/19/2012	12:36:28 PM	Bubbler valve closed
2/19/2012	12:36:28 PM	Main Vac valve opened
2/19/2012	12:36:28 PM	Helium MFC set to  0.000000
2/19/2012	12:36:28 PM	H2 MFC set to  0.000000
2/19/2012	12:36:28 PM	BCl3 MFC set to  0.000000
2/19/2012	12:36:28 PM	PH3 MFC set to  0.000000
2/19/2012	12:36:28 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:36:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:36:28 PM	Tube furnace set to 150
2/19/2012	12:36:59 PM	H2 valve closed
2/19/2012	12:36:59 PM	BCl3 valve closed
2/19/2012	12:36:59 PM	PH3 valve closed
2/19/2012	12:36:59 PM	SiCl4 pre valve closed
2/19/2012	12:36:59 PM	SiCl4 post valve closed
2/19/2012	12:36:59 PM	Bypass valve closed
2/19/2012	12:36:59 PM	Bubbler valve closed
2/19/2012	12:36:59 PM	Helium valve opened
2/19/2012	12:36:59 PM	Main Vac valve opened
2/19/2012	12:36:59 PM	Helium MFC set to  20.000000
2/19/2012	12:36:59 PM	H2 MFC set to  0.000000
2/19/2012	12:36:59 PM	BCl3 MFC set to  0.000000
2/19/2012	12:36:59 PM	PH3 MFC set to  0.000000
2/19/2012	12:36:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:36:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:36:59 PM	Tube furnace set to 150
2/19/2012	12:37:29 PM	Helium valve closed
2/19/2012	12:37:29 PM	H2 valve closed
2/19/2012	12:37:29 PM	BCl3 valve closed
2/19/2012	12:37:29 PM	PH3 valve closed
2/19/2012	12:37:29 PM	SiCl4 pre valve closed
2/19/2012	12:37:29 PM	SiCl4 post valve closed
2/19/2012	12:37:29 PM	Bypass valve closed
2/19/2012	12:37:29 PM	Bubbler valve closed
2/19/2012	12:37:29 PM	Main Vac valve opened
2/19/2012	12:37:29 PM	Helium MFC set to  0.000000
2/19/2012	12:37:29 PM	H2 MFC set to  0.000000
2/19/2012	12:37:29 PM	BCl3 MFC set to  0.000000
2/19/2012	12:37:29 PM	PH3 MFC set to  0.000000
2/19/2012	12:37:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:37:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:37:29 PM	Tube furnace set to 150
2/19/2012	12:37:59 PM	H2 valve closed
2/19/2012	12:37:59 PM	BCl3 valve closed
2/19/2012	12:37:59 PM	PH3 valve closed
2/19/2012	12:37:59 PM	SiCl4 pre valve closed
2/19/2012	12:37:59 PM	SiCl4 post valve closed
2/19/2012	12:37:59 PM	Bypass valve closed
2/19/2012	12:37:59 PM	Bubbler valve closed
2/19/2012	12:37:59 PM	Helium valve opened
2/19/2012	12:37:59 PM	Main Vac valve opened
2/19/2012	12:37:59 PM	Helium MFC set to  20.000000
2/19/2012	12:37:59 PM	H2 MFC set to  0.000000
2/19/2012	12:37:59 PM	BCl3 MFC set to  0.000000
2/19/2012	12:37:59 PM	PH3 MFC set to  0.000000
2/19/2012	12:37:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:37:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:37:59 PM	Tube furnace set to 150
2/19/2012	12:38:29 PM	Helium valve closed
2/19/2012	12:38:29 PM	H2 valve closed
2/19/2012	12:38:29 PM	BCl3 valve closed
2/19/2012	12:38:29 PM	PH3 valve closed
2/19/2012	12:38:29 PM	SiCl4 pre valve closed
2/19/2012	12:38:29 PM	SiCl4 post valve closed
2/19/2012	12:38:29 PM	Bypass valve closed
2/19/2012	12:38:29 PM	Bubbler valve closed
2/19/2012	12:38:29 PM	Main Vac valve opened
2/19/2012	12:38:29 PM	Helium MFC set to  0.000000
2/19/2012	12:38:29 PM	H2 MFC set to  0.000000
2/19/2012	12:38:29 PM	BCl3 MFC set to  0.000000
2/19/2012	12:38:29 PM	PH3 MFC set to  0.000000
2/19/2012	12:38:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:38:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:38:29 PM	Tube furnace set to 150
2/19/2012	12:38:59 PM	H2 valve closed
2/19/2012	12:38:59 PM	BCl3 valve closed
2/19/2012	12:38:59 PM	PH3 valve closed
2/19/2012	12:38:59 PM	SiCl4 pre valve closed
2/19/2012	12:38:59 PM	SiCl4 post valve closed
2/19/2012	12:38:59 PM	Bypass valve closed
2/19/2012	12:38:59 PM	Bubbler valve closed
2/19/2012	12:38:59 PM	Helium valve opened
2/19/2012	12:38:59 PM	Main Vac valve opened
2/19/2012	12:38:59 PM	Helium MFC set to  20.000000
2/19/2012	12:38:59 PM	H2 MFC set to  0.000000
2/19/2012	12:38:59 PM	BCl3 MFC set to  0.000000
2/19/2012	12:38:59 PM	PH3 MFC set to  0.000000
2/19/2012	12:38:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:38:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:39:00 PM	Tube furnace set to 150
2/19/2012	12:39:30 PM	Helium valve closed
2/19/2012	12:39:30 PM	H2 valve closed
2/19/2012	12:39:30 PM	BCl3 valve closed
2/19/2012	12:39:30 PM	PH3 valve closed
2/19/2012	12:39:30 PM	SiCl4 pre valve closed
2/19/2012	12:39:30 PM	SiCl4 post valve closed
2/19/2012	12:39:30 PM	Bypass valve closed
2/19/2012	12:39:30 PM	Bubbler valve closed
2/19/2012	12:39:30 PM	Main Vac valve opened
2/19/2012	12:39:30 PM	Helium MFC set to  0.000000
2/19/2012	12:39:30 PM	H2 MFC set to  0.000000
2/19/2012	12:39:30 PM	BCl3 MFC set to  0.000000
2/19/2012	12:39:30 PM	PH3 MFC set to  0.000000
2/19/2012	12:39:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:39:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:39:30 PM	Tube furnace set to 150
2/19/2012	12:40:00 PM	H2 valve closed
2/19/2012	12:40:00 PM	BCl3 valve closed
2/19/2012	12:40:00 PM	PH3 valve closed
2/19/2012	12:40:00 PM	SiCl4 pre valve closed
2/19/2012	12:40:00 PM	SiCl4 post valve closed
2/19/2012	12:40:00 PM	Bypass valve closed
2/19/2012	12:40:00 PM	Bubbler valve closed
2/19/2012	12:40:00 PM	Helium valve opened
2/19/2012	12:40:00 PM	Main Vac valve opened
2/19/2012	12:40:00 PM	Helium MFC set to  20.000000
2/19/2012	12:40:00 PM	H2 MFC set to  0.000000
2/19/2012	12:40:00 PM	BCl3 MFC set to  0.000000
2/19/2012	12:40:00 PM	PH3 MFC set to  0.000000
2/19/2012	12:40:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:40:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:40:00 PM	Tube furnace set to 150
2/19/2012	12:40:30 PM	Helium valve closed
2/19/2012	12:40:30 PM	H2 valve closed
2/19/2012	12:40:30 PM	BCl3 valve closed
2/19/2012	12:40:30 PM	PH3 valve closed
2/19/2012	12:40:30 PM	SiCl4 pre valve closed
2/19/2012	12:40:30 PM	SiCl4 post valve closed
2/19/2012	12:40:30 PM	Bypass valve closed
2/19/2012	12:40:30 PM	Bubbler valve closed
2/19/2012	12:40:30 PM	Main Vac valve opened
2/19/2012	12:40:30 PM	Helium MFC set to  0.000000
2/19/2012	12:40:30 PM	H2 MFC set to  0.000000
2/19/2012	12:40:30 PM	BCl3 MFC set to  0.000000
2/19/2012	12:40:30 PM	PH3 MFC set to  0.000000
2/19/2012	12:40:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:40:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:40:30 PM	Tube furnace set to 150
2/19/2012	12:41:00 PM	H2 valve closed
2/19/2012	12:41:00 PM	BCl3 valve closed
2/19/2012	12:41:00 PM	PH3 valve closed
2/19/2012	12:41:00 PM	SiCl4 pre valve closed
2/19/2012	12:41:00 PM	SiCl4 post valve closed
2/19/2012	12:41:00 PM	Bypass valve closed
2/19/2012	12:41:00 PM	Bubbler valve closed
2/19/2012	12:41:00 PM	Helium valve opened
2/19/2012	12:41:00 PM	Main Vac valve opened
2/19/2012	12:41:00 PM	Helium MFC set to  20.000000
2/19/2012	12:41:00 PM	H2 MFC set to  0.000000
2/19/2012	12:41:00 PM	BCl3 MFC set to  0.000000
2/19/2012	12:41:00 PM	PH3 MFC set to  0.000000
2/19/2012	12:41:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:41:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:41:00 PM	Tube furnace set to 150
2/19/2012	12:41:30 PM	Helium valve closed
2/19/2012	12:41:30 PM	H2 valve closed
2/19/2012	12:41:30 PM	BCl3 valve closed
2/19/2012	12:41:30 PM	PH3 valve closed
2/19/2012	12:41:30 PM	SiCl4 pre valve closed
2/19/2012	12:41:30 PM	SiCl4 post valve closed
2/19/2012	12:41:30 PM	Bypass valve closed
2/19/2012	12:41:30 PM	Bubbler valve closed
2/19/2012	12:41:30 PM	Main Vac valve opened
2/19/2012	12:41:30 PM	Helium MFC set to  0.000000
2/19/2012	12:41:30 PM	H2 MFC set to  0.000000
2/19/2012	12:41:30 PM	BCl3 MFC set to  0.000000
2/19/2012	12:41:30 PM	PH3 MFC set to  0.000000
2/19/2012	12:41:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:41:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:41:31 PM	Tube furnace set to 150
2/19/2012	12:42:01 PM	H2 valve closed
2/19/2012	12:42:01 PM	BCl3 valve closed
2/19/2012	12:42:01 PM	PH3 valve closed
2/19/2012	12:42:01 PM	SiCl4 pre valve closed
2/19/2012	12:42:01 PM	SiCl4 post valve closed
2/19/2012	12:42:01 PM	Bypass valve closed
2/19/2012	12:42:01 PM	Bubbler valve closed
2/19/2012	12:42:01 PM	Helium valve opened
2/19/2012	12:42:01 PM	Main Vac valve opened
2/19/2012	12:42:01 PM	Helium MFC set to  20.000000
2/19/2012	12:42:01 PM	H2 MFC set to  0.000000
2/19/2012	12:42:01 PM	BCl3 MFC set to  0.000000
2/19/2012	12:42:01 PM	PH3 MFC set to  0.000000
2/19/2012	12:42:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:42:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:42:01 PM	Tube furnace set to 150
2/19/2012	12:42:31 PM	Helium valve closed
2/19/2012	12:42:31 PM	H2 valve closed
2/19/2012	12:42:31 PM	BCl3 valve closed
2/19/2012	12:42:31 PM	PH3 valve closed
2/19/2012	12:42:31 PM	SiCl4 pre valve closed
2/19/2012	12:42:31 PM	SiCl4 post valve closed
2/19/2012	12:42:31 PM	Bypass valve closed
2/19/2012	12:42:31 PM	Bubbler valve closed
2/19/2012	12:42:31 PM	Main Vac valve opened
2/19/2012	12:42:31 PM	Helium MFC set to  0.000000
2/19/2012	12:42:31 PM	H2 MFC set to  0.000000
2/19/2012	12:42:31 PM	BCl3 MFC set to  0.000000
2/19/2012	12:42:31 PM	PH3 MFC set to  0.000000
2/19/2012	12:42:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:42:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:42:31 PM	Tube furnace set to 150
2/19/2012	12:43:01 PM	H2 valve closed
2/19/2012	12:43:01 PM	BCl3 valve closed
2/19/2012	12:43:01 PM	PH3 valve closed
2/19/2012	12:43:01 PM	SiCl4 pre valve closed
2/19/2012	12:43:01 PM	SiCl4 post valve closed
2/19/2012	12:43:01 PM	Bypass valve closed
2/19/2012	12:43:01 PM	Bubbler valve closed
2/19/2012	12:43:01 PM	Helium valve opened
2/19/2012	12:43:01 PM	Main Vac valve opened
2/19/2012	12:43:01 PM	Helium MFC set to  20.000000
2/19/2012	12:43:01 PM	H2 MFC set to  0.000000
2/19/2012	12:43:01 PM	BCl3 MFC set to  0.000000
2/19/2012	12:43:01 PM	PH3 MFC set to  0.000000
2/19/2012	12:43:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:43:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:43:01 PM	Tube furnace set to 150
2/19/2012	12:43:31 PM	Helium valve closed
2/19/2012	12:43:31 PM	H2 valve closed
2/19/2012	12:43:31 PM	BCl3 valve closed
2/19/2012	12:43:31 PM	PH3 valve closed
2/19/2012	12:43:31 PM	SiCl4 pre valve closed
2/19/2012	12:43:31 PM	SiCl4 post valve closed
2/19/2012	12:43:31 PM	Bypass valve closed
2/19/2012	12:43:31 PM	Bubbler valve closed
2/19/2012	12:43:31 PM	Main Vac valve opened
2/19/2012	12:43:31 PM	Helium MFC set to  0.000000
2/19/2012	12:43:31 PM	H2 MFC set to  0.000000
2/19/2012	12:43:31 PM	BCl3 MFC set to  0.000000
2/19/2012	12:43:31 PM	PH3 MFC set to  0.000000
2/19/2012	12:43:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:43:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:43:31 PM	Tube furnace set to 150
2/19/2012	12:44:01 PM	H2 valve closed
2/19/2012	12:44:01 PM	BCl3 valve closed
2/19/2012	12:44:01 PM	PH3 valve closed
2/19/2012	12:44:01 PM	SiCl4 pre valve closed
2/19/2012	12:44:01 PM	SiCl4 post valve closed
2/19/2012	12:44:01 PM	Bypass valve closed
2/19/2012	12:44:01 PM	Bubbler valve closed
2/19/2012	12:44:01 PM	Helium valve opened
2/19/2012	12:44:01 PM	Main Vac valve opened
2/19/2012	12:44:01 PM	Helium MFC set to  20.000000
2/19/2012	12:44:01 PM	H2 MFC set to  0.000000
2/19/2012	12:44:01 PM	BCl3 MFC set to  0.000000
2/19/2012	12:44:01 PM	PH3 MFC set to  0.000000
2/19/2012	12:44:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:44:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:44:02 PM	Tube furnace set to 150
2/19/2012	12:44:32 PM	Helium valve closed
2/19/2012	12:44:32 PM	H2 valve closed
2/19/2012	12:44:32 PM	BCl3 valve closed
2/19/2012	12:44:32 PM	PH3 valve closed
2/19/2012	12:44:32 PM	SiCl4 pre valve closed
2/19/2012	12:44:32 PM	SiCl4 post valve closed
2/19/2012	12:44:32 PM	Bypass valve closed
2/19/2012	12:44:32 PM	Bubbler valve closed
2/19/2012	12:44:32 PM	Main Vac valve opened
2/19/2012	12:44:32 PM	Helium MFC set to  0.000000
2/19/2012	12:44:32 PM	H2 MFC set to  0.000000
2/19/2012	12:44:32 PM	BCl3 MFC set to  0.000000
2/19/2012	12:44:32 PM	PH3 MFC set to  0.000000
2/19/2012	12:44:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:44:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:44:32 PM	Tube furnace set to 150
2/19/2012	12:45:02 PM	H2 valve closed
2/19/2012	12:45:02 PM	BCl3 valve closed
2/19/2012	12:45:02 PM	PH3 valve closed
2/19/2012	12:45:02 PM	SiCl4 pre valve closed
2/19/2012	12:45:02 PM	SiCl4 post valve closed
2/19/2012	12:45:02 PM	Bypass valve closed
2/19/2012	12:45:02 PM	Bubbler valve closed
2/19/2012	12:45:02 PM	Helium valve opened
2/19/2012	12:45:02 PM	Main Vac valve opened
2/19/2012	12:45:02 PM	Helium MFC set to  20.000000
2/19/2012	12:45:02 PM	H2 MFC set to  0.000000
2/19/2012	12:45:02 PM	BCl3 MFC set to  0.000000
2/19/2012	12:45:02 PM	PH3 MFC set to  0.000000
2/19/2012	12:45:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:45:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:45:02 PM	Tube furnace set to 150
2/19/2012	12:45:32 PM	Helium valve closed
2/19/2012	12:45:32 PM	H2 valve closed
2/19/2012	12:45:32 PM	BCl3 valve closed
2/19/2012	12:45:32 PM	PH3 valve closed
2/19/2012	12:45:32 PM	SiCl4 pre valve closed
2/19/2012	12:45:32 PM	SiCl4 post valve closed
2/19/2012	12:45:32 PM	Bypass valve closed
2/19/2012	12:45:32 PM	Bubbler valve closed
2/19/2012	12:45:32 PM	Main Vac valve opened
2/19/2012	12:45:32 PM	Helium MFC set to  0.000000
2/19/2012	12:45:32 PM	H2 MFC set to  0.000000
2/19/2012	12:45:32 PM	BCl3 MFC set to  0.000000
2/19/2012	12:45:32 PM	PH3 MFC set to  0.000000
2/19/2012	12:45:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:45:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:45:32 PM	Tube furnace set to 150
2/19/2012	12:45:33 PM	Run finished at 12:45 PM
2/19/2012	12:46:17 PM	Main Vac valve closed
2/19/2012	12:46:31 PM	Main Vac valve opened
2/19/2012	12:50:37 PM	Recipe started at 12:50 PM
2/19/2012	12:50:37 PM	Helium valve closed
2/19/2012	12:50:37 PM	H2 valve closed
2/19/2012	12:50:37 PM	BCl3 valve closed
2/19/2012	12:50:37 PM	PH3 valve closed
2/19/2012	12:50:37 PM	SiCl4 pre valve closed
2/19/2012	12:50:37 PM	SiCl4 post valve closed
2/19/2012	12:50:37 PM	Main Vac valve closed
2/19/2012	12:50:37 PM	Bypass valve closed
2/19/2012	12:50:37 PM	Bubbler valve closed
2/19/2012	12:50:37 PM	Helium MFC set to  0.000000
2/19/2012	12:50:37 PM	H2 MFC set to  0.000000
2/19/2012	12:50:37 PM	BCl3 MFC set to  0.000000
2/19/2012	12:50:37 PM	PH3 MFC set to  0.000000
2/19/2012	12:50:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:50:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:50:37 PM	Tube furnace set to 0
2/19/2012	12:50:40 PM	Helium valve closed
2/19/2012	12:50:40 PM	BCl3 valve closed
2/19/2012	12:50:40 PM	PH3 valve closed
2/19/2012	12:50:40 PM	SiCl4 pre valve closed
2/19/2012	12:50:40 PM	SiCl4 post valve closed
2/19/2012	12:50:40 PM	Main Vac valve closed
2/19/2012	12:50:40 PM	Bypass valve closed
2/19/2012	12:50:40 PM	Bubbler valve closed
2/19/2012	12:50:40 PM	H2 valve opened
2/19/2012	12:50:40 PM	Helium MFC set to  0.000000
2/19/2012	12:50:40 PM	H2 MFC set to  500.000000
2/19/2012	12:50:40 PM	BCl3 MFC set to  0.000000
2/19/2012	12:50:40 PM	PH3 MFC set to  0.000000
2/19/2012	12:50:40 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:50:40 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:50:40 PM	Tube furnace set to 0
2/19/2012	12:51:44 PM	Helium valve closed
2/19/2012	12:51:44 PM	BCl3 valve closed
2/19/2012	12:51:44 PM	PH3 valve closed
2/19/2012	12:51:44 PM	SiCl4 pre valve closed
2/19/2012	12:51:44 PM	SiCl4 post valve closed
2/19/2012	12:51:44 PM	Main Vac valve closed
2/19/2012	12:51:44 PM	Bypass valve closed
2/19/2012	12:51:44 PM	H2 valve opened
2/19/2012	12:51:44 PM	Bubbler valve opened
2/19/2012	12:51:44 PM	Helium MFC set to  0.000000
2/19/2012	12:51:44 PM	H2 MFC set to  500.000000
2/19/2012	12:51:44 PM	BCl3 MFC set to  0.000000
2/19/2012	12:51:44 PM	PH3 MFC set to  0.000000
2/19/2012	12:51:44 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:51:44 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:51:44 PM	Tube furnace set to 0
2/19/2012	12:51:46 PM	Helium valve closed
2/19/2012	12:51:46 PM	BCl3 valve closed
2/19/2012	12:51:46 PM	PH3 valve closed
2/19/2012	12:51:46 PM	SiCl4 pre valve closed
2/19/2012	12:51:46 PM	SiCl4 post valve closed
2/19/2012	12:51:46 PM	Main Vac valve closed
2/19/2012	12:51:46 PM	Bypass valve closed
2/19/2012	12:51:46 PM	H2 valve opened
2/19/2012	12:51:46 PM	Bubbler valve opened
2/19/2012	12:51:46 PM	Helium MFC set to  0.000000
2/19/2012	12:51:46 PM	H2 MFC set to  500.000000
2/19/2012	12:51:46 PM	BCl3 MFC set to  0.000000
2/19/2012	12:51:46 PM	PH3 MFC set to  0.000000
2/19/2012	12:51:46 PM	SiCl4 MFC set to  0.000000
2/19/2012	12:51:46 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	12:51:46 PM	Tube furnace set to 1000
2/19/2012	1:11:46 PM	Helium valve closed
2/19/2012	1:11:46 PM	PH3 valve closed
2/19/2012	1:11:46 PM	Main Vac valve closed
2/19/2012	1:11:46 PM	Bypass valve closed
2/19/2012	1:11:46 PM	H2 valve opened
2/19/2012	1:11:46 PM	BCl3 valve opened
2/19/2012	1:11:46 PM	SiCl4 pre valve opened
2/19/2012	1:11:46 PM	SiCl4 post valve opened
2/19/2012	1:11:46 PM	Bubbler valve opened
2/19/2012	1:11:46 PM	Helium MFC set to  0.000000
2/19/2012	1:11:46 PM	H2 MFC set to  500.000000
2/19/2012	1:11:46 PM	BCl3 MFC set to  20.000000
2/19/2012	1:11:46 PM	PH3 MFC set to  0.000000
2/19/2012	1:11:46 PM	SiCl4 MFC set to  50.000000
2/19/2012	1:11:46 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	1:11:46 PM	Tube furnace set to 1000
2/19/2012	1:26:46 PM	Helium valve closed
2/19/2012	1:26:46 PM	BCl3 valve closed
2/19/2012	1:26:46 PM	PH3 valve closed
2/19/2012	1:26:46 PM	SiCl4 pre valve closed
2/19/2012	1:26:46 PM	SiCl4 post valve closed
2/19/2012	1:26:46 PM	Main Vac valve closed
2/19/2012	1:26:46 PM	Bypass valve closed
2/19/2012	1:26:46 PM	H2 valve opened
2/19/2012	1:26:46 PM	Bubbler valve opened
2/19/2012	1:26:46 PM	Helium MFC set to  0.000000
2/19/2012	1:26:46 PM	H2 MFC set to  500.000000
2/19/2012	1:26:46 PM	BCl3 MFC set to  0.000000
2/19/2012	1:26:46 PM	PH3 MFC set to  0.000000
2/19/2012	1:26:46 PM	SiCl4 MFC set to  0.000000
2/19/2012	1:26:46 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	1:26:46 PM	Tube furnace set to 750
2/19/2012	1:31:46 PM	H2 valve closed
2/19/2012	1:31:46 PM	BCl3 valve closed
2/19/2012	1:31:46 PM	PH3 valve closed
2/19/2012	1:31:46 PM	SiCl4 pre valve closed
2/19/2012	1:31:46 PM	SiCl4 post valve closed
2/19/2012	1:31:46 PM	Main Vac valve closed
2/19/2012	1:31:46 PM	Bypass valve closed
2/19/2012	1:31:46 PM	Helium valve opened
2/19/2012	1:31:46 PM	Bubbler valve opened
2/19/2012	1:31:46 PM	Helium MFC set to  500.000000
2/19/2012	1:31:46 PM	H2 MFC set to  0.000000
2/19/2012	1:31:46 PM	BCl3 MFC set to  0.000000
2/19/2012	1:31:46 PM	PH3 MFC set to  0.000000
2/19/2012	1:31:46 PM	SiCl4 MFC set to  0.000000
2/19/2012	1:31:46 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	1:31:46 PM	Tube furnace set to 0
2/19/2012	1:51:46 PM	Helium valve closed
2/19/2012	1:51:46 PM	H2 valve closed
2/19/2012	1:51:46 PM	BCl3 valve closed
2/19/2012	1:51:46 PM	PH3 valve closed
2/19/2012	1:51:46 PM	SiCl4 pre valve closed
2/19/2012	1:51:46 PM	SiCl4 post valve closed
2/19/2012	1:51:46 PM	Main Vac valve closed
2/19/2012	1:51:46 PM	Bypass valve closed
2/19/2012	1:51:46 PM	Bubbler valve closed
2/19/2012	1:51:46 PM	Helium MFC set to  0.000000
2/19/2012	1:51:46 PM	H2 MFC set to  0.000000
2/19/2012	1:51:46 PM	BCl3 MFC set to  0.000000
2/19/2012	1:51:46 PM	PH3 MFC set to  0.000000
2/19/2012	1:51:46 PM	SiCl4 MFC set to  0.000000
2/19/2012	1:51:46 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	1:51:47 PM	Tube furnace set to 0
2/19/2012	1:51:48 PM	Run finished at 1:51 PM
2/19/2012	1:59:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	2:00:00 PM	Recipe started at 1:59 PM
2/19/2012	2:00:00 PM	Helium valve closed
2/19/2012	2:00:00 PM	H2 valve closed
2/19/2012	2:00:00 PM	BCl3 valve closed
2/19/2012	2:00:00 PM	PH3 valve closed
2/19/2012	2:00:00 PM	SiCl4 pre valve closed
2/19/2012	2:00:00 PM	SiCl4 post valve closed
2/19/2012	2:00:00 PM	Main Vac valve closed
2/19/2012	2:00:00 PM	Bubbler valve closed
2/19/2012	2:00:00 PM	Bypass valve opened
2/19/2012	2:00:00 PM	Helium MFC set to  0.000000
2/19/2012	2:00:00 PM	H2 MFC set to  0.000000
2/19/2012	2:00:00 PM	BCl3 MFC set to  0.000000
2/19/2012	2:00:00 PM	PH3 MFC set to  0.000000
2/19/2012	2:00:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:00:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:00:00 PM	Tube furnace set to 0
2/19/2012	2:01:02 PM	Helium valve closed
2/19/2012	2:01:02 PM	H2 valve closed
2/19/2012	2:01:02 PM	BCl3 valve closed
2/19/2012	2:01:02 PM	PH3 valve closed
2/19/2012	2:01:02 PM	SiCl4 pre valve closed
2/19/2012	2:01:02 PM	SiCl4 post valve closed
2/19/2012	2:01:02 PM	Main Vac valve closed
2/19/2012	2:01:02 PM	Bubbler valve closed
2/19/2012	2:01:02 PM	Bypass valve opened
2/19/2012	2:01:02 PM	Helium MFC set to  0.000000
2/19/2012	2:01:02 PM	H2 MFC set to  0.000000
2/19/2012	2:01:02 PM	BCl3 MFC set to  0.000000
2/19/2012	2:01:02 PM	PH3 MFC set to  0.000000
2/19/2012	2:01:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:01:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:01:02 PM	Tube furnace set to 0
2/19/2012	2:02:02 PM	Helium valve closed
2/19/2012	2:02:02 PM	H2 valve closed
2/19/2012	2:02:02 PM	BCl3 valve closed
2/19/2012	2:02:02 PM	PH3 valve closed
2/19/2012	2:02:02 PM	SiCl4 pre valve closed
2/19/2012	2:02:02 PM	SiCl4 post valve closed
2/19/2012	2:02:02 PM	Bypass valve closed
2/19/2012	2:02:02 PM	Bubbler valve closed
2/19/2012	2:02:02 PM	Main Vac valve opened
2/19/2012	2:02:02 PM	Helium MFC set to  0.000000
2/19/2012	2:02:02 PM	H2 MFC set to  0.000000
2/19/2012	2:02:02 PM	BCl3 MFC set to  0.000000
2/19/2012	2:02:02 PM	PH3 MFC set to  0.000000
2/19/2012	2:02:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:02:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:02:02 PM	Tube furnace set to 0
2/19/2012	2:02:03 PM	Run finished at 2:02 PM
2/19/2012	2:02:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	2:02:57 PM	Recipe started at 2:02 PM
2/19/2012	2:02:57 PM	Helium valve closed
2/19/2012	2:02:57 PM	H2 valve closed
2/19/2012	2:02:57 PM	BCl3 valve closed
2/19/2012	2:02:57 PM	PH3 valve closed
2/19/2012	2:02:58 PM	SiCl4 pre valve closed
2/19/2012	2:02:58 PM	SiCl4 post valve closed
2/19/2012	2:02:58 PM	Bypass valve closed
2/19/2012	2:02:58 PM	Bubbler valve closed
2/19/2012	2:02:58 PM	Main Vac valve opened
2/19/2012	2:02:58 PM	Helium MFC set to  0.000000
2/19/2012	2:02:58 PM	H2 MFC set to  0.000000
2/19/2012	2:02:58 PM	BCl3 MFC set to  0.000000
2/19/2012	2:02:58 PM	PH3 MFC set to  0.000000
2/19/2012	2:02:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:02:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:02:58 PM	Tube furnace set to 150
2/19/2012	2:03:28 PM	H2 valve closed
2/19/2012	2:03:28 PM	BCl3 valve closed
2/19/2012	2:03:28 PM	PH3 valve closed
2/19/2012	2:03:28 PM	SiCl4 pre valve closed
2/19/2012	2:03:28 PM	SiCl4 post valve closed
2/19/2012	2:03:28 PM	Bypass valve closed
2/19/2012	2:03:28 PM	Bubbler valve closed
2/19/2012	2:03:28 PM	Helium valve opened
2/19/2012	2:03:28 PM	Main Vac valve opened
2/19/2012	2:03:28 PM	Helium MFC set to  20.000000
2/19/2012	2:03:28 PM	H2 MFC set to  0.000000
2/19/2012	2:03:28 PM	BCl3 MFC set to  0.000000
2/19/2012	2:03:28 PM	PH3 MFC set to  0.000000
2/19/2012	2:03:28 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:03:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:03:28 PM	Tube furnace set to 150
2/19/2012	2:03:58 PM	Helium valve closed
2/19/2012	2:03:58 PM	H2 valve closed
2/19/2012	2:03:58 PM	BCl3 valve closed
2/19/2012	2:03:58 PM	PH3 valve closed
2/19/2012	2:03:58 PM	SiCl4 pre valve closed
2/19/2012	2:03:58 PM	SiCl4 post valve closed
2/19/2012	2:03:58 PM	Bypass valve closed
2/19/2012	2:03:58 PM	Bubbler valve closed
2/19/2012	2:03:58 PM	Main Vac valve opened
2/19/2012	2:03:58 PM	Helium MFC set to  0.000000
2/19/2012	2:03:58 PM	H2 MFC set to  0.000000
2/19/2012	2:03:58 PM	BCl3 MFC set to  0.000000
2/19/2012	2:03:58 PM	PH3 MFC set to  0.000000
2/19/2012	2:03:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:03:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:03:58 PM	Tube furnace set to 150
2/19/2012	2:04:28 PM	H2 valve closed
2/19/2012	2:04:28 PM	BCl3 valve closed
2/19/2012	2:04:28 PM	PH3 valve closed
2/19/2012	2:04:28 PM	SiCl4 pre valve closed
2/19/2012	2:04:28 PM	SiCl4 post valve closed
2/19/2012	2:04:28 PM	Bypass valve closed
2/19/2012	2:04:28 PM	Bubbler valve closed
2/19/2012	2:04:28 PM	Helium valve opened
2/19/2012	2:04:28 PM	Main Vac valve opened
2/19/2012	2:04:28 PM	Helium MFC set to  20.000000
2/19/2012	2:04:28 PM	H2 MFC set to  0.000000
2/19/2012	2:04:28 PM	BCl3 MFC set to  0.000000
2/19/2012	2:04:28 PM	PH3 MFC set to  0.000000
2/19/2012	2:04:28 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:04:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:04:28 PM	Tube furnace set to 150
2/19/2012	2:04:58 PM	Helium valve closed
2/19/2012	2:04:58 PM	H2 valve closed
2/19/2012	2:04:58 PM	BCl3 valve closed
2/19/2012	2:04:58 PM	PH3 valve closed
2/19/2012	2:04:58 PM	SiCl4 pre valve closed
2/19/2012	2:04:58 PM	SiCl4 post valve closed
2/19/2012	2:04:58 PM	Bypass valve closed
2/19/2012	2:04:58 PM	Bubbler valve closed
2/19/2012	2:04:58 PM	Main Vac valve opened
2/19/2012	2:04:58 PM	Helium MFC set to  0.000000
2/19/2012	2:04:58 PM	H2 MFC set to  0.000000
2/19/2012	2:04:58 PM	BCl3 MFC set to  0.000000
2/19/2012	2:04:58 PM	PH3 MFC set to  0.000000
2/19/2012	2:04:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:04:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:04:58 PM	Tube furnace set to 150
2/19/2012	2:05:29 PM	H2 valve closed
2/19/2012	2:05:29 PM	BCl3 valve closed
2/19/2012	2:05:29 PM	PH3 valve closed
2/19/2012	2:05:29 PM	SiCl4 pre valve closed
2/19/2012	2:05:29 PM	SiCl4 post valve closed
2/19/2012	2:05:29 PM	Bypass valve closed
2/19/2012	2:05:29 PM	Bubbler valve closed
2/19/2012	2:05:29 PM	Helium valve opened
2/19/2012	2:05:29 PM	Main Vac valve opened
2/19/2012	2:05:29 PM	Helium MFC set to  20.000000
2/19/2012	2:05:29 PM	H2 MFC set to  0.000000
2/19/2012	2:05:29 PM	BCl3 MFC set to  0.000000
2/19/2012	2:05:29 PM	PH3 MFC set to  0.000000
2/19/2012	2:05:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:05:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:05:29 PM	Tube furnace set to 150
2/19/2012	2:05:59 PM	Helium valve closed
2/19/2012	2:05:59 PM	H2 valve closed
2/19/2012	2:05:59 PM	BCl3 valve closed
2/19/2012	2:05:59 PM	PH3 valve closed
2/19/2012	2:05:59 PM	SiCl4 pre valve closed
2/19/2012	2:05:59 PM	SiCl4 post valve closed
2/19/2012	2:05:59 PM	Bypass valve closed
2/19/2012	2:05:59 PM	Bubbler valve closed
2/19/2012	2:05:59 PM	Main Vac valve opened
2/19/2012	2:05:59 PM	Helium MFC set to  0.000000
2/19/2012	2:05:59 PM	H2 MFC set to  0.000000
2/19/2012	2:05:59 PM	BCl3 MFC set to  0.000000
2/19/2012	2:05:59 PM	PH3 MFC set to  0.000000
2/19/2012	2:05:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:05:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:05:59 PM	Tube furnace set to 150
2/19/2012	2:06:29 PM	H2 valve closed
2/19/2012	2:06:29 PM	BCl3 valve closed
2/19/2012	2:06:29 PM	PH3 valve closed
2/19/2012	2:06:29 PM	SiCl4 pre valve closed
2/19/2012	2:06:29 PM	SiCl4 post valve closed
2/19/2012	2:06:29 PM	Bypass valve closed
2/19/2012	2:06:29 PM	Bubbler valve closed
2/19/2012	2:06:29 PM	Helium valve opened
2/19/2012	2:06:29 PM	Main Vac valve opened
2/19/2012	2:06:29 PM	Helium MFC set to  20.000000
2/19/2012	2:06:29 PM	H2 MFC set to  0.000000
2/19/2012	2:06:29 PM	BCl3 MFC set to  0.000000
2/19/2012	2:06:29 PM	PH3 MFC set to  0.000000
2/19/2012	2:06:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:06:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:06:29 PM	Tube furnace set to 150
2/19/2012	2:06:59 PM	Helium valve closed
2/19/2012	2:06:59 PM	H2 valve closed
2/19/2012	2:06:59 PM	BCl3 valve closed
2/19/2012	2:06:59 PM	PH3 valve closed
2/19/2012	2:06:59 PM	SiCl4 pre valve closed
2/19/2012	2:06:59 PM	SiCl4 post valve closed
2/19/2012	2:06:59 PM	Bypass valve closed
2/19/2012	2:06:59 PM	Bubbler valve closed
2/19/2012	2:06:59 PM	Main Vac valve opened
2/19/2012	2:06:59 PM	Helium MFC set to  0.000000
2/19/2012	2:06:59 PM	H2 MFC set to  0.000000
2/19/2012	2:06:59 PM	BCl3 MFC set to  0.000000
2/19/2012	2:06:59 PM	PH3 MFC set to  0.000000
2/19/2012	2:06:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:06:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:06:59 PM	Tube furnace set to 150
2/19/2012	2:07:29 PM	H2 valve closed
2/19/2012	2:07:29 PM	BCl3 valve closed
2/19/2012	2:07:29 PM	PH3 valve closed
2/19/2012	2:07:29 PM	SiCl4 pre valve closed
2/19/2012	2:07:29 PM	SiCl4 post valve closed
2/19/2012	2:07:29 PM	Bypass valve closed
2/19/2012	2:07:29 PM	Bubbler valve closed
2/19/2012	2:07:29 PM	Helium valve opened
2/19/2012	2:07:29 PM	Main Vac valve opened
2/19/2012	2:07:29 PM	Helium MFC set to  20.000000
2/19/2012	2:07:29 PM	H2 MFC set to  0.000000
2/19/2012	2:07:29 PM	BCl3 MFC set to  0.000000
2/19/2012	2:07:29 PM	PH3 MFC set to  0.000000
2/19/2012	2:07:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:07:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:07:30 PM	Tube furnace set to 150
2/19/2012	2:08:00 PM	Helium valve closed
2/19/2012	2:08:00 PM	H2 valve closed
2/19/2012	2:08:00 PM	BCl3 valve closed
2/19/2012	2:08:00 PM	PH3 valve closed
2/19/2012	2:08:00 PM	SiCl4 pre valve closed
2/19/2012	2:08:00 PM	SiCl4 post valve closed
2/19/2012	2:08:00 PM	Bypass valve closed
2/19/2012	2:08:00 PM	Bubbler valve closed
2/19/2012	2:08:00 PM	Main Vac valve opened
2/19/2012	2:08:00 PM	Helium MFC set to  0.000000
2/19/2012	2:08:00 PM	H2 MFC set to  0.000000
2/19/2012	2:08:00 PM	BCl3 MFC set to  0.000000
2/19/2012	2:08:00 PM	PH3 MFC set to  0.000000
2/19/2012	2:08:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:08:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:08:00 PM	Tube furnace set to 150
2/19/2012	2:08:30 PM	H2 valve closed
2/19/2012	2:08:30 PM	BCl3 valve closed
2/19/2012	2:08:30 PM	PH3 valve closed
2/19/2012	2:08:30 PM	SiCl4 pre valve closed
2/19/2012	2:08:30 PM	SiCl4 post valve closed
2/19/2012	2:08:30 PM	Bypass valve closed
2/19/2012	2:08:30 PM	Bubbler valve closed
2/19/2012	2:08:30 PM	Helium valve opened
2/19/2012	2:08:30 PM	Main Vac valve opened
2/19/2012	2:08:30 PM	Helium MFC set to  20.000000
2/19/2012	2:08:30 PM	H2 MFC set to  0.000000
2/19/2012	2:08:30 PM	BCl3 MFC set to  0.000000
2/19/2012	2:08:30 PM	PH3 MFC set to  0.000000
2/19/2012	2:08:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:08:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:08:30 PM	Tube furnace set to 150
2/19/2012	2:09:00 PM	Helium valve closed
2/19/2012	2:09:00 PM	H2 valve closed
2/19/2012	2:09:00 PM	BCl3 valve closed
2/19/2012	2:09:00 PM	PH3 valve closed
2/19/2012	2:09:00 PM	SiCl4 pre valve closed
2/19/2012	2:09:00 PM	SiCl4 post valve closed
2/19/2012	2:09:00 PM	Bypass valve closed
2/19/2012	2:09:00 PM	Bubbler valve closed
2/19/2012	2:09:00 PM	Main Vac valve opened
2/19/2012	2:09:00 PM	Helium MFC set to  0.000000
2/19/2012	2:09:00 PM	H2 MFC set to  0.000000
2/19/2012	2:09:00 PM	BCl3 MFC set to  0.000000
2/19/2012	2:09:00 PM	PH3 MFC set to  0.000000
2/19/2012	2:09:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:09:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:09:00 PM	Tube furnace set to 150
2/19/2012	2:09:30 PM	H2 valve closed
2/19/2012	2:09:30 PM	BCl3 valve closed
2/19/2012	2:09:30 PM	PH3 valve closed
2/19/2012	2:09:30 PM	SiCl4 pre valve closed
2/19/2012	2:09:30 PM	SiCl4 post valve closed
2/19/2012	2:09:30 PM	Bypass valve closed
2/19/2012	2:09:30 PM	Bubbler valve closed
2/19/2012	2:09:30 PM	Helium valve opened
2/19/2012	2:09:30 PM	Main Vac valve opened
2/19/2012	2:09:30 PM	Helium MFC set to  20.000000
2/19/2012	2:09:30 PM	H2 MFC set to  0.000000
2/19/2012	2:09:30 PM	BCl3 MFC set to  0.000000
2/19/2012	2:09:30 PM	PH3 MFC set to  0.000000
2/19/2012	2:09:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:09:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:09:30 PM	Tube furnace set to 150
2/19/2012	2:10:00 PM	Helium valve closed
2/19/2012	2:10:00 PM	H2 valve closed
2/19/2012	2:10:00 PM	BCl3 valve closed
2/19/2012	2:10:00 PM	PH3 valve closed
2/19/2012	2:10:00 PM	SiCl4 pre valve closed
2/19/2012	2:10:00 PM	SiCl4 post valve closed
2/19/2012	2:10:00 PM	Bypass valve closed
2/19/2012	2:10:00 PM	Bubbler valve closed
2/19/2012	2:10:00 PM	Main Vac valve opened
2/19/2012	2:10:00 PM	Helium MFC set to  0.000000
2/19/2012	2:10:00 PM	H2 MFC set to  0.000000
2/19/2012	2:10:00 PM	BCl3 MFC set to  0.000000
2/19/2012	2:10:00 PM	PH3 MFC set to  0.000000
2/19/2012	2:10:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:10:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:10:01 PM	Tube furnace set to 150
2/19/2012	2:10:31 PM	H2 valve closed
2/19/2012	2:10:31 PM	BCl3 valve closed
2/19/2012	2:10:31 PM	PH3 valve closed
2/19/2012	2:10:31 PM	SiCl4 pre valve closed
2/19/2012	2:10:31 PM	SiCl4 post valve closed
2/19/2012	2:10:31 PM	Bypass valve closed
2/19/2012	2:10:31 PM	Bubbler valve closed
2/19/2012	2:10:31 PM	Helium valve opened
2/19/2012	2:10:31 PM	Main Vac valve opened
2/19/2012	2:10:31 PM	Helium MFC set to  20.000000
2/19/2012	2:10:31 PM	H2 MFC set to  0.000000
2/19/2012	2:10:31 PM	BCl3 MFC set to  0.000000
2/19/2012	2:10:31 PM	PH3 MFC set to  0.000000
2/19/2012	2:10:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:10:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:10:31 PM	Tube furnace set to 150
2/19/2012	2:11:01 PM	Helium valve closed
2/19/2012	2:11:01 PM	H2 valve closed
2/19/2012	2:11:01 PM	BCl3 valve closed
2/19/2012	2:11:01 PM	PH3 valve closed
2/19/2012	2:11:01 PM	SiCl4 pre valve closed
2/19/2012	2:11:01 PM	SiCl4 post valve closed
2/19/2012	2:11:01 PM	Bypass valve closed
2/19/2012	2:11:01 PM	Bubbler valve closed
2/19/2012	2:11:01 PM	Main Vac valve opened
2/19/2012	2:11:01 PM	Helium MFC set to  0.000000
2/19/2012	2:11:01 PM	H2 MFC set to  0.000000
2/19/2012	2:11:01 PM	BCl3 MFC set to  0.000000
2/19/2012	2:11:01 PM	PH3 MFC set to  0.000000
2/19/2012	2:11:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:11:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:11:01 PM	Tube furnace set to 150
2/19/2012	2:11:31 PM	H2 valve closed
2/19/2012	2:11:31 PM	BCl3 valve closed
2/19/2012	2:11:31 PM	PH3 valve closed
2/19/2012	2:11:31 PM	SiCl4 pre valve closed
2/19/2012	2:11:31 PM	SiCl4 post valve closed
2/19/2012	2:11:31 PM	Bypass valve closed
2/19/2012	2:11:31 PM	Bubbler valve closed
2/19/2012	2:11:31 PM	Helium valve opened
2/19/2012	2:11:31 PM	Main Vac valve opened
2/19/2012	2:11:31 PM	Helium MFC set to  20.000000
2/19/2012	2:11:31 PM	H2 MFC set to  0.000000
2/19/2012	2:11:31 PM	BCl3 MFC set to  0.000000
2/19/2012	2:11:31 PM	PH3 MFC set to  0.000000
2/19/2012	2:11:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:11:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:11:31 PM	Tube furnace set to 150
2/19/2012	2:12:01 PM	Helium valve closed
2/19/2012	2:12:01 PM	H2 valve closed
2/19/2012	2:12:01 PM	BCl3 valve closed
2/19/2012	2:12:01 PM	PH3 valve closed
2/19/2012	2:12:01 PM	SiCl4 pre valve closed
2/19/2012	2:12:01 PM	SiCl4 post valve closed
2/19/2012	2:12:01 PM	Bypass valve closed
2/19/2012	2:12:01 PM	Bubbler valve closed
2/19/2012	2:12:01 PM	Main Vac valve opened
2/19/2012	2:12:01 PM	Helium MFC set to  0.000000
2/19/2012	2:12:01 PM	H2 MFC set to  0.000000
2/19/2012	2:12:01 PM	BCl3 MFC set to  0.000000
2/19/2012	2:12:01 PM	PH3 MFC set to  0.000000
2/19/2012	2:12:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:12:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:12:01 PM	Tube furnace set to 150
2/19/2012	2:12:31 PM	H2 valve closed
2/19/2012	2:12:31 PM	BCl3 valve closed
2/19/2012	2:12:31 PM	PH3 valve closed
2/19/2012	2:12:31 PM	SiCl4 pre valve closed
2/19/2012	2:12:31 PM	SiCl4 post valve closed
2/19/2012	2:12:31 PM	Bypass valve closed
2/19/2012	2:12:31 PM	Bubbler valve closed
2/19/2012	2:12:31 PM	Helium valve opened
2/19/2012	2:12:31 PM	Main Vac valve opened
2/19/2012	2:12:31 PM	Helium MFC set to  20.000000
2/19/2012	2:12:31 PM	H2 MFC set to  0.000000
2/19/2012	2:12:31 PM	BCl3 MFC set to  0.000000
2/19/2012	2:12:31 PM	PH3 MFC set to  0.000000
2/19/2012	2:12:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:12:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:12:32 PM	Tube furnace set to 150
2/19/2012	2:13:02 PM	Helium valve closed
2/19/2012	2:13:02 PM	H2 valve closed
2/19/2012	2:13:02 PM	BCl3 valve closed
2/19/2012	2:13:02 PM	PH3 valve closed
2/19/2012	2:13:02 PM	SiCl4 pre valve closed
2/19/2012	2:13:02 PM	SiCl4 post valve closed
2/19/2012	2:13:02 PM	Bypass valve closed
2/19/2012	2:13:02 PM	Bubbler valve closed
2/19/2012	2:13:02 PM	Main Vac valve opened
2/19/2012	2:13:02 PM	Helium MFC set to  0.000000
2/19/2012	2:13:02 PM	H2 MFC set to  0.000000
2/19/2012	2:13:02 PM	BCl3 MFC set to  0.000000
2/19/2012	2:13:02 PM	PH3 MFC set to  0.000000
2/19/2012	2:13:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:13:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:13:02 PM	Tube furnace set to 150
2/19/2012	2:13:03 PM	Run finished at 2:13 PM
2/19/2012	2:14:48 PM	Main Vac valve closed
2/19/2012	2:15:02 PM	Main Vac valve opened
2/19/2012	2:15:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/19/2012	2:15:18 PM	Recipe started at 2:15 PM
2/19/2012	2:15:18 PM	Helium valve closed
2/19/2012	2:15:18 PM	H2 valve closed
2/19/2012	2:15:18 PM	BCl3 valve closed
2/19/2012	2:15:18 PM	PH3 valve closed
2/19/2012	2:15:18 PM	SiCl4 pre valve closed
2/19/2012	2:15:18 PM	SiCl4 post valve closed
2/19/2012	2:15:18 PM	Main Vac valve closed
2/19/2012	2:15:18 PM	Bubbler valve closed
2/19/2012	2:15:18 PM	Bypass valve opened
2/19/2012	2:15:18 PM	Helium MFC set to  0.000000
2/19/2012	2:15:18 PM	H2 MFC set to  0.000000
2/19/2012	2:15:18 PM	BCl3 MFC set to  0.000000
2/19/2012	2:15:18 PM	PH3 MFC set to  0.000000
2/19/2012	2:15:18 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:15:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:15:19 PM	Tube furnace set to 0
2/19/2012	2:15:19 PM	Run aborted at 2:15 PM
2/19/2012	2:15:19 PM	Helium valve closed
2/19/2012	2:15:19 PM	H2 valve closed
2/19/2012	2:15:19 PM	BCl3 valve closed
2/19/2012	2:15:19 PM	PH3 valve closed
2/19/2012	2:15:19 PM	SiCl4 pre valve closed
2/19/2012	2:15:19 PM	SiCl4 post valve closed
2/19/2012	2:15:19 PM	Bypass valve closed
2/19/2012	2:15:19 PM	Main Vac valve closed
2/19/2012	2:15:19 PM	Bubbler valve closed
2/19/2012	2:15:19 PM	Helium MFC set to  0.000000
2/19/2012	2:15:19 PM	H2 MFC set to  0.000000
2/19/2012	2:15:19 PM	BCl3 MFC set to  0.000000
2/19/2012	2:15:19 PM	PH3 MFC set to  0.000000
2/19/2012	2:15:19 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:15:19 PM	Tube furnace set to 0
2/19/2012	2:15:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
2/19/2012	2:15:22 PM	Main Vac valve opened
2/19/2012	2:15:32 PM	Recipe started at 2:15 PM
2/19/2012	2:15:32 PM	Helium valve closed
2/19/2012	2:15:32 PM	H2 valve closed
2/19/2012	2:15:32 PM	BCl3 valve closed
2/19/2012	2:15:32 PM	PH3 valve closed
2/19/2012	2:15:32 PM	SiCl4 pre valve closed
2/19/2012	2:15:32 PM	SiCl4 post valve closed
2/19/2012	2:15:32 PM	Bypass valve closed
2/19/2012	2:15:32 PM	Bubbler valve closed
2/19/2012	2:15:32 PM	Main Vac valve opened
2/19/2012	2:15:32 PM	Helium MFC set to  0.000000
2/19/2012	2:15:32 PM	H2 MFC set to  0.000000
2/19/2012	2:15:32 PM	BCl3 MFC set to  0.000000
2/19/2012	2:15:32 PM	PH3 MFC set to  0.000000
2/19/2012	2:15:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:15:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:15:32 PM	Tube furnace set to 150
2/19/2012	2:16:02 PM	H2 valve closed
2/19/2012	2:16:02 PM	BCl3 valve closed
2/19/2012	2:16:02 PM	PH3 valve closed
2/19/2012	2:16:02 PM	SiCl4 pre valve closed
2/19/2012	2:16:02 PM	SiCl4 post valve closed
2/19/2012	2:16:02 PM	Bypass valve closed
2/19/2012	2:16:02 PM	Bubbler valve closed
2/19/2012	2:16:02 PM	Helium valve opened
2/19/2012	2:16:02 PM	Main Vac valve opened
2/19/2012	2:16:02 PM	Helium MFC set to  20.000000
2/19/2012	2:16:02 PM	H2 MFC set to  0.000000
2/19/2012	2:16:02 PM	BCl3 MFC set to  0.000000
2/19/2012	2:16:02 PM	PH3 MFC set to  0.000000
2/19/2012	2:16:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:16:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:16:02 PM	Tube furnace set to 150
2/19/2012	2:16:32 PM	Helium valve closed
2/19/2012	2:16:32 PM	H2 valve closed
2/19/2012	2:16:32 PM	BCl3 valve closed
2/19/2012	2:16:32 PM	PH3 valve closed
2/19/2012	2:16:32 PM	SiCl4 pre valve closed
2/19/2012	2:16:32 PM	SiCl4 post valve closed
2/19/2012	2:16:32 PM	Bypass valve closed
2/19/2012	2:16:32 PM	Bubbler valve closed
2/19/2012	2:16:32 PM	Main Vac valve opened
2/19/2012	2:16:32 PM	Helium MFC set to  0.000000
2/19/2012	2:16:32 PM	H2 MFC set to  0.000000
2/19/2012	2:16:32 PM	BCl3 MFC set to  0.000000
2/19/2012	2:16:32 PM	PH3 MFC set to  0.000000
2/19/2012	2:16:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:16:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:16:32 PM	Tube furnace set to 150
2/19/2012	2:17:02 PM	H2 valve closed
2/19/2012	2:17:02 PM	BCl3 valve closed
2/19/2012	2:17:02 PM	PH3 valve closed
2/19/2012	2:17:02 PM	SiCl4 pre valve closed
2/19/2012	2:17:02 PM	SiCl4 post valve closed
2/19/2012	2:17:02 PM	Bypass valve closed
2/19/2012	2:17:02 PM	Bubbler valve closed
2/19/2012	2:17:02 PM	Helium valve opened
2/19/2012	2:17:02 PM	Main Vac valve opened
2/19/2012	2:17:02 PM	Helium MFC set to  20.000000
2/19/2012	2:17:02 PM	H2 MFC set to  0.000000
2/19/2012	2:17:02 PM	BCl3 MFC set to  0.000000
2/19/2012	2:17:02 PM	PH3 MFC set to  0.000000
2/19/2012	2:17:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:17:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:17:02 PM	Tube furnace set to 150
2/19/2012	2:17:32 PM	Helium valve closed
2/19/2012	2:17:32 PM	H2 valve closed
2/19/2012	2:17:32 PM	BCl3 valve closed
2/19/2012	2:17:32 PM	PH3 valve closed
2/19/2012	2:17:32 PM	SiCl4 pre valve closed
2/19/2012	2:17:32 PM	SiCl4 post valve closed
2/19/2012	2:17:32 PM	Bypass valve closed
2/19/2012	2:17:32 PM	Bubbler valve closed
2/19/2012	2:17:32 PM	Main Vac valve opened
2/19/2012	2:17:32 PM	Helium MFC set to  0.000000
2/19/2012	2:17:32 PM	H2 MFC set to  0.000000
2/19/2012	2:17:32 PM	BCl3 MFC set to  0.000000
2/19/2012	2:17:32 PM	PH3 MFC set to  0.000000
2/19/2012	2:17:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:17:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:17:33 PM	Tube furnace set to 150
2/19/2012	2:18:03 PM	H2 valve closed
2/19/2012	2:18:03 PM	BCl3 valve closed
2/19/2012	2:18:03 PM	PH3 valve closed
2/19/2012	2:18:03 PM	SiCl4 pre valve closed
2/19/2012	2:18:03 PM	SiCl4 post valve closed
2/19/2012	2:18:03 PM	Bypass valve closed
2/19/2012	2:18:03 PM	Bubbler valve closed
2/19/2012	2:18:03 PM	Helium valve opened
2/19/2012	2:18:03 PM	Main Vac valve opened
2/19/2012	2:18:03 PM	Helium MFC set to  20.000000
2/19/2012	2:18:03 PM	H2 MFC set to  0.000000
2/19/2012	2:18:03 PM	BCl3 MFC set to  0.000000
2/19/2012	2:18:03 PM	PH3 MFC set to  0.000000
2/19/2012	2:18:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:18:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:18:03 PM	Tube furnace set to 150
2/19/2012	2:18:33 PM	Helium valve closed
2/19/2012	2:18:33 PM	H2 valve closed
2/19/2012	2:18:33 PM	BCl3 valve closed
2/19/2012	2:18:33 PM	PH3 valve closed
2/19/2012	2:18:33 PM	SiCl4 pre valve closed
2/19/2012	2:18:33 PM	SiCl4 post valve closed
2/19/2012	2:18:33 PM	Bypass valve closed
2/19/2012	2:18:33 PM	Bubbler valve closed
2/19/2012	2:18:33 PM	Main Vac valve opened
2/19/2012	2:18:33 PM	Helium MFC set to  0.000000
2/19/2012	2:18:33 PM	H2 MFC set to  0.000000
2/19/2012	2:18:33 PM	BCl3 MFC set to  0.000000
2/19/2012	2:18:33 PM	PH3 MFC set to  0.000000
2/19/2012	2:18:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:18:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:18:33 PM	Tube furnace set to 150
2/19/2012	2:19:03 PM	H2 valve closed
2/19/2012	2:19:03 PM	BCl3 valve closed
2/19/2012	2:19:03 PM	PH3 valve closed
2/19/2012	2:19:03 PM	SiCl4 pre valve closed
2/19/2012	2:19:03 PM	SiCl4 post valve closed
2/19/2012	2:19:03 PM	Bypass valve closed
2/19/2012	2:19:03 PM	Bubbler valve closed
2/19/2012	2:19:03 PM	Helium valve opened
2/19/2012	2:19:03 PM	Main Vac valve opened
2/19/2012	2:19:03 PM	Helium MFC set to  20.000000
2/19/2012	2:19:03 PM	H2 MFC set to  0.000000
2/19/2012	2:19:03 PM	BCl3 MFC set to  0.000000
2/19/2012	2:19:03 PM	PH3 MFC set to  0.000000
2/19/2012	2:19:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:19:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:19:03 PM	Tube furnace set to 150
2/19/2012	2:19:33 PM	Helium valve closed
2/19/2012	2:19:33 PM	H2 valve closed
2/19/2012	2:19:33 PM	BCl3 valve closed
2/19/2012	2:19:33 PM	PH3 valve closed
2/19/2012	2:19:33 PM	SiCl4 pre valve closed
2/19/2012	2:19:33 PM	SiCl4 post valve closed
2/19/2012	2:19:33 PM	Bypass valve closed
2/19/2012	2:19:33 PM	Bubbler valve closed
2/19/2012	2:19:33 PM	Main Vac valve opened
2/19/2012	2:19:33 PM	Helium MFC set to  0.000000
2/19/2012	2:19:33 PM	H2 MFC set to  0.000000
2/19/2012	2:19:33 PM	BCl3 MFC set to  0.000000
2/19/2012	2:19:33 PM	PH3 MFC set to  0.000000
2/19/2012	2:19:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:19:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:19:33 PM	Tube furnace set to 150
2/19/2012	2:20:03 PM	H2 valve closed
2/19/2012	2:20:03 PM	BCl3 valve closed
2/19/2012	2:20:03 PM	PH3 valve closed
2/19/2012	2:20:03 PM	SiCl4 pre valve closed
2/19/2012	2:20:03 PM	SiCl4 post valve closed
2/19/2012	2:20:03 PM	Bypass valve closed
2/19/2012	2:20:03 PM	Bubbler valve closed
2/19/2012	2:20:03 PM	Helium valve opened
2/19/2012	2:20:03 PM	Main Vac valve opened
2/19/2012	2:20:03 PM	Helium MFC set to  20.000000
2/19/2012	2:20:03 PM	H2 MFC set to  0.000000
2/19/2012	2:20:03 PM	BCl3 MFC set to  0.000000
2/19/2012	2:20:03 PM	PH3 MFC set to  0.000000
2/19/2012	2:20:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:20:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:20:04 PM	Tube furnace set to 150
2/19/2012	2:20:34 PM	Helium valve closed
2/19/2012	2:20:34 PM	H2 valve closed
2/19/2012	2:20:34 PM	BCl3 valve closed
2/19/2012	2:20:34 PM	PH3 valve closed
2/19/2012	2:20:34 PM	SiCl4 pre valve closed
2/19/2012	2:20:34 PM	SiCl4 post valve closed
2/19/2012	2:20:34 PM	Bypass valve closed
2/19/2012	2:20:34 PM	Bubbler valve closed
2/19/2012	2:20:34 PM	Main Vac valve opened
2/19/2012	2:20:34 PM	Helium MFC set to  0.000000
2/19/2012	2:20:34 PM	H2 MFC set to  0.000000
2/19/2012	2:20:34 PM	BCl3 MFC set to  0.000000
2/19/2012	2:20:34 PM	PH3 MFC set to  0.000000
2/19/2012	2:20:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:20:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:20:34 PM	Tube furnace set to 150
2/19/2012	2:21:04 PM	H2 valve closed
2/19/2012	2:21:04 PM	BCl3 valve closed
2/19/2012	2:21:04 PM	PH3 valve closed
2/19/2012	2:21:04 PM	SiCl4 pre valve closed
2/19/2012	2:21:04 PM	SiCl4 post valve closed
2/19/2012	2:21:04 PM	Bypass valve closed
2/19/2012	2:21:04 PM	Bubbler valve closed
2/19/2012	2:21:04 PM	Helium valve opened
2/19/2012	2:21:04 PM	Main Vac valve opened
2/19/2012	2:21:04 PM	Helium MFC set to  20.000000
2/19/2012	2:21:04 PM	H2 MFC set to  0.000000
2/19/2012	2:21:04 PM	BCl3 MFC set to  0.000000
2/19/2012	2:21:04 PM	PH3 MFC set to  0.000000
2/19/2012	2:21:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:21:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:21:04 PM	Tube furnace set to 150
2/19/2012	2:21:34 PM	Helium valve closed
2/19/2012	2:21:34 PM	H2 valve closed
2/19/2012	2:21:34 PM	BCl3 valve closed
2/19/2012	2:21:34 PM	PH3 valve closed
2/19/2012	2:21:34 PM	SiCl4 pre valve closed
2/19/2012	2:21:34 PM	SiCl4 post valve closed
2/19/2012	2:21:34 PM	Bypass valve closed
2/19/2012	2:21:34 PM	Bubbler valve closed
2/19/2012	2:21:34 PM	Main Vac valve opened
2/19/2012	2:21:34 PM	Helium MFC set to  0.000000
2/19/2012	2:21:34 PM	H2 MFC set to  0.000000
2/19/2012	2:21:34 PM	BCl3 MFC set to  0.000000
2/19/2012	2:21:34 PM	PH3 MFC set to  0.000000
2/19/2012	2:21:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:21:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:21:34 PM	Tube furnace set to 150
2/19/2012	2:22:04 PM	H2 valve closed
2/19/2012	2:22:04 PM	BCl3 valve closed
2/19/2012	2:22:04 PM	PH3 valve closed
2/19/2012	2:22:04 PM	SiCl4 pre valve closed
2/19/2012	2:22:04 PM	SiCl4 post valve closed
2/19/2012	2:22:04 PM	Bypass valve closed
2/19/2012	2:22:04 PM	Bubbler valve closed
2/19/2012	2:22:04 PM	Helium valve opened
2/19/2012	2:22:04 PM	Main Vac valve opened
2/19/2012	2:22:04 PM	Helium MFC set to  20.000000
2/19/2012	2:22:04 PM	H2 MFC set to  0.000000
2/19/2012	2:22:04 PM	BCl3 MFC set to  0.000000
2/19/2012	2:22:04 PM	PH3 MFC set to  0.000000
2/19/2012	2:22:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:22:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:22:04 PM	Tube furnace set to 150
2/19/2012	2:22:34 PM	Helium valve closed
2/19/2012	2:22:34 PM	H2 valve closed
2/19/2012	2:22:34 PM	BCl3 valve closed
2/19/2012	2:22:34 PM	PH3 valve closed
2/19/2012	2:22:34 PM	SiCl4 pre valve closed
2/19/2012	2:22:34 PM	SiCl4 post valve closed
2/19/2012	2:22:34 PM	Bypass valve closed
2/19/2012	2:22:34 PM	Bubbler valve closed
2/19/2012	2:22:34 PM	Main Vac valve opened
2/19/2012	2:22:34 PM	Helium MFC set to  0.000000
2/19/2012	2:22:34 PM	H2 MFC set to  0.000000
2/19/2012	2:22:34 PM	BCl3 MFC set to  0.000000
2/19/2012	2:22:34 PM	PH3 MFC set to  0.000000
2/19/2012	2:22:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:22:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:22:35 PM	Tube furnace set to 150
2/19/2012	2:23:05 PM	H2 valve closed
2/19/2012	2:23:05 PM	BCl3 valve closed
2/19/2012	2:23:05 PM	PH3 valve closed
2/19/2012	2:23:05 PM	SiCl4 pre valve closed
2/19/2012	2:23:05 PM	SiCl4 post valve closed
2/19/2012	2:23:05 PM	Bypass valve closed
2/19/2012	2:23:05 PM	Bubbler valve closed
2/19/2012	2:23:05 PM	Helium valve opened
2/19/2012	2:23:05 PM	Main Vac valve opened
2/19/2012	2:23:05 PM	Helium MFC set to  20.000000
2/19/2012	2:23:05 PM	H2 MFC set to  0.000000
2/19/2012	2:23:05 PM	BCl3 MFC set to  0.000000
2/19/2012	2:23:05 PM	PH3 MFC set to  0.000000
2/19/2012	2:23:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:23:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:23:05 PM	Tube furnace set to 150
2/19/2012	2:23:35 PM	Helium valve closed
2/19/2012	2:23:35 PM	H2 valve closed
2/19/2012	2:23:35 PM	BCl3 valve closed
2/19/2012	2:23:35 PM	PH3 valve closed
2/19/2012	2:23:35 PM	SiCl4 pre valve closed
2/19/2012	2:23:35 PM	SiCl4 post valve closed
2/19/2012	2:23:35 PM	Bypass valve closed
2/19/2012	2:23:35 PM	Bubbler valve closed
2/19/2012	2:23:35 PM	Main Vac valve opened
2/19/2012	2:23:35 PM	Helium MFC set to  0.000000
2/19/2012	2:23:35 PM	H2 MFC set to  0.000000
2/19/2012	2:23:35 PM	BCl3 MFC set to  0.000000
2/19/2012	2:23:35 PM	PH3 MFC set to  0.000000
2/19/2012	2:23:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:23:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:23:35 PM	Tube furnace set to 150
2/19/2012	2:24:05 PM	H2 valve closed
2/19/2012	2:24:05 PM	BCl3 valve closed
2/19/2012	2:24:05 PM	PH3 valve closed
2/19/2012	2:24:05 PM	SiCl4 pre valve closed
2/19/2012	2:24:05 PM	SiCl4 post valve closed
2/19/2012	2:24:05 PM	Bypass valve closed
2/19/2012	2:24:05 PM	Bubbler valve closed
2/19/2012	2:24:05 PM	Helium valve opened
2/19/2012	2:24:05 PM	Main Vac valve opened
2/19/2012	2:24:05 PM	Helium MFC set to  20.000000
2/19/2012	2:24:05 PM	H2 MFC set to  0.000000
2/19/2012	2:24:05 PM	BCl3 MFC set to  0.000000
2/19/2012	2:24:05 PM	PH3 MFC set to  0.000000
2/19/2012	2:24:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:24:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:24:05 PM	Tube furnace set to 150
2/19/2012	2:24:35 PM	Helium valve closed
2/19/2012	2:24:35 PM	H2 valve closed
2/19/2012	2:24:35 PM	BCl3 valve closed
2/19/2012	2:24:35 PM	PH3 valve closed
2/19/2012	2:24:35 PM	SiCl4 pre valve closed
2/19/2012	2:24:35 PM	SiCl4 post valve closed
2/19/2012	2:24:35 PM	Bypass valve closed
2/19/2012	2:24:35 PM	Bubbler valve closed
2/19/2012	2:24:35 PM	Main Vac valve opened
2/19/2012	2:24:35 PM	Helium MFC set to  0.000000
2/19/2012	2:24:35 PM	H2 MFC set to  0.000000
2/19/2012	2:24:35 PM	BCl3 MFC set to  0.000000
2/19/2012	2:24:35 PM	PH3 MFC set to  0.000000
2/19/2012	2:24:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:24:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:24:35 PM	Tube furnace set to 150
2/19/2012	2:25:05 PM	H2 valve closed
2/19/2012	2:25:05 PM	BCl3 valve closed
2/19/2012	2:25:05 PM	PH3 valve closed
2/19/2012	2:25:05 PM	SiCl4 pre valve closed
2/19/2012	2:25:05 PM	SiCl4 post valve closed
2/19/2012	2:25:05 PM	Bypass valve closed
2/19/2012	2:25:05 PM	Bubbler valve closed
2/19/2012	2:25:05 PM	Helium valve opened
2/19/2012	2:25:05 PM	Main Vac valve opened
2/19/2012	2:25:05 PM	Helium MFC set to  20.000000
2/19/2012	2:25:05 PM	H2 MFC set to  0.000000
2/19/2012	2:25:05 PM	BCl3 MFC set to  0.000000
2/19/2012	2:25:05 PM	PH3 MFC set to  0.000000
2/19/2012	2:25:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:25:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:25:06 PM	Tube furnace set to 150
2/19/2012	2:25:36 PM	Helium valve closed
2/19/2012	2:25:36 PM	H2 valve closed
2/19/2012	2:25:36 PM	BCl3 valve closed
2/19/2012	2:25:36 PM	PH3 valve closed
2/19/2012	2:25:36 PM	SiCl4 pre valve closed
2/19/2012	2:25:36 PM	SiCl4 post valve closed
2/19/2012	2:25:36 PM	Bypass valve closed
2/19/2012	2:25:36 PM	Bubbler valve closed
2/19/2012	2:25:36 PM	Main Vac valve opened
2/19/2012	2:25:36 PM	Helium MFC set to  0.000000
2/19/2012	2:25:36 PM	H2 MFC set to  0.000000
2/19/2012	2:25:36 PM	BCl3 MFC set to  0.000000
2/19/2012	2:25:36 PM	PH3 MFC set to  0.000000
2/19/2012	2:25:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:25:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:25:36 PM	Tube furnace set to 150
2/19/2012	2:25:37 PM	Run finished at 2:25 PM
2/19/2012	2:29:00 PM	Main Vac valve closed
2/19/2012	2:29:16 PM	Main Vac valve opened
2/19/2012	2:29:55 PM	Recipe started at 2:29 PM
2/19/2012	2:29:55 PM	Helium valve closed
2/19/2012	2:29:55 PM	H2 valve closed
2/19/2012	2:29:55 PM	BCl3 valve closed
2/19/2012	2:29:55 PM	PH3 valve closed
2/19/2012	2:29:55 PM	SiCl4 pre valve closed
2/19/2012	2:29:55 PM	SiCl4 post valve closed
2/19/2012	2:29:55 PM	Main Vac valve closed
2/19/2012	2:29:55 PM	Bypass valve closed
2/19/2012	2:29:55 PM	Bubbler valve closed
2/19/2012	2:29:55 PM	Helium MFC set to  0.000000
2/19/2012	2:29:55 PM	H2 MFC set to  0.000000
2/19/2012	2:29:55 PM	BCl3 MFC set to  0.000000
2/19/2012	2:29:55 PM	PH3 MFC set to  0.000000
2/19/2012	2:29:55 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:29:55 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:29:56 PM	Tube furnace set to 0
2/19/2012	2:29:59 PM	Helium valve closed
2/19/2012	2:29:59 PM	BCl3 valve closed
2/19/2012	2:29:59 PM	PH3 valve closed
2/19/2012	2:29:59 PM	SiCl4 pre valve closed
2/19/2012	2:29:59 PM	SiCl4 post valve closed
2/19/2012	2:29:59 PM	Main Vac valve closed
2/19/2012	2:29:59 PM	Bypass valve closed
2/19/2012	2:29:59 PM	Bubbler valve closed
2/19/2012	2:29:59 PM	H2 valve opened
2/19/2012	2:29:59 PM	Helium MFC set to  0.000000
2/19/2012	2:29:59 PM	H2 MFC set to  500.000000
2/19/2012	2:29:59 PM	BCl3 MFC set to  0.000000
2/19/2012	2:29:59 PM	PH3 MFC set to  0.000000
2/19/2012	2:29:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:29:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:29:59 PM	Tube furnace set to 0
2/19/2012	2:31:02 PM	Helium valve closed
2/19/2012	2:31:02 PM	BCl3 valve closed
2/19/2012	2:31:02 PM	PH3 valve closed
2/19/2012	2:31:02 PM	SiCl4 pre valve closed
2/19/2012	2:31:02 PM	SiCl4 post valve closed
2/19/2012	2:31:02 PM	Main Vac valve closed
2/19/2012	2:31:02 PM	Bypass valve closed
2/19/2012	2:31:02 PM	H2 valve opened
2/19/2012	2:31:02 PM	Bubbler valve opened
2/19/2012	2:31:02 PM	Helium MFC set to  0.000000
2/19/2012	2:31:02 PM	H2 MFC set to  500.000000
2/19/2012	2:31:02 PM	BCl3 MFC set to  0.000000
2/19/2012	2:31:02 PM	PH3 MFC set to  0.000000
2/19/2012	2:31:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:31:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:31:03 PM	Tube furnace set to 0
2/19/2012	2:31:04 PM	Helium valve closed
2/19/2012	2:31:04 PM	BCl3 valve closed
2/19/2012	2:31:04 PM	PH3 valve closed
2/19/2012	2:31:04 PM	SiCl4 pre valve closed
2/19/2012	2:31:04 PM	SiCl4 post valve closed
2/19/2012	2:31:04 PM	Main Vac valve closed
2/19/2012	2:31:04 PM	Bypass valve closed
2/19/2012	2:31:04 PM	H2 valve opened
2/19/2012	2:31:04 PM	Bubbler valve opened
2/19/2012	2:31:04 PM	Helium MFC set to  0.000000
2/19/2012	2:31:04 PM	H2 MFC set to  500.000000
2/19/2012	2:31:04 PM	BCl3 MFC set to  0.000000
2/19/2012	2:31:04 PM	PH3 MFC set to  0.000000
2/19/2012	2:31:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	2:31:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:31:04 PM	Tube furnace set to 1000
2/19/2012	2:51:04 PM	Helium valve closed
2/19/2012	2:51:04 PM	PH3 valve closed
2/19/2012	2:51:04 PM	Main Vac valve closed
2/19/2012	2:51:04 PM	Bypass valve closed
2/19/2012	2:51:04 PM	H2 valve opened
2/19/2012	2:51:04 PM	BCl3 valve opened
2/19/2012	2:51:04 PM	SiCl4 pre valve opened
2/19/2012	2:51:04 PM	SiCl4 post valve opened
2/19/2012	2:51:04 PM	Bubbler valve opened
2/19/2012	2:51:04 PM	Helium MFC set to  0.000000
2/19/2012	2:51:04 PM	H2 MFC set to  500.000000
2/19/2012	2:51:04 PM	BCl3 MFC set to  20.000000
2/19/2012	2:51:04 PM	PH3 MFC set to  0.000000
2/19/2012	2:51:04 PM	SiCl4 MFC set to  50.000000
2/19/2012	2:51:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	2:51:04 PM	Tube furnace set to 1000
2/19/2012	3:01:04 PM	Helium valve closed
2/19/2012	3:01:04 PM	BCl3 valve closed
2/19/2012	3:01:04 PM	PH3 valve closed
2/19/2012	3:01:04 PM	SiCl4 pre valve closed
2/19/2012	3:01:04 PM	SiCl4 post valve closed
2/19/2012	3:01:04 PM	Main Vac valve closed
2/19/2012	3:01:04 PM	Bypass valve closed
2/19/2012	3:01:04 PM	H2 valve opened
2/19/2012	3:01:04 PM	Bubbler valve opened
2/19/2012	3:01:04 PM	Helium MFC set to  0.000000
2/19/2012	3:01:04 PM	H2 MFC set to  500.000000
2/19/2012	3:01:04 PM	BCl3 MFC set to  0.000000
2/19/2012	3:01:04 PM	PH3 MFC set to  0.000000
2/19/2012	3:01:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:01:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:01:04 PM	Tube furnace set to 750
2/19/2012	3:06:04 PM	H2 valve closed
2/19/2012	3:06:04 PM	BCl3 valve closed
2/19/2012	3:06:04 PM	PH3 valve closed
2/19/2012	3:06:04 PM	SiCl4 pre valve closed
2/19/2012	3:06:04 PM	SiCl4 post valve closed
2/19/2012	3:06:04 PM	Main Vac valve closed
2/19/2012	3:06:04 PM	Bypass valve closed
2/19/2012	3:06:04 PM	Helium valve opened
2/19/2012	3:06:04 PM	Bubbler valve opened
2/19/2012	3:06:04 PM	Helium MFC set to  500.000000
2/19/2012	3:06:04 PM	H2 MFC set to  0.000000
2/19/2012	3:06:04 PM	BCl3 MFC set to  0.000000
2/19/2012	3:06:04 PM	PH3 MFC set to  0.000000
2/19/2012	3:06:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:06:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:06:04 PM	Tube furnace set to 0
2/19/2012	3:26:04 PM	Helium valve closed
2/19/2012	3:26:04 PM	H2 valve closed
2/19/2012	3:26:04 PM	BCl3 valve closed
2/19/2012	3:26:04 PM	PH3 valve closed
2/19/2012	3:26:04 PM	SiCl4 pre valve closed
2/19/2012	3:26:04 PM	SiCl4 post valve closed
2/19/2012	3:26:04 PM	Main Vac valve closed
2/19/2012	3:26:04 PM	Bypass valve closed
2/19/2012	3:26:04 PM	Bubbler valve closed
2/19/2012	3:26:04 PM	Helium MFC set to  0.000000
2/19/2012	3:26:04 PM	H2 MFC set to  0.000000
2/19/2012	3:26:04 PM	BCl3 MFC set to  0.000000
2/19/2012	3:26:04 PM	PH3 MFC set to  0.000000
2/19/2012	3:26:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:26:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:26:04 PM	Tube furnace set to 0
2/19/2012	3:26:05 PM	Run finished at 3:26 PM
2/19/2012	3:26:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	3:26:12 PM	Recipe started at 3:26 PM
2/19/2012	3:26:12 PM	Helium valve closed
2/19/2012	3:26:12 PM	H2 valve closed
2/19/2012	3:26:12 PM	BCl3 valve closed
2/19/2012	3:26:12 PM	PH3 valve closed
2/19/2012	3:26:12 PM	SiCl4 pre valve closed
2/19/2012	3:26:12 PM	SiCl4 post valve closed
2/19/2012	3:26:12 PM	Main Vac valve closed
2/19/2012	3:26:12 PM	Bubbler valve closed
2/19/2012	3:26:12 PM	Bypass valve opened
2/19/2012	3:26:12 PM	Helium MFC set to  0.000000
2/19/2012	3:26:12 PM	H2 MFC set to  0.000000
2/19/2012	3:26:12 PM	BCl3 MFC set to  0.000000
2/19/2012	3:26:12 PM	PH3 MFC set to  0.000000
2/19/2012	3:26:12 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:26:12 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:26:13 PM	Tube furnace set to 0
2/19/2012	3:27:03 PM	Helium valve closed
2/19/2012	3:27:03 PM	H2 valve closed
2/19/2012	3:27:03 PM	BCl3 valve closed
2/19/2012	3:27:03 PM	PH3 valve closed
2/19/2012	3:27:03 PM	SiCl4 pre valve closed
2/19/2012	3:27:03 PM	SiCl4 post valve closed
2/19/2012	3:27:03 PM	Main Vac valve closed
2/19/2012	3:27:03 PM	Bubbler valve closed
2/19/2012	3:27:03 PM	Bypass valve opened
2/19/2012	3:27:03 PM	Helium MFC set to  0.000000
2/19/2012	3:27:03 PM	H2 MFC set to  0.000000
2/19/2012	3:27:03 PM	BCl3 MFC set to  0.000000
2/19/2012	3:27:03 PM	PH3 MFC set to  0.000000
2/19/2012	3:27:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:27:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:27:04 PM	Tube furnace set to 0
2/19/2012	3:28:04 PM	Helium valve closed
2/19/2012	3:28:04 PM	H2 valve closed
2/19/2012	3:28:04 PM	BCl3 valve closed
2/19/2012	3:28:04 PM	PH3 valve closed
2/19/2012	3:28:04 PM	SiCl4 pre valve closed
2/19/2012	3:28:04 PM	SiCl4 post valve closed
2/19/2012	3:28:04 PM	Bypass valve closed
2/19/2012	3:28:04 PM	Bubbler valve closed
2/19/2012	3:28:04 PM	Main Vac valve opened
2/19/2012	3:28:04 PM	Helium MFC set to  0.000000
2/19/2012	3:28:04 PM	H2 MFC set to  0.000000
2/19/2012	3:28:04 PM	BCl3 MFC set to  0.000000
2/19/2012	3:28:04 PM	PH3 MFC set to  0.000000
2/19/2012	3:28:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:28:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:28:04 PM	Tube furnace set to 0
2/19/2012	3:28:05 PM	Run finished at 3:28 PM
2/19/2012	3:28:05 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	3:28:56 PM	Main Vac valve closed
2/19/2012	3:28:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2012	3:28:59 PM	Recipe started at 3:28 PM
2/19/2012	3:28:59 PM	Helium valve closed
2/19/2012	3:28:59 PM	H2 valve closed
2/19/2012	3:28:59 PM	BCl3 valve closed
2/19/2012	3:28:59 PM	PH3 valve closed
2/19/2012	3:28:59 PM	SiCl4 pre valve closed
2/19/2012	3:28:59 PM	SiCl4 post valve closed
2/19/2012	3:28:59 PM	Main Vac valve closed
2/19/2012	3:28:59 PM	Bypass valve closed
2/19/2012	3:28:59 PM	Bubbler valve closed
2/19/2012	3:28:59 PM	Helium MFC set to  0.000000
2/19/2012	3:28:59 PM	H2 MFC set to  0.000000
2/19/2012	3:28:59 PM	BCl3 MFC set to  0.000000
2/19/2012	3:28:59 PM	PH3 MFC set to  0.000000
2/19/2012	3:28:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:28:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:28:59 PM	Tube furnace set to 0
2/19/2012	3:29:02 PM	H2 valve closed
2/19/2012	3:29:02 PM	BCl3 valve closed
2/19/2012	3:29:02 PM	PH3 valve closed
2/19/2012	3:29:02 PM	SiCl4 pre valve closed
2/19/2012	3:29:02 PM	SiCl4 post valve closed
2/19/2012	3:29:02 PM	Main Vac valve closed
2/19/2012	3:29:02 PM	Bypass valve closed
2/19/2012	3:29:02 PM	Bubbler valve closed
2/19/2012	3:29:02 PM	Helium valve opened
2/19/2012	3:29:02 PM	Helium MFC set to  500.000000
2/19/2012	3:29:02 PM	H2 MFC set to  0.000000
2/19/2012	3:29:02 PM	BCl3 MFC set to  0.000000
2/19/2012	3:29:02 PM	PH3 MFC set to  0.000000
2/19/2012	3:29:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:29:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:29:03 PM	Tube furnace set to 0
2/19/2012	3:30:05 PM	Helium valve closed
2/19/2012	3:30:05 PM	H2 valve closed
2/19/2012	3:30:05 PM	BCl3 valve closed
2/19/2012	3:30:05 PM	PH3 valve closed
2/19/2012	3:30:05 PM	SiCl4 pre valve closed
2/19/2012	3:30:05 PM	SiCl4 post valve closed
2/19/2012	3:30:05 PM	Main Vac valve closed
2/19/2012	3:30:05 PM	Bypass valve closed
2/19/2012	3:30:05 PM	Bubbler valve closed
2/19/2012	3:30:05 PM	Helium MFC set to  0.000000
2/19/2012	3:30:05 PM	H2 MFC set to  0.000000
2/19/2012	3:30:05 PM	BCl3 MFC set to  0.000000
2/19/2012	3:30:05 PM	PH3 MFC set to  0.000000
2/19/2012	3:30:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:30:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:30:06 PM	Tube furnace set to 0
2/19/2012	3:30:07 PM	Run finished at 3:30 PM
2/19/2012	3:30:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2012	3:34:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	3:34:31 PM	Recipe started at 3:34 PM
2/19/2012	3:34:31 PM	Helium valve closed
2/19/2012	3:34:31 PM	H2 valve closed
2/19/2012	3:34:31 PM	BCl3 valve closed
2/19/2012	3:34:31 PM	PH3 valve closed
2/19/2012	3:34:31 PM	SiCl4 pre valve closed
2/19/2012	3:34:31 PM	SiCl4 post valve closed
2/19/2012	3:34:31 PM	Main Vac valve closed
2/19/2012	3:34:31 PM	Bubbler valve closed
2/19/2012	3:34:31 PM	Bypass valve opened
2/19/2012	3:34:31 PM	Helium MFC set to  0.000000
2/19/2012	3:34:31 PM	H2 MFC set to  0.000000
2/19/2012	3:34:31 PM	BCl3 MFC set to  0.000000
2/19/2012	3:34:31 PM	PH3 MFC set to  0.000000
2/19/2012	3:34:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:34:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:34:31 PM	Tube furnace set to 0
2/19/2012	3:35:34 PM	Helium valve closed
2/19/2012	3:35:34 PM	H2 valve closed
2/19/2012	3:35:34 PM	BCl3 valve closed
2/19/2012	3:35:34 PM	PH3 valve closed
2/19/2012	3:35:34 PM	SiCl4 pre valve closed
2/19/2012	3:35:34 PM	SiCl4 post valve closed
2/19/2012	3:35:34 PM	Main Vac valve closed
2/19/2012	3:35:34 PM	Bubbler valve closed
2/19/2012	3:35:34 PM	Bypass valve opened
2/19/2012	3:35:34 PM	Helium MFC set to  0.000000
2/19/2012	3:35:34 PM	H2 MFC set to  0.000000
2/19/2012	3:35:34 PM	BCl3 MFC set to  0.000000
2/19/2012	3:35:34 PM	PH3 MFC set to  0.000000
2/19/2012	3:35:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:35:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:35:34 PM	Tube furnace set to 0
2/19/2012	3:36:34 PM	Helium valve closed
2/19/2012	3:36:34 PM	H2 valve closed
2/19/2012	3:36:34 PM	BCl3 valve closed
2/19/2012	3:36:34 PM	PH3 valve closed
2/19/2012	3:36:34 PM	SiCl4 pre valve closed
2/19/2012	3:36:34 PM	SiCl4 post valve closed
2/19/2012	3:36:34 PM	Bypass valve closed
2/19/2012	3:36:34 PM	Bubbler valve closed
2/19/2012	3:36:34 PM	Main Vac valve opened
2/19/2012	3:36:34 PM	Helium MFC set to  0.000000
2/19/2012	3:36:34 PM	H2 MFC set to  0.000000
2/19/2012	3:36:34 PM	BCl3 MFC set to  0.000000
2/19/2012	3:36:34 PM	PH3 MFC set to  0.000000
2/19/2012	3:36:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:36:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:36:34 PM	Tube furnace set to 0
2/19/2012	3:36:35 PM	Run finished at 3:36 PM
2/19/2012	3:36:35 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	3:37:04 PM	Recipe started at 3:36 PM
2/19/2012	3:37:04 PM	Helium valve closed
2/19/2012	3:37:04 PM	H2 valve closed
2/19/2012	3:37:04 PM	BCl3 valve closed
2/19/2012	3:37:04 PM	PH3 valve closed
2/19/2012	3:37:04 PM	SiCl4 pre valve closed
2/19/2012	3:37:04 PM	SiCl4 post valve closed
2/19/2012	3:37:04 PM	Bypass valve closed
2/19/2012	3:37:04 PM	Bubbler valve closed
2/19/2012	3:37:04 PM	Main Vac valve opened
2/19/2012	3:37:04 PM	Helium MFC set to  0.000000
2/19/2012	3:37:04 PM	H2 MFC set to  0.000000
2/19/2012	3:37:04 PM	BCl3 MFC set to  0.000000
2/19/2012	3:37:04 PM	PH3 MFC set to  0.000000
2/19/2012	3:37:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:37:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:37:04 PM	Tube furnace set to 150
2/19/2012	3:37:34 PM	H2 valve closed
2/19/2012	3:37:34 PM	BCl3 valve closed
2/19/2012	3:37:34 PM	PH3 valve closed
2/19/2012	3:37:34 PM	SiCl4 pre valve closed
2/19/2012	3:37:34 PM	SiCl4 post valve closed
2/19/2012	3:37:34 PM	Bypass valve closed
2/19/2012	3:37:34 PM	Bubbler valve closed
2/19/2012	3:37:34 PM	Helium valve opened
2/19/2012	3:37:34 PM	Main Vac valve opened
2/19/2012	3:37:34 PM	Helium MFC set to  20.000000
2/19/2012	3:37:34 PM	H2 MFC set to  0.000000
2/19/2012	3:37:34 PM	BCl3 MFC set to  0.000000
2/19/2012	3:37:34 PM	PH3 MFC set to  0.000000
2/19/2012	3:37:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:37:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:37:34 PM	Tube furnace set to 150
2/19/2012	3:38:04 PM	Helium valve closed
2/19/2012	3:38:04 PM	H2 valve closed
2/19/2012	3:38:04 PM	BCl3 valve closed
2/19/2012	3:38:04 PM	PH3 valve closed
2/19/2012	3:38:04 PM	SiCl4 pre valve closed
2/19/2012	3:38:04 PM	SiCl4 post valve closed
2/19/2012	3:38:04 PM	Bypass valve closed
2/19/2012	3:38:04 PM	Bubbler valve closed
2/19/2012	3:38:04 PM	Main Vac valve opened
2/19/2012	3:38:04 PM	Helium MFC set to  0.000000
2/19/2012	3:38:04 PM	H2 MFC set to  0.000000
2/19/2012	3:38:04 PM	BCl3 MFC set to  0.000000
2/19/2012	3:38:04 PM	PH3 MFC set to  0.000000
2/19/2012	3:38:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:38:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:38:04 PM	Tube furnace set to 150
2/19/2012	3:38:34 PM	H2 valve closed
2/19/2012	3:38:34 PM	BCl3 valve closed
2/19/2012	3:38:34 PM	PH3 valve closed
2/19/2012	3:38:34 PM	SiCl4 pre valve closed
2/19/2012	3:38:34 PM	SiCl4 post valve closed
2/19/2012	3:38:34 PM	Bypass valve closed
2/19/2012	3:38:34 PM	Bubbler valve closed
2/19/2012	3:38:34 PM	Helium valve opened
2/19/2012	3:38:34 PM	Main Vac valve opened
2/19/2012	3:38:34 PM	Helium MFC set to  20.000000
2/19/2012	3:38:34 PM	H2 MFC set to  0.000000
2/19/2012	3:38:34 PM	BCl3 MFC set to  0.000000
2/19/2012	3:38:34 PM	PH3 MFC set to  0.000000
2/19/2012	3:38:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:38:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:38:34 PM	Tube furnace set to 150
2/19/2012	3:39:05 PM	Helium valve closed
2/19/2012	3:39:05 PM	H2 valve closed
2/19/2012	3:39:05 PM	BCl3 valve closed
2/19/2012	3:39:05 PM	PH3 valve closed
2/19/2012	3:39:05 PM	SiCl4 pre valve closed
2/19/2012	3:39:05 PM	SiCl4 post valve closed
2/19/2012	3:39:05 PM	Bypass valve closed
2/19/2012	3:39:05 PM	Bubbler valve closed
2/19/2012	3:39:05 PM	Main Vac valve opened
2/19/2012	3:39:05 PM	Helium MFC set to  0.000000
2/19/2012	3:39:05 PM	H2 MFC set to  0.000000
2/19/2012	3:39:05 PM	BCl3 MFC set to  0.000000
2/19/2012	3:39:05 PM	PH3 MFC set to  0.000000
2/19/2012	3:39:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:39:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:39:05 PM	Tube furnace set to 150
2/19/2012	3:39:35 PM	H2 valve closed
2/19/2012	3:39:35 PM	BCl3 valve closed
2/19/2012	3:39:35 PM	PH3 valve closed
2/19/2012	3:39:35 PM	SiCl4 pre valve closed
2/19/2012	3:39:35 PM	SiCl4 post valve closed
2/19/2012	3:39:35 PM	Bypass valve closed
2/19/2012	3:39:35 PM	Bubbler valve closed
2/19/2012	3:39:35 PM	Helium valve opened
2/19/2012	3:39:35 PM	Main Vac valve opened
2/19/2012	3:39:35 PM	Helium MFC set to  20.000000
2/19/2012	3:39:35 PM	H2 MFC set to  0.000000
2/19/2012	3:39:35 PM	BCl3 MFC set to  0.000000
2/19/2012	3:39:35 PM	PH3 MFC set to  0.000000
2/19/2012	3:39:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:39:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:39:35 PM	Tube furnace set to 150
2/19/2012	3:40:05 PM	Helium valve closed
2/19/2012	3:40:05 PM	H2 valve closed
2/19/2012	3:40:05 PM	BCl3 valve closed
2/19/2012	3:40:05 PM	PH3 valve closed
2/19/2012	3:40:05 PM	SiCl4 pre valve closed
2/19/2012	3:40:05 PM	SiCl4 post valve closed
2/19/2012	3:40:05 PM	Bypass valve closed
2/19/2012	3:40:05 PM	Bubbler valve closed
2/19/2012	3:40:05 PM	Main Vac valve opened
2/19/2012	3:40:05 PM	Helium MFC set to  0.000000
2/19/2012	3:40:05 PM	H2 MFC set to  0.000000
2/19/2012	3:40:05 PM	BCl3 MFC set to  0.000000
2/19/2012	3:40:05 PM	PH3 MFC set to  0.000000
2/19/2012	3:40:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:40:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:40:05 PM	Tube furnace set to 150
2/19/2012	3:40:35 PM	H2 valve closed
2/19/2012	3:40:35 PM	BCl3 valve closed
2/19/2012	3:40:35 PM	PH3 valve closed
2/19/2012	3:40:35 PM	SiCl4 pre valve closed
2/19/2012	3:40:35 PM	SiCl4 post valve closed
2/19/2012	3:40:35 PM	Bypass valve closed
2/19/2012	3:40:35 PM	Bubbler valve closed
2/19/2012	3:40:35 PM	Helium valve opened
2/19/2012	3:40:35 PM	Main Vac valve opened
2/19/2012	3:40:35 PM	Helium MFC set to  20.000000
2/19/2012	3:40:35 PM	H2 MFC set to  0.000000
2/19/2012	3:40:35 PM	BCl3 MFC set to  0.000000
2/19/2012	3:40:35 PM	PH3 MFC set to  0.000000
2/19/2012	3:40:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:40:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:40:35 PM	Tube furnace set to 150
2/19/2012	3:41:05 PM	Helium valve closed
2/19/2012	3:41:05 PM	H2 valve closed
2/19/2012	3:41:05 PM	BCl3 valve closed
2/19/2012	3:41:05 PM	PH3 valve closed
2/19/2012	3:41:05 PM	SiCl4 pre valve closed
2/19/2012	3:41:05 PM	SiCl4 post valve closed
2/19/2012	3:41:05 PM	Bypass valve closed
2/19/2012	3:41:05 PM	Bubbler valve closed
2/19/2012	3:41:05 PM	Main Vac valve opened
2/19/2012	3:41:05 PM	Helium MFC set to  0.000000
2/19/2012	3:41:05 PM	H2 MFC set to  0.000000
2/19/2012	3:41:05 PM	BCl3 MFC set to  0.000000
2/19/2012	3:41:05 PM	PH3 MFC set to  0.000000
2/19/2012	3:41:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:41:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:41:06 PM	Tube furnace set to 150
2/19/2012	3:41:36 PM	H2 valve closed
2/19/2012	3:41:36 PM	BCl3 valve closed
2/19/2012	3:41:36 PM	PH3 valve closed
2/19/2012	3:41:36 PM	SiCl4 pre valve closed
2/19/2012	3:41:36 PM	SiCl4 post valve closed
2/19/2012	3:41:36 PM	Bypass valve closed
2/19/2012	3:41:36 PM	Bubbler valve closed
2/19/2012	3:41:36 PM	Helium valve opened
2/19/2012	3:41:36 PM	Main Vac valve opened
2/19/2012	3:41:36 PM	Helium MFC set to  20.000000
2/19/2012	3:41:36 PM	H2 MFC set to  0.000000
2/19/2012	3:41:36 PM	BCl3 MFC set to  0.000000
2/19/2012	3:41:36 PM	PH3 MFC set to  0.000000
2/19/2012	3:41:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:41:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:41:36 PM	Tube furnace set to 150
2/19/2012	3:42:06 PM	Helium valve closed
2/19/2012	3:42:06 PM	H2 valve closed
2/19/2012	3:42:06 PM	BCl3 valve closed
2/19/2012	3:42:06 PM	PH3 valve closed
2/19/2012	3:42:06 PM	SiCl4 pre valve closed
2/19/2012	3:42:06 PM	SiCl4 post valve closed
2/19/2012	3:42:06 PM	Bypass valve closed
2/19/2012	3:42:06 PM	Bubbler valve closed
2/19/2012	3:42:06 PM	Main Vac valve opened
2/19/2012	3:42:06 PM	Helium MFC set to  0.000000
2/19/2012	3:42:06 PM	H2 MFC set to  0.000000
2/19/2012	3:42:06 PM	BCl3 MFC set to  0.000000
2/19/2012	3:42:06 PM	PH3 MFC set to  0.000000
2/19/2012	3:42:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:42:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:42:06 PM	Tube furnace set to 150
2/19/2012	3:42:36 PM	H2 valve closed
2/19/2012	3:42:36 PM	BCl3 valve closed
2/19/2012	3:42:36 PM	PH3 valve closed
2/19/2012	3:42:36 PM	SiCl4 pre valve closed
2/19/2012	3:42:36 PM	SiCl4 post valve closed
2/19/2012	3:42:36 PM	Bypass valve closed
2/19/2012	3:42:36 PM	Bubbler valve closed
2/19/2012	3:42:36 PM	Helium valve opened
2/19/2012	3:42:36 PM	Main Vac valve opened
2/19/2012	3:42:36 PM	Helium MFC set to  20.000000
2/19/2012	3:42:36 PM	H2 MFC set to  0.000000
2/19/2012	3:42:36 PM	BCl3 MFC set to  0.000000
2/19/2012	3:42:36 PM	PH3 MFC set to  0.000000
2/19/2012	3:42:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:42:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:42:36 PM	Tube furnace set to 150
2/19/2012	3:43:06 PM	Helium valve closed
2/19/2012	3:43:06 PM	H2 valve closed
2/19/2012	3:43:06 PM	BCl3 valve closed
2/19/2012	3:43:06 PM	PH3 valve closed
2/19/2012	3:43:06 PM	SiCl4 pre valve closed
2/19/2012	3:43:06 PM	SiCl4 post valve closed
2/19/2012	3:43:06 PM	Bypass valve closed
2/19/2012	3:43:06 PM	Bubbler valve closed
2/19/2012	3:43:06 PM	Main Vac valve opened
2/19/2012	3:43:06 PM	Helium MFC set to  0.000000
2/19/2012	3:43:06 PM	H2 MFC set to  0.000000
2/19/2012	3:43:06 PM	BCl3 MFC set to  0.000000
2/19/2012	3:43:06 PM	PH3 MFC set to  0.000000
2/19/2012	3:43:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:43:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:43:06 PM	Tube furnace set to 150
2/19/2012	3:43:36 PM	H2 valve closed
2/19/2012	3:43:36 PM	BCl3 valve closed
2/19/2012	3:43:36 PM	PH3 valve closed
2/19/2012	3:43:36 PM	SiCl4 pre valve closed
2/19/2012	3:43:36 PM	SiCl4 post valve closed
2/19/2012	3:43:36 PM	Bypass valve closed
2/19/2012	3:43:36 PM	Bubbler valve closed
2/19/2012	3:43:36 PM	Helium valve opened
2/19/2012	3:43:36 PM	Main Vac valve opened
2/19/2012	3:43:36 PM	Helium MFC set to  20.000000
2/19/2012	3:43:36 PM	H2 MFC set to  0.000000
2/19/2012	3:43:36 PM	BCl3 MFC set to  0.000000
2/19/2012	3:43:36 PM	PH3 MFC set to  0.000000
2/19/2012	3:43:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:43:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:43:37 PM	Tube furnace set to 150
2/19/2012	3:44:07 PM	Helium valve closed
2/19/2012	3:44:07 PM	H2 valve closed
2/19/2012	3:44:07 PM	BCl3 valve closed
2/19/2012	3:44:07 PM	PH3 valve closed
2/19/2012	3:44:07 PM	SiCl4 pre valve closed
2/19/2012	3:44:07 PM	SiCl4 post valve closed
2/19/2012	3:44:07 PM	Bypass valve closed
2/19/2012	3:44:07 PM	Bubbler valve closed
2/19/2012	3:44:07 PM	Main Vac valve opened
2/19/2012	3:44:07 PM	Helium MFC set to  0.000000
2/19/2012	3:44:07 PM	H2 MFC set to  0.000000
2/19/2012	3:44:07 PM	BCl3 MFC set to  0.000000
2/19/2012	3:44:07 PM	PH3 MFC set to  0.000000
2/19/2012	3:44:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:44:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:44:07 PM	Tube furnace set to 150
2/19/2012	3:44:37 PM	H2 valve closed
2/19/2012	3:44:37 PM	BCl3 valve closed
2/19/2012	3:44:37 PM	PH3 valve closed
2/19/2012	3:44:37 PM	SiCl4 pre valve closed
2/19/2012	3:44:37 PM	SiCl4 post valve closed
2/19/2012	3:44:37 PM	Bypass valve closed
2/19/2012	3:44:37 PM	Bubbler valve closed
2/19/2012	3:44:37 PM	Helium valve opened
2/19/2012	3:44:37 PM	Main Vac valve opened
2/19/2012	3:44:37 PM	Helium MFC set to  20.000000
2/19/2012	3:44:37 PM	H2 MFC set to  0.000000
2/19/2012	3:44:37 PM	BCl3 MFC set to  0.000000
2/19/2012	3:44:37 PM	PH3 MFC set to  0.000000
2/19/2012	3:44:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:44:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:44:37 PM	Tube furnace set to 150
2/19/2012	3:45:07 PM	Helium valve closed
2/19/2012	3:45:07 PM	H2 valve closed
2/19/2012	3:45:07 PM	BCl3 valve closed
2/19/2012	3:45:07 PM	PH3 valve closed
2/19/2012	3:45:07 PM	SiCl4 pre valve closed
2/19/2012	3:45:07 PM	SiCl4 post valve closed
2/19/2012	3:45:07 PM	Bypass valve closed
2/19/2012	3:45:07 PM	Bubbler valve closed
2/19/2012	3:45:07 PM	Main Vac valve opened
2/19/2012	3:45:07 PM	Helium MFC set to  0.000000
2/19/2012	3:45:07 PM	H2 MFC set to  0.000000
2/19/2012	3:45:07 PM	BCl3 MFC set to  0.000000
2/19/2012	3:45:07 PM	PH3 MFC set to  0.000000
2/19/2012	3:45:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:45:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:45:07 PM	Tube furnace set to 150
2/19/2012	3:45:37 PM	H2 valve closed
2/19/2012	3:45:37 PM	BCl3 valve closed
2/19/2012	3:45:37 PM	PH3 valve closed
2/19/2012	3:45:37 PM	SiCl4 pre valve closed
2/19/2012	3:45:37 PM	SiCl4 post valve closed
2/19/2012	3:45:37 PM	Bypass valve closed
2/19/2012	3:45:37 PM	Bubbler valve closed
2/19/2012	3:45:37 PM	Helium valve opened
2/19/2012	3:45:37 PM	Main Vac valve opened
2/19/2012	3:45:37 PM	Helium MFC set to  20.000000
2/19/2012	3:45:37 PM	H2 MFC set to  0.000000
2/19/2012	3:45:37 PM	BCl3 MFC set to  0.000000
2/19/2012	3:45:37 PM	PH3 MFC set to  0.000000
2/19/2012	3:45:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:45:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:45:37 PM	Tube furnace set to 150
2/19/2012	3:46:07 PM	Helium valve closed
2/19/2012	3:46:07 PM	H2 valve closed
2/19/2012	3:46:07 PM	BCl3 valve closed
2/19/2012	3:46:07 PM	PH3 valve closed
2/19/2012	3:46:07 PM	SiCl4 pre valve closed
2/19/2012	3:46:07 PM	SiCl4 post valve closed
2/19/2012	3:46:07 PM	Bypass valve closed
2/19/2012	3:46:07 PM	Bubbler valve closed
2/19/2012	3:46:07 PM	Main Vac valve opened
2/19/2012	3:46:07 PM	Helium MFC set to  0.000000
2/19/2012	3:46:07 PM	H2 MFC set to  0.000000
2/19/2012	3:46:07 PM	BCl3 MFC set to  0.000000
2/19/2012	3:46:07 PM	PH3 MFC set to  0.000000
2/19/2012	3:46:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:46:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:46:08 PM	Tube furnace set to 150
2/19/2012	3:46:38 PM	H2 valve closed
2/19/2012	3:46:38 PM	BCl3 valve closed
2/19/2012	3:46:38 PM	PH3 valve closed
2/19/2012	3:46:38 PM	SiCl4 pre valve closed
2/19/2012	3:46:38 PM	SiCl4 post valve closed
2/19/2012	3:46:38 PM	Bypass valve closed
2/19/2012	3:46:38 PM	Bubbler valve closed
2/19/2012	3:46:38 PM	Helium valve opened
2/19/2012	3:46:38 PM	Main Vac valve opened
2/19/2012	3:46:38 PM	Helium MFC set to  20.000000
2/19/2012	3:46:38 PM	H2 MFC set to  0.000000
2/19/2012	3:46:38 PM	BCl3 MFC set to  0.000000
2/19/2012	3:46:38 PM	PH3 MFC set to  0.000000
2/19/2012	3:46:38 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:46:38 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:46:38 PM	Tube furnace set to 150
2/19/2012	3:47:08 PM	Helium valve closed
2/19/2012	3:47:08 PM	H2 valve closed
2/19/2012	3:47:08 PM	BCl3 valve closed
2/19/2012	3:47:08 PM	PH3 valve closed
2/19/2012	3:47:08 PM	SiCl4 pre valve closed
2/19/2012	3:47:08 PM	SiCl4 post valve closed
2/19/2012	3:47:08 PM	Bypass valve closed
2/19/2012	3:47:08 PM	Bubbler valve closed
2/19/2012	3:47:08 PM	Main Vac valve opened
2/19/2012	3:47:08 PM	Helium MFC set to  0.000000
2/19/2012	3:47:08 PM	H2 MFC set to  0.000000
2/19/2012	3:47:08 PM	BCl3 MFC set to  0.000000
2/19/2012	3:47:08 PM	PH3 MFC set to  0.000000
2/19/2012	3:47:08 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:47:08 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:47:08 PM	Tube furnace set to 150
2/19/2012	3:47:09 PM	Run finished at 3:47 PM
2/19/2012	3:54:03 PM	Main Vac valve closed
2/19/2012	3:54:19 PM	Main Vac valve opened
2/19/2012	3:54:28 PM	Recipe started at 3:54 PM
2/19/2012	3:54:28 PM	Helium valve closed
2/19/2012	3:54:28 PM	H2 valve closed
2/19/2012	3:54:28 PM	BCl3 valve closed
2/19/2012	3:54:28 PM	PH3 valve closed
2/19/2012	3:54:28 PM	SiCl4 pre valve closed
2/19/2012	3:54:28 PM	SiCl4 post valve closed
2/19/2012	3:54:28 PM	Bypass valve closed
2/19/2012	3:54:28 PM	Bubbler valve closed
2/19/2012	3:54:28 PM	Main Vac valve opened
2/19/2012	3:54:28 PM	Helium MFC set to  0.000000
2/19/2012	3:54:28 PM	H2 MFC set to  0.000000
2/19/2012	3:54:28 PM	BCl3 MFC set to  0.000000
2/19/2012	3:54:28 PM	PH3 MFC set to  0.000000
2/19/2012	3:54:28 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:54:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:54:28 PM	Tube furnace set to 150
2/19/2012	3:54:58 PM	H2 valve closed
2/19/2012	3:54:58 PM	BCl3 valve closed
2/19/2012	3:54:58 PM	PH3 valve closed
2/19/2012	3:54:58 PM	SiCl4 pre valve closed
2/19/2012	3:54:58 PM	SiCl4 post valve closed
2/19/2012	3:54:58 PM	Bypass valve closed
2/19/2012	3:54:58 PM	Bubbler valve closed
2/19/2012	3:54:58 PM	Helium valve opened
2/19/2012	3:54:58 PM	Main Vac valve opened
2/19/2012	3:54:58 PM	Helium MFC set to  20.000000
2/19/2012	3:54:58 PM	H2 MFC set to  0.000000
2/19/2012	3:54:58 PM	BCl3 MFC set to  0.000000
2/19/2012	3:54:58 PM	PH3 MFC set to  0.000000
2/19/2012	3:54:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:54:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	3:54:58 PM	Tube furnace set to 150
2/19/2012	3:55:09 PM	Run aborted at 3:55 PM
2/19/2012	3:55:09 PM	Helium valve closed
2/19/2012	3:55:09 PM	H2 valve closed
2/19/2012	3:55:09 PM	BCl3 valve closed
2/19/2012	3:55:09 PM	PH3 valve closed
2/19/2012	3:55:09 PM	SiCl4 pre valve closed
2/19/2012	3:55:09 PM	SiCl4 post valve closed
2/19/2012	3:55:09 PM	Bypass valve closed
2/19/2012	3:55:09 PM	Main Vac valve closed
2/19/2012	3:55:09 PM	Bubbler valve closed
2/19/2012	3:55:09 PM	Helium MFC set to  0.000000
2/19/2012	3:55:09 PM	H2 MFC set to  0.000000
2/19/2012	3:55:09 PM	BCl3 MFC set to  0.000000
2/19/2012	3:55:09 PM	PH3 MFC set to  0.000000
2/19/2012	3:55:09 PM	SiCl4 MFC set to  0.000000
2/19/2012	3:55:09 PM	Tube furnace set to 0
2/19/2012	3:55:12 PM	Main Vac valve opened
2/19/2012	4:03:26 PM	Recipe started at 4:03 PM
2/19/2012	4:03:26 PM	Helium valve closed
2/19/2012	4:03:26 PM	H2 valve closed
2/19/2012	4:03:26 PM	BCl3 valve closed
2/19/2012	4:03:26 PM	PH3 valve closed
2/19/2012	4:03:26 PM	SiCl4 pre valve closed
2/19/2012	4:03:27 PM	SiCl4 post valve closed
2/19/2012	4:03:27 PM	Bypass valve closed
2/19/2012	4:03:27 PM	Bubbler valve closed
2/19/2012	4:03:27 PM	Main Vac valve opened
2/19/2012	4:03:27 PM	Helium MFC set to  0.000000
2/19/2012	4:03:27 PM	H2 MFC set to  0.000000
2/19/2012	4:03:27 PM	BCl3 MFC set to  0.000000
2/19/2012	4:03:27 PM	PH3 MFC set to  0.000000
2/19/2012	4:03:27 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:03:27 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:03:27 PM	Tube furnace set to 180
2/19/2012	4:04:27 PM	H2 valve closed
2/19/2012	4:04:27 PM	BCl3 valve closed
2/19/2012	4:04:27 PM	PH3 valve closed
2/19/2012	4:04:27 PM	SiCl4 pre valve closed
2/19/2012	4:04:27 PM	SiCl4 post valve closed
2/19/2012	4:04:27 PM	Bypass valve closed
2/19/2012	4:04:27 PM	Bubbler valve closed
2/19/2012	4:04:27 PM	Helium valve opened
2/19/2012	4:04:27 PM	Main Vac valve opened
2/19/2012	4:04:27 PM	Helium MFC set to  10.000000
2/19/2012	4:04:27 PM	H2 MFC set to  0.000000
2/19/2012	4:04:27 PM	BCl3 MFC set to  0.000000
2/19/2012	4:04:27 PM	PH3 MFC set to  0.000000
2/19/2012	4:04:27 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:04:27 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:04:27 PM	Tube furnace set to 180
2/19/2012	4:04:57 PM	Helium valve closed
2/19/2012	4:04:57 PM	H2 valve closed
2/19/2012	4:04:57 PM	BCl3 valve closed
2/19/2012	4:04:57 PM	PH3 valve closed
2/19/2012	4:04:57 PM	SiCl4 pre valve closed
2/19/2012	4:04:57 PM	SiCl4 post valve closed
2/19/2012	4:04:57 PM	Bypass valve closed
2/19/2012	4:04:57 PM	Bubbler valve closed
2/19/2012	4:04:57 PM	Main Vac valve opened
2/19/2012	4:04:57 PM	Helium MFC set to  0.000000
2/19/2012	4:04:57 PM	H2 MFC set to  0.000000
2/19/2012	4:04:57 PM	BCl3 MFC set to  0.000000
2/19/2012	4:04:57 PM	PH3 MFC set to  0.000000
2/19/2012	4:04:57 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:04:57 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:04:57 PM	Tube furnace set to 180
2/19/2012	4:05:27 PM	H2 valve closed
2/19/2012	4:05:27 PM	BCl3 valve closed
2/19/2012	4:05:27 PM	PH3 valve closed
2/19/2012	4:05:27 PM	SiCl4 pre valve closed
2/19/2012	4:05:27 PM	SiCl4 post valve closed
2/19/2012	4:05:27 PM	Bypass valve closed
2/19/2012	4:05:27 PM	Bubbler valve closed
2/19/2012	4:05:27 PM	Helium valve opened
2/19/2012	4:05:27 PM	Main Vac valve opened
2/19/2012	4:05:27 PM	Helium MFC set to  10.000000
2/19/2012	4:05:27 PM	H2 MFC set to  0.000000
2/19/2012	4:05:27 PM	BCl3 MFC set to  0.000000
2/19/2012	4:05:27 PM	PH3 MFC set to  0.000000
2/19/2012	4:05:27 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:05:27 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:05:27 PM	Tube furnace set to 180
2/19/2012	4:05:57 PM	Helium valve closed
2/19/2012	4:05:57 PM	H2 valve closed
2/19/2012	4:05:57 PM	BCl3 valve closed
2/19/2012	4:05:57 PM	PH3 valve closed
2/19/2012	4:05:57 PM	SiCl4 pre valve closed
2/19/2012	4:05:57 PM	SiCl4 post valve closed
2/19/2012	4:05:57 PM	Bypass valve closed
2/19/2012	4:05:57 PM	Bubbler valve closed
2/19/2012	4:05:57 PM	Main Vac valve opened
2/19/2012	4:05:57 PM	Helium MFC set to  0.000000
2/19/2012	4:05:57 PM	H2 MFC set to  0.000000
2/19/2012	4:05:57 PM	BCl3 MFC set to  0.000000
2/19/2012	4:05:57 PM	PH3 MFC set to  0.000000
2/19/2012	4:05:57 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:05:57 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:05:57 PM	Tube furnace set to 180
2/19/2012	4:06:27 PM	H2 valve closed
2/19/2012	4:06:27 PM	BCl3 valve closed
2/19/2012	4:06:28 PM	PH3 valve closed
2/19/2012	4:06:28 PM	SiCl4 pre valve closed
2/19/2012	4:06:28 PM	SiCl4 post valve closed
2/19/2012	4:06:28 PM	Bypass valve closed
2/19/2012	4:06:28 PM	Bubbler valve closed
2/19/2012	4:06:28 PM	Helium valve opened
2/19/2012	4:06:28 PM	Main Vac valve opened
2/19/2012	4:06:28 PM	Helium MFC set to  10.000000
2/19/2012	4:06:28 PM	H2 MFC set to  0.000000
2/19/2012	4:06:28 PM	BCl3 MFC set to  0.000000
2/19/2012	4:06:28 PM	PH3 MFC set to  0.000000
2/19/2012	4:06:28 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:06:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:06:28 PM	Tube furnace set to 180
2/19/2012	4:06:58 PM	Helium valve closed
2/19/2012	4:06:58 PM	H2 valve closed
2/19/2012	4:06:58 PM	BCl3 valve closed
2/19/2012	4:06:58 PM	PH3 valve closed
2/19/2012	4:06:58 PM	SiCl4 pre valve closed
2/19/2012	4:06:58 PM	SiCl4 post valve closed
2/19/2012	4:06:58 PM	Bypass valve closed
2/19/2012	4:06:58 PM	Bubbler valve closed
2/19/2012	4:06:58 PM	Main Vac valve opened
2/19/2012	4:06:58 PM	Helium MFC set to  0.000000
2/19/2012	4:06:58 PM	H2 MFC set to  0.000000
2/19/2012	4:06:58 PM	BCl3 MFC set to  0.000000
2/19/2012	4:06:58 PM	PH3 MFC set to  0.000000
2/19/2012	4:06:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:06:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:06:58 PM	Tube furnace set to 180
2/19/2012	4:07:28 PM	H2 valve closed
2/19/2012	4:07:28 PM	BCl3 valve closed
2/19/2012	4:07:28 PM	PH3 valve closed
2/19/2012	4:07:28 PM	SiCl4 pre valve closed
2/19/2012	4:07:28 PM	SiCl4 post valve closed
2/19/2012	4:07:28 PM	Bypass valve closed
2/19/2012	4:07:28 PM	Bubbler valve closed
2/19/2012	4:07:28 PM	Helium valve opened
2/19/2012	4:07:28 PM	Main Vac valve opened
2/19/2012	4:07:28 PM	Helium MFC set to  10.000000
2/19/2012	4:07:28 PM	H2 MFC set to  0.000000
2/19/2012	4:07:28 PM	BCl3 MFC set to  0.000000
2/19/2012	4:07:28 PM	PH3 MFC set to  0.000000
2/19/2012	4:07:28 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:07:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:07:28 PM	Tube furnace set to 180
2/19/2012	4:07:58 PM	Helium valve closed
2/19/2012	4:07:58 PM	H2 valve closed
2/19/2012	4:07:58 PM	BCl3 valve closed
2/19/2012	4:07:58 PM	PH3 valve closed
2/19/2012	4:07:58 PM	SiCl4 pre valve closed
2/19/2012	4:07:58 PM	SiCl4 post valve closed
2/19/2012	4:07:58 PM	Bypass valve closed
2/19/2012	4:07:58 PM	Bubbler valve closed
2/19/2012	4:07:58 PM	Main Vac valve opened
2/19/2012	4:07:58 PM	Helium MFC set to  0.000000
2/19/2012	4:07:58 PM	H2 MFC set to  0.000000
2/19/2012	4:07:58 PM	BCl3 MFC set to  0.000000
2/19/2012	4:07:58 PM	PH3 MFC set to  0.000000
2/19/2012	4:07:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:07:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:07:58 PM	Tube furnace set to 180
2/19/2012	4:08:28 PM	H2 valve closed
2/19/2012	4:08:28 PM	BCl3 valve closed
2/19/2012	4:08:28 PM	PH3 valve closed
2/19/2012	4:08:28 PM	SiCl4 pre valve closed
2/19/2012	4:08:28 PM	SiCl4 post valve closed
2/19/2012	4:08:28 PM	Bypass valve closed
2/19/2012	4:08:28 PM	Bubbler valve closed
2/19/2012	4:08:28 PM	Helium valve opened
2/19/2012	4:08:28 PM	Main Vac valve opened
2/19/2012	4:08:28 PM	Helium MFC set to  10.000000
2/19/2012	4:08:28 PM	H2 MFC set to  0.000000
2/19/2012	4:08:28 PM	BCl3 MFC set to  0.000000
2/19/2012	4:08:28 PM	PH3 MFC set to  0.000000
2/19/2012	4:08:28 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:08:28 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:08:29 PM	Tube furnace set to 180
2/19/2012	4:08:59 PM	Helium valve closed
2/19/2012	4:08:59 PM	H2 valve closed
2/19/2012	4:08:59 PM	BCl3 valve closed
2/19/2012	4:08:59 PM	PH3 valve closed
2/19/2012	4:08:59 PM	SiCl4 pre valve closed
2/19/2012	4:08:59 PM	SiCl4 post valve closed
2/19/2012	4:08:59 PM	Bypass valve closed
2/19/2012	4:08:59 PM	Bubbler valve closed
2/19/2012	4:08:59 PM	Main Vac valve opened
2/19/2012	4:08:59 PM	Helium MFC set to  0.000000
2/19/2012	4:08:59 PM	H2 MFC set to  0.000000
2/19/2012	4:08:59 PM	BCl3 MFC set to  0.000000
2/19/2012	4:08:59 PM	PH3 MFC set to  0.000000
2/19/2012	4:08:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:08:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:08:59 PM	Tube furnace set to 180
2/19/2012	4:09:29 PM	H2 valve closed
2/19/2012	4:09:29 PM	BCl3 valve closed
2/19/2012	4:09:29 PM	PH3 valve closed
2/19/2012	4:09:29 PM	SiCl4 pre valve closed
2/19/2012	4:09:29 PM	SiCl4 post valve closed
2/19/2012	4:09:29 PM	Bypass valve closed
2/19/2012	4:09:29 PM	Bubbler valve closed
2/19/2012	4:09:29 PM	Helium valve opened
2/19/2012	4:09:29 PM	Main Vac valve opened
2/19/2012	4:09:29 PM	Helium MFC set to  10.000000
2/19/2012	4:09:29 PM	H2 MFC set to  0.000000
2/19/2012	4:09:29 PM	BCl3 MFC set to  0.000000
2/19/2012	4:09:29 PM	PH3 MFC set to  0.000000
2/19/2012	4:09:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:09:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:09:29 PM	Tube furnace set to 180
2/19/2012	4:09:59 PM	Helium valve closed
2/19/2012	4:09:59 PM	H2 valve closed
2/19/2012	4:09:59 PM	BCl3 valve closed
2/19/2012	4:09:59 PM	PH3 valve closed
2/19/2012	4:09:59 PM	SiCl4 pre valve closed
2/19/2012	4:09:59 PM	SiCl4 post valve closed
2/19/2012	4:09:59 PM	Bypass valve closed
2/19/2012	4:09:59 PM	Bubbler valve closed
2/19/2012	4:09:59 PM	Main Vac valve opened
2/19/2012	4:09:59 PM	Helium MFC set to  0.000000
2/19/2012	4:09:59 PM	H2 MFC set to  0.000000
2/19/2012	4:09:59 PM	BCl3 MFC set to  0.000000
2/19/2012	4:09:59 PM	PH3 MFC set to  0.000000
2/19/2012	4:09:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:09:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:09:59 PM	Tube furnace set to 180
2/19/2012	4:10:29 PM	H2 valve closed
2/19/2012	4:10:29 PM	BCl3 valve closed
2/19/2012	4:10:29 PM	PH3 valve closed
2/19/2012	4:10:29 PM	SiCl4 pre valve closed
2/19/2012	4:10:29 PM	SiCl4 post valve closed
2/19/2012	4:10:29 PM	Bypass valve closed
2/19/2012	4:10:29 PM	Bubbler valve closed
2/19/2012	4:10:29 PM	Helium valve opened
2/19/2012	4:10:29 PM	Main Vac valve opened
2/19/2012	4:10:29 PM	Helium MFC set to  10.000000
2/19/2012	4:10:29 PM	H2 MFC set to  0.000000
2/19/2012	4:10:29 PM	BCl3 MFC set to  0.000000
2/19/2012	4:10:29 PM	PH3 MFC set to  0.000000
2/19/2012	4:10:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:10:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:10:29 PM	Tube furnace set to 180
2/19/2012	4:10:59 PM	Helium valve closed
2/19/2012	4:10:59 PM	H2 valve closed
2/19/2012	4:10:59 PM	BCl3 valve closed
2/19/2012	4:10:59 PM	PH3 valve closed
2/19/2012	4:10:59 PM	SiCl4 pre valve closed
2/19/2012	4:10:59 PM	SiCl4 post valve closed
2/19/2012	4:10:59 PM	Bypass valve closed
2/19/2012	4:10:59 PM	Bubbler valve closed
2/19/2012	4:10:59 PM	Main Vac valve opened
2/19/2012	4:10:59 PM	Helium MFC set to  0.000000
2/19/2012	4:10:59 PM	H2 MFC set to  0.000000
2/19/2012	4:10:59 PM	BCl3 MFC set to  0.000000
2/19/2012	4:10:59 PM	PH3 MFC set to  0.000000
2/19/2012	4:10:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:10:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:11:00 PM	Tube furnace set to 180
2/19/2012	4:11:30 PM	H2 valve closed
2/19/2012	4:11:30 PM	BCl3 valve closed
2/19/2012	4:11:30 PM	PH3 valve closed
2/19/2012	4:11:30 PM	SiCl4 pre valve closed
2/19/2012	4:11:30 PM	SiCl4 post valve closed
2/19/2012	4:11:30 PM	Bypass valve closed
2/19/2012	4:11:30 PM	Bubbler valve closed
2/19/2012	4:11:30 PM	Helium valve opened
2/19/2012	4:11:30 PM	Main Vac valve opened
2/19/2012	4:11:30 PM	Helium MFC set to  10.000000
2/19/2012	4:11:30 PM	H2 MFC set to  0.000000
2/19/2012	4:11:30 PM	BCl3 MFC set to  0.000000
2/19/2012	4:11:30 PM	PH3 MFC set to  0.000000
2/19/2012	4:11:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:11:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:11:30 PM	Tube furnace set to 180
2/19/2012	4:12:00 PM	Helium valve closed
2/19/2012	4:12:00 PM	H2 valve closed
2/19/2012	4:12:00 PM	BCl3 valve closed
2/19/2012	4:12:00 PM	PH3 valve closed
2/19/2012	4:12:00 PM	SiCl4 pre valve closed
2/19/2012	4:12:00 PM	SiCl4 post valve closed
2/19/2012	4:12:00 PM	Bypass valve closed
2/19/2012	4:12:00 PM	Bubbler valve closed
2/19/2012	4:12:00 PM	Main Vac valve opened
2/19/2012	4:12:00 PM	Helium MFC set to  0.000000
2/19/2012	4:12:00 PM	H2 MFC set to  0.000000
2/19/2012	4:12:00 PM	BCl3 MFC set to  0.000000
2/19/2012	4:12:00 PM	PH3 MFC set to  0.000000
2/19/2012	4:12:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:12:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:12:00 PM	Tube furnace set to 180
2/19/2012	4:12:30 PM	H2 valve closed
2/19/2012	4:12:30 PM	BCl3 valve closed
2/19/2012	4:12:30 PM	PH3 valve closed
2/19/2012	4:12:30 PM	SiCl4 pre valve closed
2/19/2012	4:12:30 PM	SiCl4 post valve closed
2/19/2012	4:12:30 PM	Bypass valve closed
2/19/2012	4:12:30 PM	Bubbler valve closed
2/19/2012	4:12:30 PM	Helium valve opened
2/19/2012	4:12:30 PM	Main Vac valve opened
2/19/2012	4:12:30 PM	Helium MFC set to  10.000000
2/19/2012	4:12:30 PM	H2 MFC set to  0.000000
2/19/2012	4:12:30 PM	BCl3 MFC set to  0.000000
2/19/2012	4:12:30 PM	PH3 MFC set to  0.000000
2/19/2012	4:12:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:12:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:12:30 PM	Tube furnace set to 180
2/19/2012	4:13:00 PM	Helium valve closed
2/19/2012	4:13:00 PM	H2 valve closed
2/19/2012	4:13:00 PM	BCl3 valve closed
2/19/2012	4:13:00 PM	PH3 valve closed
2/19/2012	4:13:00 PM	SiCl4 pre valve closed
2/19/2012	4:13:00 PM	SiCl4 post valve closed
2/19/2012	4:13:00 PM	Bypass valve closed
2/19/2012	4:13:00 PM	Bubbler valve closed
2/19/2012	4:13:00 PM	Main Vac valve opened
2/19/2012	4:13:00 PM	Helium MFC set to  0.000000
2/19/2012	4:13:00 PM	H2 MFC set to  0.000000
2/19/2012	4:13:00 PM	BCl3 MFC set to  0.000000
2/19/2012	4:13:00 PM	PH3 MFC set to  0.000000
2/19/2012	4:13:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:13:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:13:00 PM	Tube furnace set to 180
2/19/2012	4:13:30 PM	H2 valve closed
2/19/2012	4:13:30 PM	BCl3 valve closed
2/19/2012	4:13:30 PM	PH3 valve closed
2/19/2012	4:13:30 PM	SiCl4 pre valve closed
2/19/2012	4:13:30 PM	SiCl4 post valve closed
2/19/2012	4:13:30 PM	Bypass valve closed
2/19/2012	4:13:30 PM	Bubbler valve closed
2/19/2012	4:13:30 PM	Helium valve opened
2/19/2012	4:13:30 PM	Main Vac valve opened
2/19/2012	4:13:30 PM	Helium MFC set to  10.000000
2/19/2012	4:13:30 PM	H2 MFC set to  0.000000
2/19/2012	4:13:30 PM	BCl3 MFC set to  0.000000
2/19/2012	4:13:30 PM	PH3 MFC set to  0.000000
2/19/2012	4:13:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:13:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:13:31 PM	Tube furnace set to 180
2/19/2012	4:14:01 PM	Helium valve closed
2/19/2012	4:14:01 PM	H2 valve closed
2/19/2012	4:14:01 PM	BCl3 valve closed
2/19/2012	4:14:01 PM	PH3 valve closed
2/19/2012	4:14:01 PM	SiCl4 pre valve closed
2/19/2012	4:14:01 PM	SiCl4 post valve closed
2/19/2012	4:14:01 PM	Bypass valve closed
2/19/2012	4:14:01 PM	Bubbler valve closed
2/19/2012	4:14:01 PM	Main Vac valve opened
2/19/2012	4:14:01 PM	Helium MFC set to  0.000000
2/19/2012	4:14:01 PM	H2 MFC set to  0.000000
2/19/2012	4:14:01 PM	BCl3 MFC set to  0.000000
2/19/2012	4:14:01 PM	PH3 MFC set to  0.000000
2/19/2012	4:14:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:14:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:14:01 PM	Tube furnace set to 180
2/19/2012	4:16:01 PM	Helium valve closed
2/19/2012	4:16:01 PM	BCl3 valve closed
2/19/2012	4:16:01 PM	PH3 valve closed
2/19/2012	4:16:01 PM	SiCl4 pre valve closed
2/19/2012	4:16:01 PM	SiCl4 post valve closed
2/19/2012	4:16:01 PM	Main Vac valve closed
2/19/2012	4:16:01 PM	Bypass valve closed
2/19/2012	4:16:01 PM	Bubbler valve closed
2/19/2012	4:16:01 PM	H2 valve opened
2/19/2012	4:16:01 PM	Helium MFC set to  0.000000
2/19/2012	4:16:01 PM	H2 MFC set to  500.000000
2/19/2012	4:16:01 PM	BCl3 MFC set to  0.000000
2/19/2012	4:16:01 PM	PH3 MFC set to  0.000000
2/19/2012	4:16:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:16:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:16:01 PM	Tube furnace set to 1000
2/19/2012	4:17:05 PM	Helium valve closed
2/19/2012	4:17:05 PM	BCl3 valve closed
2/19/2012	4:17:05 PM	PH3 valve closed
2/19/2012	4:17:05 PM	SiCl4 pre valve closed
2/19/2012	4:17:05 PM	SiCl4 post valve closed
2/19/2012	4:17:05 PM	Main Vac valve closed
2/19/2012	4:17:05 PM	Bypass valve closed
2/19/2012	4:17:05 PM	H2 valve opened
2/19/2012	4:17:05 PM	Bubbler valve opened
2/19/2012	4:17:05 PM	Helium MFC set to  0.000000
2/19/2012	4:17:05 PM	H2 MFC set to  500.000000
2/19/2012	4:17:05 PM	BCl3 MFC set to  0.000000
2/19/2012	4:17:05 PM	PH3 MFC set to  0.000000
2/19/2012	4:17:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:17:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:17:05 PM	Tube furnace set to 1000
2/19/2012	4:17:06 PM	Helium valve closed
2/19/2012	4:17:06 PM	BCl3 valve closed
2/19/2012	4:17:06 PM	PH3 valve closed
2/19/2012	4:17:06 PM	SiCl4 pre valve closed
2/19/2012	4:17:06 PM	SiCl4 post valve closed
2/19/2012	4:17:06 PM	Main Vac valve closed
2/19/2012	4:17:06 PM	Bypass valve closed
2/19/2012	4:17:06 PM	H2 valve opened
2/19/2012	4:17:06 PM	Bubbler valve opened
2/19/2012	4:17:06 PM	Helium MFC set to  0.000000
2/19/2012	4:17:06 PM	H2 MFC set to  500.000000
2/19/2012	4:17:06 PM	BCl3 MFC set to  0.000000
2/19/2012	4:17:06 PM	PH3 MFC set to  0.000000
2/19/2012	4:17:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:17:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:17:06 PM	Tube furnace set to 1000
2/19/2012	4:37:06 PM	Helium valve closed
2/19/2012	4:37:06 PM	PH3 valve closed
2/19/2012	4:37:06 PM	Main Vac valve closed
2/19/2012	4:37:06 PM	Bypass valve closed
2/19/2012	4:37:06 PM	H2 valve opened
2/19/2012	4:37:06 PM	BCl3 valve opened
2/19/2012	4:37:06 PM	SiCl4 pre valve opened
2/19/2012	4:37:06 PM	SiCl4 post valve opened
2/19/2012	4:37:06 PM	Bubbler valve opened
2/19/2012	4:37:06 PM	Helium MFC set to  0.000000
2/19/2012	4:37:06 PM	H2 MFC set to  500.000000
2/19/2012	4:37:06 PM	BCl3 MFC set to  20.000000
2/19/2012	4:37:06 PM	PH3 MFC set to  0.000000
2/19/2012	4:37:06 PM	SiCl4 MFC set to  50.000000
2/19/2012	4:37:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:37:06 PM	Tube furnace set to 1000
2/19/2012	4:47:06 PM	Helium valve closed
2/19/2012	4:47:06 PM	BCl3 valve closed
2/19/2012	4:47:06 PM	PH3 valve closed
2/19/2012	4:47:06 PM	SiCl4 pre valve closed
2/19/2012	4:47:06 PM	SiCl4 post valve closed
2/19/2012	4:47:06 PM	Main Vac valve closed
2/19/2012	4:47:06 PM	Bypass valve closed
2/19/2012	4:47:06 PM	H2 valve opened
2/19/2012	4:47:06 PM	Bubbler valve opened
2/19/2012	4:47:06 PM	Helium MFC set to  0.000000
2/19/2012	4:47:06 PM	H2 MFC set to  500.000000
2/19/2012	4:47:06 PM	BCl3 MFC set to  0.000000
2/19/2012	4:47:06 PM	PH3 MFC set to  0.000000
2/19/2012	4:47:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:47:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:47:07 PM	Tube furnace set to 975
2/19/2012	4:48:37 PM	Helium valve closed
2/19/2012	4:48:37 PM	BCl3 valve closed
2/19/2012	4:48:37 PM	PH3 valve closed
2/19/2012	4:48:37 PM	SiCl4 pre valve closed
2/19/2012	4:48:37 PM	SiCl4 post valve closed
2/19/2012	4:48:37 PM	Main Vac valve closed
2/19/2012	4:48:37 PM	Bypass valve closed
2/19/2012	4:48:37 PM	H2 valve opened
2/19/2012	4:48:37 PM	Bubbler valve opened
2/19/2012	4:48:37 PM	Helium MFC set to  0.000000
2/19/2012	4:48:37 PM	H2 MFC set to  500.000000
2/19/2012	4:48:37 PM	BCl3 MFC set to  0.000000
2/19/2012	4:48:37 PM	PH3 MFC set to  0.000000
2/19/2012	4:48:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:48:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:48:37 PM	Tube furnace set to 950
2/19/2012	4:50:07 PM	Helium valve closed
2/19/2012	4:50:07 PM	BCl3 valve closed
2/19/2012	4:50:07 PM	PH3 valve closed
2/19/2012	4:50:07 PM	SiCl4 pre valve closed
2/19/2012	4:50:07 PM	SiCl4 post valve closed
2/19/2012	4:50:07 PM	Main Vac valve closed
2/19/2012	4:50:07 PM	Bypass valve closed
2/19/2012	4:50:07 PM	H2 valve opened
2/19/2012	4:50:07 PM	Bubbler valve opened
2/19/2012	4:50:07 PM	Helium MFC set to  0.000000
2/19/2012	4:50:07 PM	H2 MFC set to  500.000000
2/19/2012	4:50:07 PM	BCl3 MFC set to  0.000000
2/19/2012	4:50:07 PM	PH3 MFC set to  0.000000
2/19/2012	4:50:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:50:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:50:07 PM	Tube furnace set to 925
2/19/2012	4:51:37 PM	Helium valve closed
2/19/2012	4:51:37 PM	BCl3 valve closed
2/19/2012	4:51:37 PM	PH3 valve closed
2/19/2012	4:51:37 PM	SiCl4 pre valve closed
2/19/2012	4:51:37 PM	SiCl4 post valve closed
2/19/2012	4:51:37 PM	Main Vac valve closed
2/19/2012	4:51:37 PM	Bypass valve closed
2/19/2012	4:51:37 PM	H2 valve opened
2/19/2012	4:51:37 PM	Bubbler valve opened
2/19/2012	4:51:37 PM	Helium MFC set to  0.000000
2/19/2012	4:51:37 PM	H2 MFC set to  500.000000
2/19/2012	4:51:37 PM	BCl3 MFC set to  0.000000
2/19/2012	4:51:37 PM	PH3 MFC set to  0.000000
2/19/2012	4:51:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:51:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:51:37 PM	Tube furnace set to 900
2/19/2012	4:53:07 PM	H2 valve closed
2/19/2012	4:53:07 PM	BCl3 valve closed
2/19/2012	4:53:07 PM	PH3 valve closed
2/19/2012	4:53:07 PM	SiCl4 pre valve closed
2/19/2012	4:53:07 PM	SiCl4 post valve closed
2/19/2012	4:53:07 PM	Main Vac valve closed
2/19/2012	4:53:07 PM	Bypass valve closed
2/19/2012	4:53:07 PM	Helium valve opened
2/19/2012	4:53:07 PM	Bubbler valve opened
2/19/2012	4:53:07 PM	Helium MFC set to  500.000000
2/19/2012	4:53:07 PM	H2 MFC set to  0.000000
2/19/2012	4:53:07 PM	BCl3 MFC set to  0.000000
2/19/2012	4:53:07 PM	PH3 MFC set to  0.000000
2/19/2012	4:53:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:53:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:53:07 PM	Tube furnace set to 875
2/19/2012	4:54:37 PM	H2 valve closed
2/19/2012	4:54:37 PM	BCl3 valve closed
2/19/2012	4:54:37 PM	PH3 valve closed
2/19/2012	4:54:37 PM	SiCl4 pre valve closed
2/19/2012	4:54:37 PM	SiCl4 post valve closed
2/19/2012	4:54:37 PM	Main Vac valve closed
2/19/2012	4:54:37 PM	Bypass valve closed
2/19/2012	4:54:37 PM	Helium valve opened
2/19/2012	4:54:37 PM	Bubbler valve opened
2/19/2012	4:54:37 PM	Helium MFC set to  500.000000
2/19/2012	4:54:37 PM	H2 MFC set to  0.000000
2/19/2012	4:54:37 PM	BCl3 MFC set to  0.000000
2/19/2012	4:54:37 PM	PH3 MFC set to  0.000000
2/19/2012	4:54:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:54:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:54:38 PM	Tube furnace set to 850
2/19/2012	4:56:08 PM	H2 valve closed
2/19/2012	4:56:08 PM	BCl3 valve closed
2/19/2012	4:56:08 PM	PH3 valve closed
2/19/2012	4:56:08 PM	SiCl4 pre valve closed
2/19/2012	4:56:08 PM	SiCl4 post valve closed
2/19/2012	4:56:08 PM	Main Vac valve closed
2/19/2012	4:56:08 PM	Bypass valve closed
2/19/2012	4:56:08 PM	Helium valve opened
2/19/2012	4:56:08 PM	Bubbler valve opened
2/19/2012	4:56:08 PM	Helium MFC set to  500.000000
2/19/2012	4:56:08 PM	H2 MFC set to  0.000000
2/19/2012	4:56:08 PM	BCl3 MFC set to  0.000000
2/19/2012	4:56:08 PM	PH3 MFC set to  0.000000
2/19/2012	4:56:08 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:56:08 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:56:08 PM	Tube furnace set to 825
2/19/2012	4:57:38 PM	H2 valve closed
2/19/2012	4:57:38 PM	BCl3 valve closed
2/19/2012	4:57:38 PM	PH3 valve closed
2/19/2012	4:57:38 PM	SiCl4 pre valve closed
2/19/2012	4:57:38 PM	SiCl4 post valve closed
2/19/2012	4:57:38 PM	Main Vac valve closed
2/19/2012	4:57:38 PM	Bypass valve closed
2/19/2012	4:57:38 PM	Helium valve opened
2/19/2012	4:57:38 PM	Bubbler valve opened
2/19/2012	4:57:38 PM	Helium MFC set to  500.000000
2/19/2012	4:57:38 PM	H2 MFC set to  0.000000
2/19/2012	4:57:38 PM	BCl3 MFC set to  0.000000
2/19/2012	4:57:38 PM	PH3 MFC set to  0.000000
2/19/2012	4:57:38 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:57:38 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:57:38 PM	Tube furnace set to 800
2/19/2012	4:59:08 PM	H2 valve closed
2/19/2012	4:59:08 PM	BCl3 valve closed
2/19/2012	4:59:08 PM	PH3 valve closed
2/19/2012	4:59:08 PM	SiCl4 pre valve closed
2/19/2012	4:59:08 PM	SiCl4 post valve closed
2/19/2012	4:59:08 PM	Main Vac valve closed
2/19/2012	4:59:08 PM	Bypass valve closed
2/19/2012	4:59:08 PM	Helium valve opened
2/19/2012	4:59:08 PM	Bubbler valve opened
2/19/2012	4:59:08 PM	Helium MFC set to  500.000000
2/19/2012	4:59:08 PM	H2 MFC set to  0.000000
2/19/2012	4:59:08 PM	BCl3 MFC set to  0.000000
2/19/2012	4:59:08 PM	PH3 MFC set to  0.000000
2/19/2012	4:59:08 PM	SiCl4 MFC set to  0.000000
2/19/2012	4:59:08 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	4:59:08 PM	Tube furnace set to 0
2/19/2012	5:14:08 PM	Helium valve closed
2/19/2012	5:14:08 PM	H2 valve closed
2/19/2012	5:14:08 PM	BCl3 valve closed
2/19/2012	5:14:08 PM	PH3 valve closed
2/19/2012	5:14:08 PM	SiCl4 pre valve closed
2/19/2012	5:14:08 PM	SiCl4 post valve closed
2/19/2012	5:14:08 PM	Main Vac valve closed
2/19/2012	5:14:08 PM	Bypass valve closed
2/19/2012	5:14:08 PM	Bubbler valve closed
2/19/2012	5:14:08 PM	Helium MFC set to  0.000000
2/19/2012	5:14:08 PM	H2 MFC set to  0.000000
2/19/2012	5:14:08 PM	BCl3 MFC set to  0.000000
2/19/2012	5:14:08 PM	PH3 MFC set to  0.000000
2/19/2012	5:14:08 PM	SiCl4 MFC set to  0.000000
2/19/2012	5:14:08 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	5:14:08 PM	Tube furnace set to 0
2/19/2012	6:14:08 PM	H2 valve closed
2/19/2012	6:14:08 PM	BCl3 valve closed
2/19/2012	6:14:08 PM	PH3 valve closed
2/19/2012	6:14:08 PM	SiCl4 pre valve closed
2/19/2012	6:14:08 PM	SiCl4 post valve closed
2/19/2012	6:14:08 PM	Main Vac valve closed
2/19/2012	6:14:08 PM	Bypass valve closed
2/19/2012	6:14:08 PM	Bubbler valve closed
2/19/2012	6:14:08 PM	Helium valve opened
2/19/2012	6:14:08 PM	Helium MFC set to  500.000000
2/19/2012	6:14:08 PM	H2 MFC set to  0.000000
2/19/2012	6:14:08 PM	BCl3 MFC set to  0.000000
2/19/2012	6:14:08 PM	PH3 MFC set to  0.000000
2/19/2012	6:14:08 PM	SiCl4 MFC set to  0.000000
2/19/2012	6:14:08 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:14:09 PM	Tube furnace set to 0
2/19/2012	6:14:13 PM	H2 valve closed
2/19/2012	6:14:13 PM	BCl3 valve closed
2/19/2012	6:14:13 PM	PH3 valve closed
2/19/2012	6:14:13 PM	SiCl4 pre valve closed
2/19/2012	6:14:13 PM	SiCl4 post valve closed
2/19/2012	6:14:13 PM	Main Vac valve closed
2/19/2012	6:14:13 PM	Bypass valve closed
2/19/2012	6:14:13 PM	Helium valve opened
2/19/2012	6:14:13 PM	Bubbler valve opened
2/19/2012	6:14:13 PM	Helium MFC set to  500.000000
2/19/2012	6:14:13 PM	H2 MFC set to  0.000000
2/19/2012	6:14:13 PM	BCl3 MFC set to  0.000000
2/19/2012	6:14:13 PM	PH3 MFC set to  0.000000
2/19/2012	6:14:13 PM	SiCl4 MFC set to  0.000000
2/19/2012	6:14:13 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:14:14 PM	Tube furnace set to 0
2/19/2012	6:19:14 PM	Helium valve closed
2/19/2012	6:19:14 PM	H2 valve closed
2/19/2012	6:19:14 PM	BCl3 valve closed
2/19/2012	6:19:14 PM	PH3 valve closed
2/19/2012	6:19:14 PM	SiCl4 pre valve closed
2/19/2012	6:19:14 PM	SiCl4 post valve closed
2/19/2012	6:19:14 PM	Main Vac valve closed
2/19/2012	6:19:14 PM	Bypass valve closed
2/19/2012	6:19:14 PM	Bubbler valve closed
2/19/2012	6:19:14 PM	Helium MFC set to  0.000000
2/19/2012	6:19:14 PM	H2 MFC set to  0.000000
2/19/2012	6:19:14 PM	BCl3 MFC set to  0.000000
2/19/2012	6:19:14 PM	PH3 MFC set to  0.000000
2/19/2012	6:19:14 PM	SiCl4 MFC set to  0.000000
2/19/2012	6:19:14 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:19:14 PM	Tube furnace set to 0
2/19/2012	6:19:15 PM	Helium valve closed
2/19/2012	6:19:15 PM	H2 valve closed
2/19/2012	6:19:15 PM	BCl3 valve closed
2/19/2012	6:19:15 PM	PH3 valve closed
2/19/2012	6:19:15 PM	SiCl4 pre valve closed
2/19/2012	6:19:15 PM	SiCl4 post valve closed
2/19/2012	6:19:15 PM	Main Vac valve closed
2/19/2012	6:19:15 PM	Bubbler valve closed
2/19/2012	6:19:15 PM	Bypass valve opened
2/19/2012	6:19:15 PM	Helium MFC set to  0.000000
2/19/2012	6:19:15 PM	H2 MFC set to  0.000000
2/19/2012	6:19:15 PM	BCl3 MFC set to  0.000000
2/19/2012	6:19:15 PM	PH3 MFC set to  0.000000
2/19/2012	6:19:15 PM	SiCl4 MFC set to  0.000000
2/19/2012	6:19:15 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:19:15 PM	Tube furnace set to 0
2/19/2012	6:20:07 PM	Helium valve closed
2/19/2012	6:20:07 PM	H2 valve closed
2/19/2012	6:20:07 PM	BCl3 valve closed
2/19/2012	6:20:07 PM	PH3 valve closed
2/19/2012	6:20:07 PM	SiCl4 pre valve closed
2/19/2012	6:20:07 PM	SiCl4 post valve closed
2/19/2012	6:20:07 PM	Main Vac valve closed
2/19/2012	6:20:07 PM	Bubbler valve closed
2/19/2012	6:20:07 PM	Bypass valve opened
2/19/2012	6:20:07 PM	Helium MFC set to  0.000000
2/19/2012	6:20:07 PM	H2 MFC set to  0.000000
2/19/2012	6:20:07 PM	BCl3 MFC set to  0.000000
2/19/2012	6:20:07 PM	PH3 MFC set to  0.000000
2/19/2012	6:20:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	6:20:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:20:07 PM	Tube furnace set to 0
2/19/2012	6:21:07 PM	Helium valve closed
2/19/2012	6:21:07 PM	H2 valve closed
2/19/2012	6:21:07 PM	BCl3 valve closed
2/19/2012	6:21:07 PM	PH3 valve closed
2/19/2012	6:21:07 PM	SiCl4 pre valve closed
2/19/2012	6:21:07 PM	SiCl4 post valve closed
2/19/2012	6:21:07 PM	Bypass valve closed
2/19/2012	6:21:07 PM	Bubbler valve closed
2/19/2012	6:21:07 PM	Main Vac valve opened
2/19/2012	6:21:07 PM	Helium MFC set to  0.000000
2/19/2012	6:21:07 PM	H2 MFC set to  0.000000
2/19/2012	6:21:07 PM	BCl3 MFC set to  0.000000
2/19/2012	6:21:07 PM	PH3 MFC set to  0.000000
2/19/2012	6:21:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	6:21:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	6:21:07 PM	Tube furnace set to 0
2/19/2012	8:25:09 PM	Run aborted at 8:25 PM
2/19/2012	8:25:09 PM	Helium valve closed
2/19/2012	8:25:09 PM	H2 valve closed
2/19/2012	8:25:09 PM	BCl3 valve closed
2/19/2012	8:25:09 PM	PH3 valve closed
2/19/2012	8:25:09 PM	SiCl4 pre valve closed
2/19/2012	8:25:09 PM	SiCl4 post valve closed
2/19/2012	8:25:09 PM	Bypass valve closed
2/19/2012	8:25:09 PM	Main Vac valve closed
2/19/2012	8:25:09 PM	Bubbler valve closed
2/19/2012	8:25:09 PM	Helium MFC set to  0.000000
2/19/2012	8:25:09 PM	H2 MFC set to  0.000000
2/19/2012	8:25:09 PM	BCl3 MFC set to  0.000000
2/19/2012	8:25:09 PM	PH3 MFC set to  0.000000
2/19/2012	8:25:09 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:25:09 PM	Tube furnace set to 0
2/19/2012	8:25:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2012	8:25:14 PM	Recipe started at 8:25 PM
2/19/2012	8:25:14 PM	Helium valve closed
2/19/2012	8:25:14 PM	H2 valve closed
2/19/2012	8:25:14 PM	BCl3 valve closed
2/19/2012	8:25:14 PM	PH3 valve closed
2/19/2012	8:25:14 PM	SiCl4 pre valve closed
2/19/2012	8:25:14 PM	SiCl4 post valve closed
2/19/2012	8:25:14 PM	Main Vac valve closed
2/19/2012	8:25:14 PM	Bypass valve closed
2/19/2012	8:25:14 PM	Bubbler valve closed
2/19/2012	8:25:14 PM	Helium MFC set to  0.000000
2/19/2012	8:25:14 PM	H2 MFC set to  0.000000
2/19/2012	8:25:14 PM	BCl3 MFC set to  0.000000
2/19/2012	8:25:14 PM	PH3 MFC set to  0.000000
2/19/2012	8:25:14 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:25:14 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:25:14 PM	Tube furnace set to 0
2/19/2012	8:25:17 PM	H2 valve closed
2/19/2012	8:25:17 PM	BCl3 valve closed
2/19/2012	8:25:17 PM	PH3 valve closed
2/19/2012	8:25:17 PM	SiCl4 pre valve closed
2/19/2012	8:25:17 PM	SiCl4 post valve closed
2/19/2012	8:25:17 PM	Main Vac valve closed
2/19/2012	8:25:17 PM	Bypass valve closed
2/19/2012	8:25:17 PM	Bubbler valve closed
2/19/2012	8:25:17 PM	Helium valve opened
2/19/2012	8:25:17 PM	Helium MFC set to  500.000000
2/19/2012	8:25:17 PM	H2 MFC set to  0.000000
2/19/2012	8:25:17 PM	BCl3 MFC set to  0.000000
2/19/2012	8:25:17 PM	PH3 MFC set to  0.000000
2/19/2012	8:25:17 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:25:17 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:25:17 PM	Tube furnace set to 0
2/19/2012	8:26:23 PM	Helium valve closed
2/19/2012	8:26:23 PM	H2 valve closed
2/19/2012	8:26:23 PM	BCl3 valve closed
2/19/2012	8:26:23 PM	PH3 valve closed
2/19/2012	8:26:23 PM	SiCl4 pre valve closed
2/19/2012	8:26:23 PM	SiCl4 post valve closed
2/19/2012	8:26:23 PM	Main Vac valve closed
2/19/2012	8:26:23 PM	Bypass valve closed
2/19/2012	8:26:23 PM	Bubbler valve closed
2/19/2012	8:26:23 PM	Helium MFC set to  0.000000
2/19/2012	8:26:23 PM	H2 MFC set to  0.000000
2/19/2012	8:26:23 PM	BCl3 MFC set to  0.000000
2/19/2012	8:26:23 PM	PH3 MFC set to  0.000000
2/19/2012	8:26:23 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:26:23 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:26:23 PM	Tube furnace set to 0
2/19/2012	8:26:24 PM	Run finished at 8:26 PM
2/19/2012	8:26:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
2/19/2012	8:29:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	8:29:58 PM	Recipe started at 8:29 PM
2/19/2012	8:29:58 PM	Helium valve closed
2/19/2012	8:29:58 PM	H2 valve closed
2/19/2012	8:29:58 PM	BCl3 valve closed
2/19/2012	8:29:58 PM	PH3 valve closed
2/19/2012	8:29:58 PM	SiCl4 pre valve closed
2/19/2012	8:29:58 PM	SiCl4 post valve closed
2/19/2012	8:29:58 PM	Main Vac valve closed
2/19/2012	8:29:58 PM	Bubbler valve closed
2/19/2012	8:29:58 PM	Bypass valve opened
2/19/2012	8:29:58 PM	Helium MFC set to  0.000000
2/19/2012	8:29:58 PM	H2 MFC set to  0.000000
2/19/2012	8:29:58 PM	BCl3 MFC set to  0.000000
2/19/2012	8:29:58 PM	PH3 MFC set to  0.000000
2/19/2012	8:29:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:29:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:29:58 PM	Tube furnace set to 0
2/19/2012	8:31:02 PM	Helium valve closed
2/19/2012	8:31:02 PM	H2 valve closed
2/19/2012	8:31:02 PM	BCl3 valve closed
2/19/2012	8:31:02 PM	PH3 valve closed
2/19/2012	8:31:02 PM	SiCl4 pre valve closed
2/19/2012	8:31:02 PM	SiCl4 post valve closed
2/19/2012	8:31:02 PM	Main Vac valve closed
2/19/2012	8:31:02 PM	Bubbler valve closed
2/19/2012	8:31:02 PM	Bypass valve opened
2/19/2012	8:31:02 PM	Helium MFC set to  0.000000
2/19/2012	8:31:02 PM	H2 MFC set to  0.000000
2/19/2012	8:31:02 PM	BCl3 MFC set to  0.000000
2/19/2012	8:31:02 PM	PH3 MFC set to  0.000000
2/19/2012	8:31:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:31:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:31:02 PM	Tube furnace set to 0
2/19/2012	8:32:02 PM	Helium valve closed
2/19/2012	8:32:02 PM	H2 valve closed
2/19/2012	8:32:02 PM	BCl3 valve closed
2/19/2012	8:32:02 PM	PH3 valve closed
2/19/2012	8:32:02 PM	SiCl4 pre valve closed
2/19/2012	8:32:02 PM	SiCl4 post valve closed
2/19/2012	8:32:02 PM	Bypass valve closed
2/19/2012	8:32:02 PM	Bubbler valve closed
2/19/2012	8:32:02 PM	Main Vac valve opened
2/19/2012	8:32:02 PM	Helium MFC set to  0.000000
2/19/2012	8:32:02 PM	H2 MFC set to  0.000000
2/19/2012	8:32:02 PM	BCl3 MFC set to  0.000000
2/19/2012	8:32:02 PM	PH3 MFC set to  0.000000
2/19/2012	8:32:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:32:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:32:02 PM	Tube furnace set to 0
2/19/2012	8:32:03 PM	Run finished at 8:32 PM
2/19/2012	8:32:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	8:32:33 PM	Recipe started at 8:32 PM
2/19/2012	8:32:33 PM	Helium valve closed
2/19/2012	8:32:33 PM	H2 valve closed
2/19/2012	8:32:33 PM	BCl3 valve closed
2/19/2012	8:32:33 PM	PH3 valve closed
2/19/2012	8:32:33 PM	SiCl4 pre valve closed
2/19/2012	8:32:33 PM	SiCl4 post valve closed
2/19/2012	8:32:33 PM	Bypass valve closed
2/19/2012	8:32:33 PM	Bubbler valve closed
2/19/2012	8:32:33 PM	Main Vac valve opened
2/19/2012	8:32:33 PM	Helium MFC set to  0.000000
2/19/2012	8:32:33 PM	H2 MFC set to  0.000000
2/19/2012	8:32:33 PM	BCl3 MFC set to  0.000000
2/19/2012	8:32:33 PM	PH3 MFC set to  0.000000
2/19/2012	8:32:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:32:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:32:33 PM	Tube furnace set to 150
2/19/2012	8:33:03 PM	H2 valve closed
2/19/2012	8:33:03 PM	BCl3 valve closed
2/19/2012	8:33:03 PM	PH3 valve closed
2/19/2012	8:33:03 PM	SiCl4 pre valve closed
2/19/2012	8:33:03 PM	SiCl4 post valve closed
2/19/2012	8:33:03 PM	Bypass valve closed
2/19/2012	8:33:03 PM	Bubbler valve closed
2/19/2012	8:33:03 PM	Helium valve opened
2/19/2012	8:33:03 PM	Main Vac valve opened
2/19/2012	8:33:03 PM	Helium MFC set to  20.000000
2/19/2012	8:33:03 PM	H2 MFC set to  0.000000
2/19/2012	8:33:03 PM	BCl3 MFC set to  0.000000
2/19/2012	8:33:03 PM	PH3 MFC set to  0.000000
2/19/2012	8:33:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:33:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:33:03 PM	Tube furnace set to 150
2/19/2012	8:33:33 PM	Helium valve closed
2/19/2012	8:33:33 PM	H2 valve closed
2/19/2012	8:33:33 PM	BCl3 valve closed
2/19/2012	8:33:33 PM	PH3 valve closed
2/19/2012	8:33:33 PM	SiCl4 pre valve closed
2/19/2012	8:33:33 PM	SiCl4 post valve closed
2/19/2012	8:33:33 PM	Bypass valve closed
2/19/2012	8:33:33 PM	Bubbler valve closed
2/19/2012	8:33:33 PM	Main Vac valve opened
2/19/2012	8:33:33 PM	Helium MFC set to  0.000000
2/19/2012	8:33:33 PM	H2 MFC set to  0.000000
2/19/2012	8:33:33 PM	BCl3 MFC set to  0.000000
2/19/2012	8:33:33 PM	PH3 MFC set to  0.000000
2/19/2012	8:33:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:33:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:33:33 PM	Tube furnace set to 150
2/19/2012	8:34:03 PM	H2 valve closed
2/19/2012	8:34:03 PM	BCl3 valve closed
2/19/2012	8:34:03 PM	PH3 valve closed
2/19/2012	8:34:03 PM	SiCl4 pre valve closed
2/19/2012	8:34:03 PM	SiCl4 post valve closed
2/19/2012	8:34:03 PM	Bypass valve closed
2/19/2012	8:34:03 PM	Bubbler valve closed
2/19/2012	8:34:03 PM	Helium valve opened
2/19/2012	8:34:03 PM	Main Vac valve opened
2/19/2012	8:34:03 PM	Helium MFC set to  20.000000
2/19/2012	8:34:03 PM	H2 MFC set to  0.000000
2/19/2012	8:34:03 PM	BCl3 MFC set to  0.000000
2/19/2012	8:34:03 PM	PH3 MFC set to  0.000000
2/19/2012	8:34:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:34:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:34:04 PM	Tube furnace set to 150
2/19/2012	8:34:34 PM	Helium valve closed
2/19/2012	8:34:34 PM	H2 valve closed
2/19/2012	8:34:34 PM	BCl3 valve closed
2/19/2012	8:34:34 PM	PH3 valve closed
2/19/2012	8:34:34 PM	SiCl4 pre valve closed
2/19/2012	8:34:34 PM	SiCl4 post valve closed
2/19/2012	8:34:34 PM	Bypass valve closed
2/19/2012	8:34:34 PM	Bubbler valve closed
2/19/2012	8:34:34 PM	Main Vac valve opened
2/19/2012	8:34:34 PM	Helium MFC set to  0.000000
2/19/2012	8:34:34 PM	H2 MFC set to  0.000000
2/19/2012	8:34:34 PM	BCl3 MFC set to  0.000000
2/19/2012	8:34:34 PM	PH3 MFC set to  0.000000
2/19/2012	8:34:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:34:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:34:34 PM	Tube furnace set to 150
2/19/2012	8:35:04 PM	H2 valve closed
2/19/2012	8:35:04 PM	BCl3 valve closed
2/19/2012	8:35:04 PM	PH3 valve closed
2/19/2012	8:35:04 PM	SiCl4 pre valve closed
2/19/2012	8:35:04 PM	SiCl4 post valve closed
2/19/2012	8:35:04 PM	Bypass valve closed
2/19/2012	8:35:04 PM	Bubbler valve closed
2/19/2012	8:35:04 PM	Helium valve opened
2/19/2012	8:35:04 PM	Main Vac valve opened
2/19/2012	8:35:04 PM	Helium MFC set to  20.000000
2/19/2012	8:35:04 PM	H2 MFC set to  0.000000
2/19/2012	8:35:04 PM	BCl3 MFC set to  0.000000
2/19/2012	8:35:04 PM	PH3 MFC set to  0.000000
2/19/2012	8:35:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:35:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:35:04 PM	Tube furnace set to 150
2/19/2012	8:35:34 PM	Helium valve closed
2/19/2012	8:35:34 PM	H2 valve closed
2/19/2012	8:35:34 PM	BCl3 valve closed
2/19/2012	8:35:34 PM	PH3 valve closed
2/19/2012	8:35:34 PM	SiCl4 pre valve closed
2/19/2012	8:35:34 PM	SiCl4 post valve closed
2/19/2012	8:35:34 PM	Bypass valve closed
2/19/2012	8:35:34 PM	Bubbler valve closed
2/19/2012	8:35:34 PM	Main Vac valve opened
2/19/2012	8:35:34 PM	Helium MFC set to  0.000000
2/19/2012	8:35:34 PM	H2 MFC set to  0.000000
2/19/2012	8:35:34 PM	BCl3 MFC set to  0.000000
2/19/2012	8:35:34 PM	PH3 MFC set to  0.000000
2/19/2012	8:35:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:35:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:35:34 PM	Tube furnace set to 150
2/19/2012	8:36:04 PM	H2 valve closed
2/19/2012	8:36:04 PM	BCl3 valve closed
2/19/2012	8:36:04 PM	PH3 valve closed
2/19/2012	8:36:04 PM	SiCl4 pre valve closed
2/19/2012	8:36:04 PM	SiCl4 post valve closed
2/19/2012	8:36:04 PM	Bypass valve closed
2/19/2012	8:36:04 PM	Bubbler valve closed
2/19/2012	8:36:04 PM	Helium valve opened
2/19/2012	8:36:04 PM	Main Vac valve opened
2/19/2012	8:36:04 PM	Helium MFC set to  20.000000
2/19/2012	8:36:04 PM	H2 MFC set to  0.000000
2/19/2012	8:36:04 PM	BCl3 MFC set to  0.000000
2/19/2012	8:36:04 PM	PH3 MFC set to  0.000000
2/19/2012	8:36:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:36:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:36:04 PM	Tube furnace set to 150
2/19/2012	8:36:34 PM	Helium valve closed
2/19/2012	8:36:34 PM	H2 valve closed
2/19/2012	8:36:34 PM	BCl3 valve closed
2/19/2012	8:36:34 PM	PH3 valve closed
2/19/2012	8:36:34 PM	SiCl4 pre valve closed
2/19/2012	8:36:34 PM	SiCl4 post valve closed
2/19/2012	8:36:34 PM	Bypass valve closed
2/19/2012	8:36:34 PM	Bubbler valve closed
2/19/2012	8:36:34 PM	Main Vac valve opened
2/19/2012	8:36:34 PM	Helium MFC set to  0.000000
2/19/2012	8:36:34 PM	H2 MFC set to  0.000000
2/19/2012	8:36:34 PM	BCl3 MFC set to  0.000000
2/19/2012	8:36:34 PM	PH3 MFC set to  0.000000
2/19/2012	8:36:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:36:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:36:35 PM	Tube furnace set to 150
2/19/2012	8:37:05 PM	H2 valve closed
2/19/2012	8:37:05 PM	BCl3 valve closed
2/19/2012	8:37:05 PM	PH3 valve closed
2/19/2012	8:37:05 PM	SiCl4 pre valve closed
2/19/2012	8:37:05 PM	SiCl4 post valve closed
2/19/2012	8:37:05 PM	Bypass valve closed
2/19/2012	8:37:05 PM	Bubbler valve closed
2/19/2012	8:37:05 PM	Helium valve opened
2/19/2012	8:37:05 PM	Main Vac valve opened
2/19/2012	8:37:05 PM	Helium MFC set to  20.000000
2/19/2012	8:37:05 PM	H2 MFC set to  0.000000
2/19/2012	8:37:05 PM	BCl3 MFC set to  0.000000
2/19/2012	8:37:05 PM	PH3 MFC set to  0.000000
2/19/2012	8:37:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:37:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:37:05 PM	Tube furnace set to 150
2/19/2012	8:37:35 PM	Helium valve closed
2/19/2012	8:37:35 PM	H2 valve closed
2/19/2012	8:37:35 PM	BCl3 valve closed
2/19/2012	8:37:35 PM	PH3 valve closed
2/19/2012	8:37:35 PM	SiCl4 pre valve closed
2/19/2012	8:37:35 PM	SiCl4 post valve closed
2/19/2012	8:37:35 PM	Bypass valve closed
2/19/2012	8:37:35 PM	Bubbler valve closed
2/19/2012	8:37:35 PM	Main Vac valve opened
2/19/2012	8:37:35 PM	Helium MFC set to  0.000000
2/19/2012	8:37:35 PM	H2 MFC set to  0.000000
2/19/2012	8:37:35 PM	BCl3 MFC set to  0.000000
2/19/2012	8:37:35 PM	PH3 MFC set to  0.000000
2/19/2012	8:37:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:37:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:37:35 PM	Tube furnace set to 150
2/19/2012	8:38:05 PM	H2 valve closed
2/19/2012	8:38:05 PM	BCl3 valve closed
2/19/2012	8:38:05 PM	PH3 valve closed
2/19/2012	8:38:05 PM	SiCl4 pre valve closed
2/19/2012	8:38:05 PM	SiCl4 post valve closed
2/19/2012	8:38:05 PM	Bypass valve closed
2/19/2012	8:38:05 PM	Bubbler valve closed
2/19/2012	8:38:05 PM	Helium valve opened
2/19/2012	8:38:05 PM	Main Vac valve opened
2/19/2012	8:38:05 PM	Helium MFC set to  20.000000
2/19/2012	8:38:05 PM	H2 MFC set to  0.000000
2/19/2012	8:38:05 PM	BCl3 MFC set to  0.000000
2/19/2012	8:38:05 PM	PH3 MFC set to  0.000000
2/19/2012	8:38:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:38:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:38:05 PM	Tube furnace set to 150
2/19/2012	8:38:35 PM	Helium valve closed
2/19/2012	8:38:35 PM	H2 valve closed
2/19/2012	8:38:35 PM	BCl3 valve closed
2/19/2012	8:38:35 PM	PH3 valve closed
2/19/2012	8:38:35 PM	SiCl4 pre valve closed
2/19/2012	8:38:35 PM	SiCl4 post valve closed
2/19/2012	8:38:35 PM	Bypass valve closed
2/19/2012	8:38:35 PM	Bubbler valve closed
2/19/2012	8:38:35 PM	Main Vac valve opened
2/19/2012	8:38:35 PM	Helium MFC set to  0.000000
2/19/2012	8:38:35 PM	H2 MFC set to  0.000000
2/19/2012	8:38:35 PM	BCl3 MFC set to  0.000000
2/19/2012	8:38:35 PM	PH3 MFC set to  0.000000
2/19/2012	8:38:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:38:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:38:35 PM	Tube furnace set to 150
2/19/2012	8:39:05 PM	H2 valve closed
2/19/2012	8:39:05 PM	BCl3 valve closed
2/19/2012	8:39:05 PM	PH3 valve closed
2/19/2012	8:39:05 PM	SiCl4 pre valve closed
2/19/2012	8:39:05 PM	SiCl4 post valve closed
2/19/2012	8:39:05 PM	Bypass valve closed
2/19/2012	8:39:05 PM	Bubbler valve closed
2/19/2012	8:39:05 PM	Helium valve opened
2/19/2012	8:39:05 PM	Main Vac valve opened
2/19/2012	8:39:05 PM	Helium MFC set to  20.000000
2/19/2012	8:39:05 PM	H2 MFC set to  0.000000
2/19/2012	8:39:05 PM	BCl3 MFC set to  0.000000
2/19/2012	8:39:05 PM	PH3 MFC set to  0.000000
2/19/2012	8:39:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:39:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:39:06 PM	Tube furnace set to 150
2/19/2012	8:39:36 PM	Helium valve closed
2/19/2012	8:39:36 PM	H2 valve closed
2/19/2012	8:39:36 PM	BCl3 valve closed
2/19/2012	8:39:36 PM	PH3 valve closed
2/19/2012	8:39:36 PM	SiCl4 pre valve closed
2/19/2012	8:39:36 PM	SiCl4 post valve closed
2/19/2012	8:39:36 PM	Bypass valve closed
2/19/2012	8:39:36 PM	Bubbler valve closed
2/19/2012	8:39:36 PM	Main Vac valve opened
2/19/2012	8:39:36 PM	Helium MFC set to  0.000000
2/19/2012	8:39:36 PM	H2 MFC set to  0.000000
2/19/2012	8:39:36 PM	BCl3 MFC set to  0.000000
2/19/2012	8:39:36 PM	PH3 MFC set to  0.000000
2/19/2012	8:39:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:39:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:39:36 PM	Tube furnace set to 150
2/19/2012	8:40:06 PM	H2 valve closed
2/19/2012	8:40:06 PM	BCl3 valve closed
2/19/2012	8:40:06 PM	PH3 valve closed
2/19/2012	8:40:06 PM	SiCl4 pre valve closed
2/19/2012	8:40:06 PM	SiCl4 post valve closed
2/19/2012	8:40:06 PM	Bypass valve closed
2/19/2012	8:40:06 PM	Bubbler valve closed
2/19/2012	8:40:06 PM	Helium valve opened
2/19/2012	8:40:06 PM	Main Vac valve opened
2/19/2012	8:40:06 PM	Helium MFC set to  20.000000
2/19/2012	8:40:06 PM	H2 MFC set to  0.000000
2/19/2012	8:40:06 PM	BCl3 MFC set to  0.000000
2/19/2012	8:40:06 PM	PH3 MFC set to  0.000000
2/19/2012	8:40:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:40:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:40:06 PM	Tube furnace set to 150
2/19/2012	8:40:36 PM	Helium valve closed
2/19/2012	8:40:36 PM	H2 valve closed
2/19/2012	8:40:36 PM	BCl3 valve closed
2/19/2012	8:40:36 PM	PH3 valve closed
2/19/2012	8:40:36 PM	SiCl4 pre valve closed
2/19/2012	8:40:36 PM	SiCl4 post valve closed
2/19/2012	8:40:36 PM	Bypass valve closed
2/19/2012	8:40:36 PM	Bubbler valve closed
2/19/2012	8:40:36 PM	Main Vac valve opened
2/19/2012	8:40:36 PM	Helium MFC set to  0.000000
2/19/2012	8:40:36 PM	H2 MFC set to  0.000000
2/19/2012	8:40:36 PM	BCl3 MFC set to  0.000000
2/19/2012	8:40:36 PM	PH3 MFC set to  0.000000
2/19/2012	8:40:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:40:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:40:36 PM	Tube furnace set to 150
2/19/2012	8:41:06 PM	H2 valve closed
2/19/2012	8:41:06 PM	BCl3 valve closed
2/19/2012	8:41:06 PM	PH3 valve closed
2/19/2012	8:41:06 PM	SiCl4 pre valve closed
2/19/2012	8:41:06 PM	SiCl4 post valve closed
2/19/2012	8:41:06 PM	Bypass valve closed
2/19/2012	8:41:06 PM	Bubbler valve closed
2/19/2012	8:41:06 PM	Helium valve opened
2/19/2012	8:41:06 PM	Main Vac valve opened
2/19/2012	8:41:06 PM	Helium MFC set to  20.000000
2/19/2012	8:41:06 PM	H2 MFC set to  0.000000
2/19/2012	8:41:06 PM	BCl3 MFC set to  0.000000
2/19/2012	8:41:06 PM	PH3 MFC set to  0.000000
2/19/2012	8:41:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:41:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:41:06 PM	Tube furnace set to 150
2/19/2012	8:41:36 PM	Helium valve closed
2/19/2012	8:41:36 PM	H2 valve closed
2/19/2012	8:41:36 PM	BCl3 valve closed
2/19/2012	8:41:36 PM	PH3 valve closed
2/19/2012	8:41:36 PM	SiCl4 pre valve closed
2/19/2012	8:41:37 PM	SiCl4 post valve closed
2/19/2012	8:41:37 PM	Bypass valve closed
2/19/2012	8:41:37 PM	Bubbler valve closed
2/19/2012	8:41:37 PM	Main Vac valve opened
2/19/2012	8:41:37 PM	Helium MFC set to  0.000000
2/19/2012	8:41:37 PM	H2 MFC set to  0.000000
2/19/2012	8:41:37 PM	BCl3 MFC set to  0.000000
2/19/2012	8:41:37 PM	PH3 MFC set to  0.000000
2/19/2012	8:41:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:41:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:41:37 PM	Tube furnace set to 150
2/19/2012	8:42:07 PM	H2 valve closed
2/19/2012	8:42:07 PM	BCl3 valve closed
2/19/2012	8:42:07 PM	PH3 valve closed
2/19/2012	8:42:07 PM	SiCl4 pre valve closed
2/19/2012	8:42:07 PM	SiCl4 post valve closed
2/19/2012	8:42:07 PM	Bypass valve closed
2/19/2012	8:42:07 PM	Bubbler valve closed
2/19/2012	8:42:07 PM	Helium valve opened
2/19/2012	8:42:07 PM	Main Vac valve opened
2/19/2012	8:42:07 PM	Helium MFC set to  20.000000
2/19/2012	8:42:07 PM	H2 MFC set to  0.000000
2/19/2012	8:42:07 PM	BCl3 MFC set to  0.000000
2/19/2012	8:42:07 PM	PH3 MFC set to  0.000000
2/19/2012	8:42:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:42:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:42:07 PM	Tube furnace set to 150
2/19/2012	8:42:37 PM	Helium valve closed
2/19/2012	8:42:37 PM	H2 valve closed
2/19/2012	8:42:37 PM	BCl3 valve closed
2/19/2012	8:42:37 PM	PH3 valve closed
2/19/2012	8:42:37 PM	SiCl4 pre valve closed
2/19/2012	8:42:37 PM	SiCl4 post valve closed
2/19/2012	8:42:37 PM	Bypass valve closed
2/19/2012	8:42:37 PM	Bubbler valve closed
2/19/2012	8:42:37 PM	Main Vac valve opened
2/19/2012	8:42:37 PM	Helium MFC set to  0.000000
2/19/2012	8:42:37 PM	H2 MFC set to  0.000000
2/19/2012	8:42:37 PM	BCl3 MFC set to  0.000000
2/19/2012	8:42:37 PM	PH3 MFC set to  0.000000
2/19/2012	8:42:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:42:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:42:37 PM	Tube furnace set to 150
2/19/2012	8:42:38 PM	Run finished at 8:42 PM
2/19/2012	8:43:13 PM	Main Vac valve closed
2/19/2012	8:43:27 PM	Main Vac valve opened
2/19/2012	8:43:35 PM	Recipe started at 8:43 PM
2/19/2012	8:43:35 PM	Helium valve closed
2/19/2012	8:43:35 PM	H2 valve closed
2/19/2012	8:43:35 PM	BCl3 valve closed
2/19/2012	8:43:35 PM	PH3 valve closed
2/19/2012	8:43:35 PM	SiCl4 pre valve closed
2/19/2012	8:43:35 PM	SiCl4 post valve closed
2/19/2012	8:43:35 PM	Bypass valve closed
2/19/2012	8:43:35 PM	Bubbler valve closed
2/19/2012	8:43:35 PM	Main Vac valve opened
2/19/2012	8:43:35 PM	Helium MFC set to  0.000000
2/19/2012	8:43:35 PM	H2 MFC set to  0.000000
2/19/2012	8:43:35 PM	BCl3 MFC set to  0.000000
2/19/2012	8:43:35 PM	PH3 MFC set to  0.000000
2/19/2012	8:43:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:43:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:43:35 PM	Tube furnace set to 150
2/19/2012	8:44:05 PM	H2 valve closed
2/19/2012	8:44:05 PM	BCl3 valve closed
2/19/2012	8:44:05 PM	PH3 valve closed
2/19/2012	8:44:05 PM	SiCl4 pre valve closed
2/19/2012	8:44:05 PM	SiCl4 post valve closed
2/19/2012	8:44:05 PM	Bypass valve closed
2/19/2012	8:44:05 PM	Bubbler valve closed
2/19/2012	8:44:05 PM	Helium valve opened
2/19/2012	8:44:05 PM	Main Vac valve opened
2/19/2012	8:44:05 PM	Helium MFC set to  20.000000
2/19/2012	8:44:05 PM	H2 MFC set to  0.000000
2/19/2012	8:44:05 PM	BCl3 MFC set to  0.000000
2/19/2012	8:44:05 PM	PH3 MFC set to  0.000000
2/19/2012	8:44:05 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:44:05 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:44:05 PM	Tube furnace set to 150
2/19/2012	8:44:35 PM	Helium valve closed
2/19/2012	8:44:35 PM	H2 valve closed
2/19/2012	8:44:35 PM	BCl3 valve closed
2/19/2012	8:44:35 PM	PH3 valve closed
2/19/2012	8:44:35 PM	SiCl4 pre valve closed
2/19/2012	8:44:35 PM	SiCl4 post valve closed
2/19/2012	8:44:35 PM	Bypass valve closed
2/19/2012	8:44:35 PM	Bubbler valve closed
2/19/2012	8:44:35 PM	Main Vac valve opened
2/19/2012	8:44:35 PM	Helium MFC set to  0.000000
2/19/2012	8:44:35 PM	H2 MFC set to  0.000000
2/19/2012	8:44:35 PM	BCl3 MFC set to  0.000000
2/19/2012	8:44:35 PM	PH3 MFC set to  0.000000
2/19/2012	8:44:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:44:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:44:36 PM	Tube furnace set to 150
2/19/2012	8:45:06 PM	H2 valve closed
2/19/2012	8:45:06 PM	BCl3 valve closed
2/19/2012	8:45:06 PM	PH3 valve closed
2/19/2012	8:45:06 PM	SiCl4 pre valve closed
2/19/2012	8:45:06 PM	SiCl4 post valve closed
2/19/2012	8:45:06 PM	Bypass valve closed
2/19/2012	8:45:06 PM	Bubbler valve closed
2/19/2012	8:45:06 PM	Helium valve opened
2/19/2012	8:45:06 PM	Main Vac valve opened
2/19/2012	8:45:06 PM	Helium MFC set to  20.000000
2/19/2012	8:45:06 PM	H2 MFC set to  0.000000
2/19/2012	8:45:06 PM	BCl3 MFC set to  0.000000
2/19/2012	8:45:06 PM	PH3 MFC set to  0.000000
2/19/2012	8:45:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:45:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:45:06 PM	Tube furnace set to 150
2/19/2012	8:45:36 PM	Helium valve closed
2/19/2012	8:45:36 PM	H2 valve closed
2/19/2012	8:45:36 PM	BCl3 valve closed
2/19/2012	8:45:36 PM	PH3 valve closed
2/19/2012	8:45:36 PM	SiCl4 pre valve closed
2/19/2012	8:45:36 PM	SiCl4 post valve closed
2/19/2012	8:45:36 PM	Bypass valve closed
2/19/2012	8:45:36 PM	Bubbler valve closed
2/19/2012	8:45:36 PM	Main Vac valve opened
2/19/2012	8:45:36 PM	Helium MFC set to  0.000000
2/19/2012	8:45:36 PM	H2 MFC set to  0.000000
2/19/2012	8:45:36 PM	BCl3 MFC set to  0.000000
2/19/2012	8:45:36 PM	PH3 MFC set to  0.000000
2/19/2012	8:45:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:45:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:45:36 PM	Tube furnace set to 150
2/19/2012	8:46:06 PM	H2 valve closed
2/19/2012	8:46:06 PM	BCl3 valve closed
2/19/2012	8:46:06 PM	PH3 valve closed
2/19/2012	8:46:06 PM	SiCl4 pre valve closed
2/19/2012	8:46:06 PM	SiCl4 post valve closed
2/19/2012	8:46:06 PM	Bypass valve closed
2/19/2012	8:46:06 PM	Bubbler valve closed
2/19/2012	8:46:06 PM	Helium valve opened
2/19/2012	8:46:06 PM	Main Vac valve opened
2/19/2012	8:46:06 PM	Helium MFC set to  20.000000
2/19/2012	8:46:06 PM	H2 MFC set to  0.000000
2/19/2012	8:46:06 PM	BCl3 MFC set to  0.000000
2/19/2012	8:46:06 PM	PH3 MFC set to  0.000000
2/19/2012	8:46:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:46:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:46:06 PM	Tube furnace set to 150
2/19/2012	8:46:36 PM	Helium valve closed
2/19/2012	8:46:36 PM	H2 valve closed
2/19/2012	8:46:36 PM	BCl3 valve closed
2/19/2012	8:46:36 PM	PH3 valve closed
2/19/2012	8:46:36 PM	SiCl4 pre valve closed
2/19/2012	8:46:36 PM	SiCl4 post valve closed
2/19/2012	8:46:36 PM	Bypass valve closed
2/19/2012	8:46:36 PM	Bubbler valve closed
2/19/2012	8:46:36 PM	Main Vac valve opened
2/19/2012	8:46:36 PM	Helium MFC set to  0.000000
2/19/2012	8:46:36 PM	H2 MFC set to  0.000000
2/19/2012	8:46:36 PM	BCl3 MFC set to  0.000000
2/19/2012	8:46:36 PM	PH3 MFC set to  0.000000
2/19/2012	8:46:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:46:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:46:36 PM	Tube furnace set to 150
2/19/2012	8:47:06 PM	H2 valve closed
2/19/2012	8:47:06 PM	BCl3 valve closed
2/19/2012	8:47:06 PM	PH3 valve closed
2/19/2012	8:47:06 PM	SiCl4 pre valve closed
2/19/2012	8:47:06 PM	SiCl4 post valve closed
2/19/2012	8:47:06 PM	Bypass valve closed
2/19/2012	8:47:06 PM	Bubbler valve closed
2/19/2012	8:47:06 PM	Helium valve opened
2/19/2012	8:47:06 PM	Main Vac valve opened
2/19/2012	8:47:06 PM	Helium MFC set to  20.000000
2/19/2012	8:47:06 PM	H2 MFC set to  0.000000
2/19/2012	8:47:06 PM	BCl3 MFC set to  0.000000
2/19/2012	8:47:06 PM	PH3 MFC set to  0.000000
2/19/2012	8:47:06 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:47:06 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:47:07 PM	Tube furnace set to 150
2/19/2012	8:47:37 PM	Helium valve closed
2/19/2012	8:47:37 PM	H2 valve closed
2/19/2012	8:47:37 PM	BCl3 valve closed
2/19/2012	8:47:37 PM	PH3 valve closed
2/19/2012	8:47:37 PM	SiCl4 pre valve closed
2/19/2012	8:47:37 PM	SiCl4 post valve closed
2/19/2012	8:47:37 PM	Bypass valve closed
2/19/2012	8:47:37 PM	Bubbler valve closed
2/19/2012	8:47:37 PM	Main Vac valve opened
2/19/2012	8:47:37 PM	Helium MFC set to  0.000000
2/19/2012	8:47:37 PM	H2 MFC set to  0.000000
2/19/2012	8:47:37 PM	BCl3 MFC set to  0.000000
2/19/2012	8:47:37 PM	PH3 MFC set to  0.000000
2/19/2012	8:47:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:47:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:47:37 PM	Tube furnace set to 150
2/19/2012	8:48:07 PM	H2 valve closed
2/19/2012	8:48:07 PM	BCl3 valve closed
2/19/2012	8:48:07 PM	PH3 valve closed
2/19/2012	8:48:07 PM	SiCl4 pre valve closed
2/19/2012	8:48:07 PM	SiCl4 post valve closed
2/19/2012	8:48:07 PM	Bypass valve closed
2/19/2012	8:48:07 PM	Bubbler valve closed
2/19/2012	8:48:07 PM	Helium valve opened
2/19/2012	8:48:07 PM	Main Vac valve opened
2/19/2012	8:48:07 PM	Helium MFC set to  20.000000
2/19/2012	8:48:07 PM	H2 MFC set to  0.000000
2/19/2012	8:48:07 PM	BCl3 MFC set to  0.000000
2/19/2012	8:48:07 PM	PH3 MFC set to  0.000000
2/19/2012	8:48:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:48:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:48:07 PM	Tube furnace set to 150
2/19/2012	8:48:37 PM	Helium valve closed
2/19/2012	8:48:37 PM	H2 valve closed
2/19/2012	8:48:37 PM	BCl3 valve closed
2/19/2012	8:48:37 PM	PH3 valve closed
2/19/2012	8:48:37 PM	SiCl4 pre valve closed
2/19/2012	8:48:37 PM	SiCl4 post valve closed
2/19/2012	8:48:37 PM	Bypass valve closed
2/19/2012	8:48:37 PM	Bubbler valve closed
2/19/2012	8:48:37 PM	Main Vac valve opened
2/19/2012	8:48:37 PM	Helium MFC set to  0.000000
2/19/2012	8:48:37 PM	H2 MFC set to  0.000000
2/19/2012	8:48:37 PM	BCl3 MFC set to  0.000000
2/19/2012	8:48:37 PM	PH3 MFC set to  0.000000
2/19/2012	8:48:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:48:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:48:37 PM	Tube furnace set to 150
2/19/2012	8:49:07 PM	H2 valve closed
2/19/2012	8:49:07 PM	BCl3 valve closed
2/19/2012	8:49:07 PM	PH3 valve closed
2/19/2012	8:49:07 PM	SiCl4 pre valve closed
2/19/2012	8:49:07 PM	SiCl4 post valve closed
2/19/2012	8:49:07 PM	Bypass valve closed
2/19/2012	8:49:07 PM	Bubbler valve closed
2/19/2012	8:49:07 PM	Helium valve opened
2/19/2012	8:49:07 PM	Main Vac valve opened
2/19/2012	8:49:07 PM	Helium MFC set to  20.000000
2/19/2012	8:49:07 PM	H2 MFC set to  0.000000
2/19/2012	8:49:07 PM	BCl3 MFC set to  0.000000
2/19/2012	8:49:07 PM	PH3 MFC set to  0.000000
2/19/2012	8:49:07 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:49:07 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:49:07 PM	Tube furnace set to 150
2/19/2012	8:49:37 PM	Helium valve closed
2/19/2012	8:49:37 PM	H2 valve closed
2/19/2012	8:49:37 PM	BCl3 valve closed
2/19/2012	8:49:37 PM	PH3 valve closed
2/19/2012	8:49:37 PM	SiCl4 pre valve closed
2/19/2012	8:49:37 PM	SiCl4 post valve closed
2/19/2012	8:49:37 PM	Bypass valve closed
2/19/2012	8:49:37 PM	Bubbler valve closed
2/19/2012	8:49:37 PM	Main Vac valve opened
2/19/2012	8:49:37 PM	Helium MFC set to  0.000000
2/19/2012	8:49:37 PM	H2 MFC set to  0.000000
2/19/2012	8:49:37 PM	BCl3 MFC set to  0.000000
2/19/2012	8:49:37 PM	PH3 MFC set to  0.000000
2/19/2012	8:49:37 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:49:37 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:49:38 PM	Tube furnace set to 150
2/19/2012	8:50:08 PM	H2 valve closed
2/19/2012	8:50:08 PM	BCl3 valve closed
2/19/2012	8:50:08 PM	PH3 valve closed
2/19/2012	8:50:08 PM	SiCl4 pre valve closed
2/19/2012	8:50:08 PM	SiCl4 post valve closed
2/19/2012	8:50:08 PM	Bypass valve closed
2/19/2012	8:50:08 PM	Bubbler valve closed
2/19/2012	8:50:08 PM	Helium valve opened
2/19/2012	8:50:08 PM	Main Vac valve opened
2/19/2012	8:50:08 PM	Helium MFC set to  20.000000
2/19/2012	8:50:08 PM	H2 MFC set to  0.000000
2/19/2012	8:50:08 PM	BCl3 MFC set to  0.000000
2/19/2012	8:50:08 PM	PH3 MFC set to  0.000000
2/19/2012	8:50:08 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:50:08 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:50:08 PM	Tube furnace set to 150
2/19/2012	8:50:38 PM	Helium valve closed
2/19/2012	8:50:38 PM	H2 valve closed
2/19/2012	8:50:38 PM	BCl3 valve closed
2/19/2012	8:50:38 PM	PH3 valve closed
2/19/2012	8:50:38 PM	SiCl4 pre valve closed
2/19/2012	8:50:38 PM	SiCl4 post valve closed
2/19/2012	8:50:38 PM	Bypass valve closed
2/19/2012	8:50:38 PM	Bubbler valve closed
2/19/2012	8:50:38 PM	Main Vac valve opened
2/19/2012	8:50:38 PM	Helium MFC set to  0.000000
2/19/2012	8:50:38 PM	H2 MFC set to  0.000000
2/19/2012	8:50:38 PM	BCl3 MFC set to  0.000000
2/19/2012	8:50:38 PM	PH3 MFC set to  0.000000
2/19/2012	8:50:38 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:50:38 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:50:38 PM	Tube furnace set to 150
2/19/2012	8:51:08 PM	H2 valve closed
2/19/2012	8:51:08 PM	BCl3 valve closed
2/19/2012	8:51:08 PM	PH3 valve closed
2/19/2012	8:51:08 PM	SiCl4 pre valve closed
2/19/2012	8:51:08 PM	SiCl4 post valve closed
2/19/2012	8:51:08 PM	Bypass valve closed
2/19/2012	8:51:08 PM	Bubbler valve closed
2/19/2012	8:51:08 PM	Helium valve opened
2/19/2012	8:51:08 PM	Main Vac valve opened
2/19/2012	8:51:08 PM	Helium MFC set to  20.000000
2/19/2012	8:51:08 PM	H2 MFC set to  0.000000
2/19/2012	8:51:08 PM	BCl3 MFC set to  0.000000
2/19/2012	8:51:08 PM	PH3 MFC set to  0.000000
2/19/2012	8:51:08 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:51:08 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:51:08 PM	Tube furnace set to 150
2/19/2012	8:51:38 PM	Helium valve closed
2/19/2012	8:51:38 PM	H2 valve closed
2/19/2012	8:51:38 PM	BCl3 valve closed
2/19/2012	8:51:38 PM	PH3 valve closed
2/19/2012	8:51:38 PM	SiCl4 pre valve closed
2/19/2012	8:51:38 PM	SiCl4 post valve closed
2/19/2012	8:51:38 PM	Bypass valve closed
2/19/2012	8:51:38 PM	Bubbler valve closed
2/19/2012	8:51:38 PM	Main Vac valve opened
2/19/2012	8:51:38 PM	Helium MFC set to  0.000000
2/19/2012	8:51:38 PM	H2 MFC set to  0.000000
2/19/2012	8:51:38 PM	BCl3 MFC set to  0.000000
2/19/2012	8:51:38 PM	PH3 MFC set to  0.000000
2/19/2012	8:51:38 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:51:38 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:51:38 PM	Tube furnace set to 150
2/19/2012	8:52:08 PM	H2 valve closed
2/19/2012	8:52:08 PM	BCl3 valve closed
2/19/2012	8:52:08 PM	PH3 valve closed
2/19/2012	8:52:08 PM	SiCl4 pre valve closed
2/19/2012	8:52:08 PM	SiCl4 post valve closed
2/19/2012	8:52:08 PM	Bypass valve closed
2/19/2012	8:52:08 PM	Bubbler valve closed
2/19/2012	8:52:08 PM	Helium valve opened
2/19/2012	8:52:08 PM	Main Vac valve opened
2/19/2012	8:52:08 PM	Helium MFC set to  20.000000
2/19/2012	8:52:08 PM	H2 MFC set to  0.000000
2/19/2012	8:52:08 PM	BCl3 MFC set to  0.000000
2/19/2012	8:52:08 PM	PH3 MFC set to  0.000000
2/19/2012	8:52:08 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:52:08 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:52:09 PM	Tube furnace set to 150
2/19/2012	8:52:39 PM	Helium valve closed
2/19/2012	8:52:39 PM	H2 valve closed
2/19/2012	8:52:39 PM	BCl3 valve closed
2/19/2012	8:52:39 PM	PH3 valve closed
2/19/2012	8:52:39 PM	SiCl4 pre valve closed
2/19/2012	8:52:39 PM	SiCl4 post valve closed
2/19/2012	8:52:39 PM	Bypass valve closed
2/19/2012	8:52:39 PM	Bubbler valve closed
2/19/2012	8:52:39 PM	Main Vac valve opened
2/19/2012	8:52:39 PM	Helium MFC set to  0.000000
2/19/2012	8:52:39 PM	H2 MFC set to  0.000000
2/19/2012	8:52:39 PM	BCl3 MFC set to  0.000000
2/19/2012	8:52:39 PM	PH3 MFC set to  0.000000
2/19/2012	8:52:39 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:52:39 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:52:39 PM	Tube furnace set to 150
2/19/2012	8:53:09 PM	H2 valve closed
2/19/2012	8:53:09 PM	BCl3 valve closed
2/19/2012	8:53:09 PM	PH3 valve closed
2/19/2012	8:53:09 PM	SiCl4 pre valve closed
2/19/2012	8:53:09 PM	SiCl4 post valve closed
2/19/2012	8:53:09 PM	Bypass valve closed
2/19/2012	8:53:09 PM	Bubbler valve closed
2/19/2012	8:53:09 PM	Helium valve opened
2/19/2012	8:53:09 PM	Main Vac valve opened
2/19/2012	8:53:09 PM	Helium MFC set to  20.000000
2/19/2012	8:53:09 PM	H2 MFC set to  0.000000
2/19/2012	8:53:09 PM	BCl3 MFC set to  0.000000
2/19/2012	8:53:09 PM	PH3 MFC set to  0.000000
2/19/2012	8:53:09 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:53:09 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:53:09 PM	Tube furnace set to 150
2/19/2012	8:53:39 PM	Helium valve closed
2/19/2012	8:53:39 PM	H2 valve closed
2/19/2012	8:53:39 PM	BCl3 valve closed
2/19/2012	8:53:39 PM	PH3 valve closed
2/19/2012	8:53:39 PM	SiCl4 pre valve closed
2/19/2012	8:53:39 PM	SiCl4 post valve closed
2/19/2012	8:53:39 PM	Bypass valve closed
2/19/2012	8:53:39 PM	Bubbler valve closed
2/19/2012	8:53:39 PM	Main Vac valve opened
2/19/2012	8:53:39 PM	Helium MFC set to  0.000000
2/19/2012	8:53:39 PM	H2 MFC set to  0.000000
2/19/2012	8:53:39 PM	BCl3 MFC set to  0.000000
2/19/2012	8:53:39 PM	PH3 MFC set to  0.000000
2/19/2012	8:53:39 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:53:39 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:53:39 PM	Tube furnace set to 150
2/19/2012	8:53:40 PM	Run finished at 8:53 PM
2/19/2012	8:55:09 PM	Main Vac valve closed
2/19/2012	8:55:20 PM	Main Vac valve opened
2/19/2012	8:56:09 PM	Recipe started at 8:56 PM
2/19/2012	8:56:09 PM	Helium valve closed
2/19/2012	8:56:09 PM	H2 valve closed
2/19/2012	8:56:09 PM	BCl3 valve closed
2/19/2012	8:56:09 PM	PH3 valve closed
2/19/2012	8:56:09 PM	SiCl4 pre valve closed
2/19/2012	8:56:09 PM	SiCl4 post valve closed
2/19/2012	8:56:09 PM	Main Vac valve closed
2/19/2012	8:56:09 PM	Bypass valve closed
2/19/2012	8:56:09 PM	Bubbler valve closed
2/19/2012	8:56:09 PM	Helium MFC set to  0.000000
2/19/2012	8:56:09 PM	H2 MFC set to  0.000000
2/19/2012	8:56:09 PM	BCl3 MFC set to  0.000000
2/19/2012	8:56:09 PM	PH3 MFC set to  0.000000
2/19/2012	8:56:09 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:56:09 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:56:09 PM	Tube furnace set to 0
2/19/2012	8:56:12 PM	Helium valve closed
2/19/2012	8:56:12 PM	BCl3 valve closed
2/19/2012	8:56:12 PM	PH3 valve closed
2/19/2012	8:56:12 PM	SiCl4 pre valve closed
2/19/2012	8:56:12 PM	SiCl4 post valve closed
2/19/2012	8:56:12 PM	Main Vac valve closed
2/19/2012	8:56:12 PM	Bypass valve closed
2/19/2012	8:56:12 PM	Bubbler valve closed
2/19/2012	8:56:12 PM	H2 valve opened
2/19/2012	8:56:12 PM	Helium MFC set to  0.000000
2/19/2012	8:56:12 PM	H2 MFC set to  500.000000
2/19/2012	8:56:12 PM	BCl3 MFC set to  0.000000
2/19/2012	8:56:12 PM	PH3 MFC set to  0.000000
2/19/2012	8:56:12 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:56:12 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:56:12 PM	Tube furnace set to 0
2/19/2012	8:57:16 PM	Helium valve closed
2/19/2012	8:57:16 PM	BCl3 valve closed
2/19/2012	8:57:16 PM	PH3 valve closed
2/19/2012	8:57:16 PM	SiCl4 pre valve closed
2/19/2012	8:57:16 PM	SiCl4 post valve closed
2/19/2012	8:57:16 PM	Main Vac valve closed
2/19/2012	8:57:16 PM	Bypass valve closed
2/19/2012	8:57:16 PM	H2 valve opened
2/19/2012	8:57:16 PM	Bubbler valve opened
2/19/2012	8:57:16 PM	Helium MFC set to  0.000000
2/19/2012	8:57:16 PM	H2 MFC set to  500.000000
2/19/2012	8:57:16 PM	BCl3 MFC set to  0.000000
2/19/2012	8:57:16 PM	PH3 MFC set to  0.000000
2/19/2012	8:57:16 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:57:16 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:57:16 PM	Tube furnace set to 0
2/19/2012	8:57:17 PM	Helium valve closed
2/19/2012	8:57:17 PM	BCl3 valve closed
2/19/2012	8:57:17 PM	PH3 valve closed
2/19/2012	8:57:17 PM	SiCl4 pre valve closed
2/19/2012	8:57:17 PM	SiCl4 post valve closed
2/19/2012	8:57:17 PM	Main Vac valve closed
2/19/2012	8:57:17 PM	Bypass valve closed
2/19/2012	8:57:17 PM	H2 valve opened
2/19/2012	8:57:17 PM	Bubbler valve opened
2/19/2012	8:57:17 PM	Helium MFC set to  0.000000
2/19/2012	8:57:17 PM	H2 MFC set to  500.000000
2/19/2012	8:57:17 PM	BCl3 MFC set to  0.000000
2/19/2012	8:57:17 PM	PH3 MFC set to  0.000000
2/19/2012	8:57:17 PM	SiCl4 MFC set to  0.000000
2/19/2012	8:57:17 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	8:57:18 PM	Tube furnace set to 1000
2/19/2012	9:17:17 PM	Helium valve closed
2/19/2012	9:17:17 PM	PH3 valve closed
2/19/2012	9:17:17 PM	Main Vac valve closed
2/19/2012	9:17:17 PM	Bypass valve closed
2/19/2012	9:17:17 PM	H2 valve opened
2/19/2012	9:17:17 PM	BCl3 valve opened
2/19/2012	9:17:17 PM	SiCl4 pre valve opened
2/19/2012	9:17:18 PM	SiCl4 post valve opened
2/19/2012	9:17:18 PM	Bubbler valve opened
2/19/2012	9:17:18 PM	Helium MFC set to  0.000000
2/19/2012	9:17:18 PM	H2 MFC set to  500.000000
2/19/2012	9:17:18 PM	BCl3 MFC set to  20.000000
2/19/2012	9:17:18 PM	PH3 MFC set to  0.000000
2/19/2012	9:17:18 PM	SiCl4 MFC set to  50.000000
2/19/2012	9:17:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:17:18 PM	Tube furnace set to 1000
2/19/2012	9:27:18 PM	Helium valve closed
2/19/2012	9:27:18 PM	BCl3 valve closed
2/19/2012	9:27:18 PM	PH3 valve closed
2/19/2012	9:27:18 PM	SiCl4 pre valve closed
2/19/2012	9:27:18 PM	SiCl4 post valve closed
2/19/2012	9:27:18 PM	Main Vac valve closed
2/19/2012	9:27:18 PM	Bypass valve closed
2/19/2012	9:27:18 PM	H2 valve opened
2/19/2012	9:27:18 PM	Bubbler valve opened
2/19/2012	9:27:18 PM	Helium MFC set to  0.000000
2/19/2012	9:27:18 PM	H2 MFC set to  500.000000
2/19/2012	9:27:18 PM	BCl3 MFC set to  0.000000
2/19/2012	9:27:18 PM	PH3 MFC set to  0.000000
2/19/2012	9:27:18 PM	SiCl4 MFC set to  0.000000
2/19/2012	9:27:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:27:18 PM	Tube furnace set to 750
2/19/2012	9:32:18 PM	H2 valve closed
2/19/2012	9:32:18 PM	BCl3 valve closed
2/19/2012	9:32:18 PM	PH3 valve closed
2/19/2012	9:32:18 PM	SiCl4 pre valve closed
2/19/2012	9:32:18 PM	SiCl4 post valve closed
2/19/2012	9:32:18 PM	Main Vac valve closed
2/19/2012	9:32:18 PM	Bypass valve closed
2/19/2012	9:32:18 PM	Helium valve opened
2/19/2012	9:32:18 PM	Bubbler valve opened
2/19/2012	9:32:18 PM	Helium MFC set to  500.000000
2/19/2012	9:32:18 PM	H2 MFC set to  0.000000
2/19/2012	9:32:18 PM	BCl3 MFC set to  0.000000
2/19/2012	9:32:18 PM	PH3 MFC set to  0.000000
2/19/2012	9:32:18 PM	SiCl4 MFC set to  0.000000
2/19/2012	9:32:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:32:18 PM	Tube furnace set to 0
2/19/2012	9:52:18 PM	Helium valve closed
2/19/2012	9:52:18 PM	H2 valve closed
2/19/2012	9:52:18 PM	BCl3 valve closed
2/19/2012	9:52:18 PM	PH3 valve closed
2/19/2012	9:52:18 PM	SiCl4 pre valve closed
2/19/2012	9:52:18 PM	SiCl4 post valve closed
2/19/2012	9:52:18 PM	Main Vac valve closed
2/19/2012	9:52:18 PM	Bypass valve closed
2/19/2012	9:52:18 PM	Bubbler valve closed
2/19/2012	9:52:18 PM	Helium MFC set to  0.000000
2/19/2012	9:52:18 PM	H2 MFC set to  0.000000
2/19/2012	9:52:18 PM	BCl3 MFC set to  0.000000
2/19/2012	9:52:18 PM	PH3 MFC set to  0.000000
2/19/2012	9:52:18 PM	SiCl4 MFC set to  0.000000
2/19/2012	9:52:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:52:18 PM	Tube furnace set to 0
2/19/2012	9:52:19 PM	Run finished at 9:52 PM
2/19/2012	9:57:12 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	9:57:13 PM	Recipe started at 9:57 PM
2/19/2012	9:57:13 PM	Helium valve closed
2/19/2012	9:57:13 PM	H2 valve closed
2/19/2012	9:57:13 PM	BCl3 valve closed
2/19/2012	9:57:13 PM	PH3 valve closed
2/19/2012	9:57:13 PM	SiCl4 pre valve closed
2/19/2012	9:57:13 PM	SiCl4 post valve closed
2/19/2012	9:57:13 PM	Main Vac valve closed
2/19/2012	9:57:13 PM	Bubbler valve closed
2/19/2012	9:57:13 PM	Bypass valve opened
2/19/2012	9:57:13 PM	Helium MFC set to  0.000000
2/19/2012	9:57:13 PM	H2 MFC set to  0.000000
2/19/2012	9:57:13 PM	BCl3 MFC set to  0.000000
2/19/2012	9:57:13 PM	PH3 MFC set to  0.000000
2/19/2012	9:57:13 PM	SiCl4 MFC set to  0.000000
2/19/2012	9:57:13 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:57:13 PM	Tube furnace set to 0
2/19/2012	9:58:16 PM	Helium valve closed
2/19/2012	9:58:16 PM	H2 valve closed
2/19/2012	9:58:16 PM	BCl3 valve closed
2/19/2012	9:58:16 PM	PH3 valve closed
2/19/2012	9:58:16 PM	SiCl4 pre valve closed
2/19/2012	9:58:16 PM	SiCl4 post valve closed
2/19/2012	9:58:16 PM	Main Vac valve closed
2/19/2012	9:58:16 PM	Bubbler valve closed
2/19/2012	9:58:16 PM	Bypass valve opened
2/19/2012	9:58:16 PM	Helium MFC set to  0.000000
2/19/2012	9:58:16 PM	H2 MFC set to  0.000000
2/19/2012	9:58:16 PM	BCl3 MFC set to  0.000000
2/19/2012	9:58:16 PM	PH3 MFC set to  0.000000
2/19/2012	9:58:16 PM	SiCl4 MFC set to  0.000000
2/19/2012	9:58:16 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:58:17 PM	Tube furnace set to 0
2/19/2012	9:59:17 PM	Helium valve closed
2/19/2012	9:59:17 PM	H2 valve closed
2/19/2012	9:59:17 PM	BCl3 valve closed
2/19/2012	9:59:17 PM	PH3 valve closed
2/19/2012	9:59:17 PM	SiCl4 pre valve closed
2/19/2012	9:59:17 PM	SiCl4 post valve closed
2/19/2012	9:59:17 PM	Bypass valve closed
2/19/2012	9:59:17 PM	Bubbler valve closed
2/19/2012	9:59:17 PM	Main Vac valve opened
2/19/2012	9:59:17 PM	Helium MFC set to  0.000000
2/19/2012	9:59:17 PM	H2 MFC set to  0.000000
2/19/2012	9:59:17 PM	BCl3 MFC set to  0.000000
2/19/2012	9:59:17 PM	PH3 MFC set to  0.000000
2/19/2012	9:59:17 PM	SiCl4 MFC set to  0.000000
2/19/2012	9:59:17 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:59:17 PM	Tube furnace set to 0
2/19/2012	9:59:18 PM	Run finished at 9:59 PM
2/19/2012	9:59:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	9:59:45 PM	Recipe started at 9:59 PM
2/19/2012	9:59:45 PM	Helium valve closed
2/19/2012	9:59:45 PM	H2 valve closed
2/19/2012	9:59:45 PM	BCl3 valve closed
2/19/2012	9:59:45 PM	PH3 valve closed
2/19/2012	9:59:45 PM	SiCl4 pre valve closed
2/19/2012	9:59:45 PM	SiCl4 post valve closed
2/19/2012	9:59:45 PM	Bypass valve closed
2/19/2012	9:59:45 PM	Bubbler valve closed
2/19/2012	9:59:45 PM	Main Vac valve opened
2/19/2012	9:59:45 PM	Helium MFC set to  0.000000
2/19/2012	9:59:45 PM	H2 MFC set to  0.000000
2/19/2012	9:59:45 PM	BCl3 MFC set to  0.000000
2/19/2012	9:59:45 PM	PH3 MFC set to  0.000000
2/19/2012	9:59:45 PM	SiCl4 MFC set to  0.000000
2/19/2012	9:59:45 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	9:59:45 PM	Tube furnace set to 150
2/19/2012	10:00:15 PM	H2 valve closed
2/19/2012	10:00:15 PM	BCl3 valve closed
2/19/2012	10:00:15 PM	PH3 valve closed
2/19/2012	10:00:15 PM	SiCl4 pre valve closed
2/19/2012	10:00:15 PM	SiCl4 post valve closed
2/19/2012	10:00:15 PM	Bypass valve closed
2/19/2012	10:00:15 PM	Bubbler valve closed
2/19/2012	10:00:15 PM	Helium valve opened
2/19/2012	10:00:15 PM	Main Vac valve opened
2/19/2012	10:00:15 PM	Helium MFC set to  20.000000
2/19/2012	10:00:15 PM	H2 MFC set to  0.000000
2/19/2012	10:00:15 PM	BCl3 MFC set to  0.000000
2/19/2012	10:00:15 PM	PH3 MFC set to  0.000000
2/19/2012	10:00:15 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:00:15 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:00:15 PM	Tube furnace set to 150
2/19/2012	10:00:45 PM	Helium valve closed
2/19/2012	10:00:45 PM	H2 valve closed
2/19/2012	10:00:45 PM	BCl3 valve closed
2/19/2012	10:00:45 PM	PH3 valve closed
2/19/2012	10:00:45 PM	SiCl4 pre valve closed
2/19/2012	10:00:45 PM	SiCl4 post valve closed
2/19/2012	10:00:45 PM	Bypass valve closed
2/19/2012	10:00:45 PM	Bubbler valve closed
2/19/2012	10:00:45 PM	Main Vac valve opened
2/19/2012	10:00:45 PM	Helium MFC set to  0.000000
2/19/2012	10:00:45 PM	H2 MFC set to  0.000000
2/19/2012	10:00:45 PM	BCl3 MFC set to  0.000000
2/19/2012	10:00:45 PM	PH3 MFC set to  0.000000
2/19/2012	10:00:45 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:00:45 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:00:45 PM	Tube furnace set to 150
2/19/2012	10:01:15 PM	H2 valve closed
2/19/2012	10:01:15 PM	BCl3 valve closed
2/19/2012	10:01:15 PM	PH3 valve closed
2/19/2012	10:01:15 PM	SiCl4 pre valve closed
2/19/2012	10:01:15 PM	SiCl4 post valve closed
2/19/2012	10:01:15 PM	Bypass valve closed
2/19/2012	10:01:15 PM	Bubbler valve closed
2/19/2012	10:01:15 PM	Helium valve opened
2/19/2012	10:01:15 PM	Main Vac valve opened
2/19/2012	10:01:15 PM	Helium MFC set to  20.000000
2/19/2012	10:01:15 PM	H2 MFC set to  0.000000
2/19/2012	10:01:15 PM	BCl3 MFC set to  0.000000
2/19/2012	10:01:15 PM	PH3 MFC set to  0.000000
2/19/2012	10:01:15 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:01:15 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:01:15 PM	Tube furnace set to 150
2/19/2012	10:01:45 PM	Helium valve closed
2/19/2012	10:01:45 PM	H2 valve closed
2/19/2012	10:01:45 PM	BCl3 valve closed
2/19/2012	10:01:45 PM	PH3 valve closed
2/19/2012	10:01:45 PM	SiCl4 pre valve closed
2/19/2012	10:01:45 PM	SiCl4 post valve closed
2/19/2012	10:01:45 PM	Bypass valve closed
2/19/2012	10:01:45 PM	Bubbler valve closed
2/19/2012	10:01:45 PM	Main Vac valve opened
2/19/2012	10:01:45 PM	Helium MFC set to  0.000000
2/19/2012	10:01:45 PM	H2 MFC set to  0.000000
2/19/2012	10:01:45 PM	BCl3 MFC set to  0.000000
2/19/2012	10:01:45 PM	PH3 MFC set to  0.000000
2/19/2012	10:01:45 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:01:45 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:01:46 PM	Tube furnace set to 150
2/19/2012	10:02:16 PM	H2 valve closed
2/19/2012	10:02:16 PM	BCl3 valve closed
2/19/2012	10:02:16 PM	PH3 valve closed
2/19/2012	10:02:16 PM	SiCl4 pre valve closed
2/19/2012	10:02:16 PM	SiCl4 post valve closed
2/19/2012	10:02:16 PM	Bypass valve closed
2/19/2012	10:02:16 PM	Bubbler valve closed
2/19/2012	10:02:16 PM	Helium valve opened
2/19/2012	10:02:16 PM	Main Vac valve opened
2/19/2012	10:02:16 PM	Helium MFC set to  20.000000
2/19/2012	10:02:16 PM	H2 MFC set to  0.000000
2/19/2012	10:02:16 PM	BCl3 MFC set to  0.000000
2/19/2012	10:02:16 PM	PH3 MFC set to  0.000000
2/19/2012	10:02:16 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:02:16 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:02:16 PM	Tube furnace set to 150
2/19/2012	10:02:46 PM	Helium valve closed
2/19/2012	10:02:46 PM	H2 valve closed
2/19/2012	10:02:46 PM	BCl3 valve closed
2/19/2012	10:02:46 PM	PH3 valve closed
2/19/2012	10:02:46 PM	SiCl4 pre valve closed
2/19/2012	10:02:46 PM	SiCl4 post valve closed
2/19/2012	10:02:46 PM	Bypass valve closed
2/19/2012	10:02:46 PM	Bubbler valve closed
2/19/2012	10:02:46 PM	Main Vac valve opened
2/19/2012	10:02:46 PM	Helium MFC set to  0.000000
2/19/2012	10:02:46 PM	H2 MFC set to  0.000000
2/19/2012	10:02:46 PM	BCl3 MFC set to  0.000000
2/19/2012	10:02:46 PM	PH3 MFC set to  0.000000
2/19/2012	10:02:46 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:02:46 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:02:46 PM	Tube furnace set to 150
2/19/2012	10:03:16 PM	H2 valve closed
2/19/2012	10:03:16 PM	BCl3 valve closed
2/19/2012	10:03:16 PM	PH3 valve closed
2/19/2012	10:03:16 PM	SiCl4 pre valve closed
2/19/2012	10:03:16 PM	SiCl4 post valve closed
2/19/2012	10:03:16 PM	Bypass valve closed
2/19/2012	10:03:16 PM	Bubbler valve closed
2/19/2012	10:03:16 PM	Helium valve opened
2/19/2012	10:03:16 PM	Main Vac valve opened
2/19/2012	10:03:16 PM	Helium MFC set to  20.000000
2/19/2012	10:03:16 PM	H2 MFC set to  0.000000
2/19/2012	10:03:16 PM	BCl3 MFC set to  0.000000
2/19/2012	10:03:16 PM	PH3 MFC set to  0.000000
2/19/2012	10:03:16 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:03:16 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:03:16 PM	Tube furnace set to 150
2/19/2012	10:03:46 PM	Helium valve closed
2/19/2012	10:03:46 PM	H2 valve closed
2/19/2012	10:03:46 PM	BCl3 valve closed
2/19/2012	10:03:46 PM	PH3 valve closed
2/19/2012	10:03:46 PM	SiCl4 pre valve closed
2/19/2012	10:03:46 PM	SiCl4 post valve closed
2/19/2012	10:03:46 PM	Bypass valve closed
2/19/2012	10:03:46 PM	Bubbler valve closed
2/19/2012	10:03:46 PM	Main Vac valve opened
2/19/2012	10:03:46 PM	Helium MFC set to  0.000000
2/19/2012	10:03:46 PM	H2 MFC set to  0.000000
2/19/2012	10:03:46 PM	BCl3 MFC set to  0.000000
2/19/2012	10:03:46 PM	PH3 MFC set to  0.000000
2/19/2012	10:03:46 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:03:46 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:03:46 PM	Tube furnace set to 150
2/19/2012	10:04:16 PM	H2 valve closed
2/19/2012	10:04:16 PM	BCl3 valve closed
2/19/2012	10:04:16 PM	PH3 valve closed
2/19/2012	10:04:16 PM	SiCl4 pre valve closed
2/19/2012	10:04:16 PM	SiCl4 post valve closed
2/19/2012	10:04:16 PM	Bypass valve closed
2/19/2012	10:04:16 PM	Bubbler valve closed
2/19/2012	10:04:16 PM	Helium valve opened
2/19/2012	10:04:16 PM	Main Vac valve opened
2/19/2012	10:04:16 PM	Helium MFC set to  20.000000
2/19/2012	10:04:16 PM	H2 MFC set to  0.000000
2/19/2012	10:04:16 PM	BCl3 MFC set to  0.000000
2/19/2012	10:04:16 PM	PH3 MFC set to  0.000000
2/19/2012	10:04:16 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:04:16 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:04:17 PM	Tube furnace set to 150
2/19/2012	10:04:47 PM	Helium valve closed
2/19/2012	10:04:47 PM	H2 valve closed
2/19/2012	10:04:47 PM	BCl3 valve closed
2/19/2012	10:04:47 PM	PH3 valve closed
2/19/2012	10:04:47 PM	SiCl4 pre valve closed
2/19/2012	10:04:47 PM	SiCl4 post valve closed
2/19/2012	10:04:47 PM	Bypass valve closed
2/19/2012	10:04:47 PM	Bubbler valve closed
2/19/2012	10:04:47 PM	Main Vac valve opened
2/19/2012	10:04:47 PM	Helium MFC set to  0.000000
2/19/2012	10:04:47 PM	H2 MFC set to  0.000000
2/19/2012	10:04:47 PM	BCl3 MFC set to  0.000000
2/19/2012	10:04:47 PM	PH3 MFC set to  0.000000
2/19/2012	10:04:47 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:04:47 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:04:47 PM	Tube furnace set to 150
2/19/2012	10:05:17 PM	H2 valve closed
2/19/2012	10:05:17 PM	BCl3 valve closed
2/19/2012	10:05:17 PM	PH3 valve closed
2/19/2012	10:05:17 PM	SiCl4 pre valve closed
2/19/2012	10:05:17 PM	SiCl4 post valve closed
2/19/2012	10:05:17 PM	Bypass valve closed
2/19/2012	10:05:17 PM	Bubbler valve closed
2/19/2012	10:05:17 PM	Helium valve opened
2/19/2012	10:05:17 PM	Main Vac valve opened
2/19/2012	10:05:17 PM	Helium MFC set to  20.000000
2/19/2012	10:05:17 PM	H2 MFC set to  0.000000
2/19/2012	10:05:17 PM	BCl3 MFC set to  0.000000
2/19/2012	10:05:17 PM	PH3 MFC set to  0.000000
2/19/2012	10:05:17 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:05:17 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:05:17 PM	Tube furnace set to 150
2/19/2012	10:05:47 PM	Helium valve closed
2/19/2012	10:05:47 PM	H2 valve closed
2/19/2012	10:05:47 PM	BCl3 valve closed
2/19/2012	10:05:47 PM	PH3 valve closed
2/19/2012	10:05:47 PM	SiCl4 pre valve closed
2/19/2012	10:05:47 PM	SiCl4 post valve closed
2/19/2012	10:05:47 PM	Bypass valve closed
2/19/2012	10:05:47 PM	Bubbler valve closed
2/19/2012	10:05:47 PM	Main Vac valve opened
2/19/2012	10:05:47 PM	Helium MFC set to  0.000000
2/19/2012	10:05:47 PM	H2 MFC set to  0.000000
2/19/2012	10:05:47 PM	BCl3 MFC set to  0.000000
2/19/2012	10:05:47 PM	PH3 MFC set to  0.000000
2/19/2012	10:05:47 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:05:47 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:05:47 PM	Tube furnace set to 150
2/19/2012	10:06:17 PM	H2 valve closed
2/19/2012	10:06:17 PM	BCl3 valve closed
2/19/2012	10:06:17 PM	PH3 valve closed
2/19/2012	10:06:17 PM	SiCl4 pre valve closed
2/19/2012	10:06:17 PM	SiCl4 post valve closed
2/19/2012	10:06:17 PM	Bypass valve closed
2/19/2012	10:06:17 PM	Bubbler valve closed
2/19/2012	10:06:17 PM	Helium valve opened
2/19/2012	10:06:17 PM	Main Vac valve opened
2/19/2012	10:06:17 PM	Helium MFC set to  20.000000
2/19/2012	10:06:17 PM	H2 MFC set to  0.000000
2/19/2012	10:06:17 PM	BCl3 MFC set to  0.000000
2/19/2012	10:06:17 PM	PH3 MFC set to  0.000000
2/19/2012	10:06:17 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:06:17 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:06:17 PM	Tube furnace set to 150
2/19/2012	10:06:47 PM	Helium valve closed
2/19/2012	10:06:47 PM	H2 valve closed
2/19/2012	10:06:48 PM	BCl3 valve closed
2/19/2012	10:06:48 PM	PH3 valve closed
2/19/2012	10:06:48 PM	SiCl4 pre valve closed
2/19/2012	10:06:48 PM	SiCl4 post valve closed
2/19/2012	10:06:48 PM	Bypass valve closed
2/19/2012	10:06:48 PM	Bubbler valve closed
2/19/2012	10:06:48 PM	Main Vac valve opened
2/19/2012	10:06:48 PM	Helium MFC set to  0.000000
2/19/2012	10:06:48 PM	H2 MFC set to  0.000000
2/19/2012	10:06:48 PM	BCl3 MFC set to  0.000000
2/19/2012	10:06:48 PM	PH3 MFC set to  0.000000
2/19/2012	10:06:48 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:06:48 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:06:48 PM	Tube furnace set to 150
2/19/2012	10:07:18 PM	H2 valve closed
2/19/2012	10:07:18 PM	BCl3 valve closed
2/19/2012	10:07:18 PM	PH3 valve closed
2/19/2012	10:07:18 PM	SiCl4 pre valve closed
2/19/2012	10:07:18 PM	SiCl4 post valve closed
2/19/2012	10:07:18 PM	Bypass valve closed
2/19/2012	10:07:18 PM	Bubbler valve closed
2/19/2012	10:07:18 PM	Helium valve opened
2/19/2012	10:07:18 PM	Main Vac valve opened
2/19/2012	10:07:18 PM	Helium MFC set to  20.000000
2/19/2012	10:07:18 PM	H2 MFC set to  0.000000
2/19/2012	10:07:18 PM	BCl3 MFC set to  0.000000
2/19/2012	10:07:18 PM	PH3 MFC set to  0.000000
2/19/2012	10:07:18 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:07:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:07:18 PM	Tube furnace set to 150
2/19/2012	10:07:48 PM	Helium valve closed
2/19/2012	10:07:48 PM	H2 valve closed
2/19/2012	10:07:48 PM	BCl3 valve closed
2/19/2012	10:07:48 PM	PH3 valve closed
2/19/2012	10:07:48 PM	SiCl4 pre valve closed
2/19/2012	10:07:48 PM	SiCl4 post valve closed
2/19/2012	10:07:48 PM	Bypass valve closed
2/19/2012	10:07:48 PM	Bubbler valve closed
2/19/2012	10:07:48 PM	Main Vac valve opened
2/19/2012	10:07:48 PM	Helium MFC set to  0.000000
2/19/2012	10:07:48 PM	H2 MFC set to  0.000000
2/19/2012	10:07:48 PM	BCl3 MFC set to  0.000000
2/19/2012	10:07:48 PM	PH3 MFC set to  0.000000
2/19/2012	10:07:48 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:07:48 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:07:48 PM	Tube furnace set to 150
2/19/2012	10:08:18 PM	H2 valve closed
2/19/2012	10:08:18 PM	BCl3 valve closed
2/19/2012	10:08:18 PM	PH3 valve closed
2/19/2012	10:08:18 PM	SiCl4 pre valve closed
2/19/2012	10:08:18 PM	SiCl4 post valve closed
2/19/2012	10:08:18 PM	Bypass valve closed
2/19/2012	10:08:18 PM	Bubbler valve closed
2/19/2012	10:08:18 PM	Helium valve opened
2/19/2012	10:08:18 PM	Main Vac valve opened
2/19/2012	10:08:18 PM	Helium MFC set to  20.000000
2/19/2012	10:08:18 PM	H2 MFC set to  0.000000
2/19/2012	10:08:18 PM	BCl3 MFC set to  0.000000
2/19/2012	10:08:18 PM	PH3 MFC set to  0.000000
2/19/2012	10:08:18 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:08:18 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:08:18 PM	Tube furnace set to 150
2/19/2012	10:08:48 PM	Helium valve closed
2/19/2012	10:08:48 PM	H2 valve closed
2/19/2012	10:08:48 PM	BCl3 valve closed
2/19/2012	10:08:48 PM	PH3 valve closed
2/19/2012	10:08:48 PM	SiCl4 pre valve closed
2/19/2012	10:08:48 PM	SiCl4 post valve closed
2/19/2012	10:08:48 PM	Bypass valve closed
2/19/2012	10:08:48 PM	Bubbler valve closed
2/19/2012	10:08:48 PM	Main Vac valve opened
2/19/2012	10:08:48 PM	Helium MFC set to  0.000000
2/19/2012	10:08:48 PM	H2 MFC set to  0.000000
2/19/2012	10:08:48 PM	BCl3 MFC set to  0.000000
2/19/2012	10:08:48 PM	PH3 MFC set to  0.000000
2/19/2012	10:08:48 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:08:48 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:08:48 PM	Tube furnace set to 150
2/19/2012	10:09:19 PM	H2 valve closed
2/19/2012	10:09:19 PM	BCl3 valve closed
2/19/2012	10:09:19 PM	PH3 valve closed
2/19/2012	10:09:19 PM	SiCl4 pre valve closed
2/19/2012	10:09:19 PM	SiCl4 post valve closed
2/19/2012	10:09:19 PM	Bypass valve closed
2/19/2012	10:09:19 PM	Bubbler valve closed
2/19/2012	10:09:19 PM	Helium valve opened
2/19/2012	10:09:19 PM	Main Vac valve opened
2/19/2012	10:09:19 PM	Helium MFC set to  20.000000
2/19/2012	10:09:19 PM	H2 MFC set to  0.000000
2/19/2012	10:09:19 PM	BCl3 MFC set to  0.000000
2/19/2012	10:09:19 PM	PH3 MFC set to  0.000000
2/19/2012	10:09:19 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:09:19 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:09:19 PM	Tube furnace set to 150
2/19/2012	10:09:49 PM	Helium valve closed
2/19/2012	10:09:49 PM	H2 valve closed
2/19/2012	10:09:49 PM	BCl3 valve closed
2/19/2012	10:09:49 PM	PH3 valve closed
2/19/2012	10:09:49 PM	SiCl4 pre valve closed
2/19/2012	10:09:49 PM	SiCl4 post valve closed
2/19/2012	10:09:49 PM	Bypass valve closed
2/19/2012	10:09:49 PM	Bubbler valve closed
2/19/2012	10:09:49 PM	Main Vac valve opened
2/19/2012	10:09:49 PM	Helium MFC set to  0.000000
2/19/2012	10:09:49 PM	H2 MFC set to  0.000000
2/19/2012	10:09:49 PM	BCl3 MFC set to  0.000000
2/19/2012	10:09:49 PM	PH3 MFC set to  0.000000
2/19/2012	10:09:49 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:09:49 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:09:49 PM	Tube furnace set to 150
2/19/2012	10:09:50 PM	Run finished at 10:09 PM
2/19/2012	10:10:19 PM	Recipe started at 10:10 PM
2/19/2012	10:10:19 PM	Helium valve closed
2/19/2012	10:10:19 PM	H2 valve closed
2/19/2012	10:10:19 PM	BCl3 valve closed
2/19/2012	10:10:19 PM	PH3 valve closed
2/19/2012	10:10:19 PM	SiCl4 pre valve closed
2/19/2012	10:10:19 PM	SiCl4 post valve closed
2/19/2012	10:10:19 PM	Bypass valve closed
2/19/2012	10:10:19 PM	Bubbler valve closed
2/19/2012	10:10:19 PM	Main Vac valve opened
2/19/2012	10:10:19 PM	Helium MFC set to  0.000000
2/19/2012	10:10:19 PM	H2 MFC set to  0.000000
2/19/2012	10:10:19 PM	BCl3 MFC set to  0.000000
2/19/2012	10:10:19 PM	PH3 MFC set to  0.000000
2/19/2012	10:10:19 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:10:19 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:10:19 PM	Tube furnace set to 150
2/19/2012	10:10:49 PM	H2 valve closed
2/19/2012	10:10:49 PM	BCl3 valve closed
2/19/2012	10:10:49 PM	PH3 valve closed
2/19/2012	10:10:49 PM	SiCl4 pre valve closed
2/19/2012	10:10:49 PM	SiCl4 post valve closed
2/19/2012	10:10:49 PM	Bypass valve closed
2/19/2012	10:10:49 PM	Bubbler valve closed
2/19/2012	10:10:49 PM	Helium valve opened
2/19/2012	10:10:49 PM	Main Vac valve opened
2/19/2012	10:10:49 PM	Helium MFC set to  20.000000
2/19/2012	10:10:49 PM	H2 MFC set to  0.000000
2/19/2012	10:10:49 PM	BCl3 MFC set to  0.000000
2/19/2012	10:10:49 PM	PH3 MFC set to  0.000000
2/19/2012	10:10:49 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:10:49 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:10:49 PM	Tube furnace set to 150
2/19/2012	10:11:19 PM	Helium valve closed
2/19/2012	10:11:19 PM	H2 valve closed
2/19/2012	10:11:19 PM	BCl3 valve closed
2/19/2012	10:11:19 PM	PH3 valve closed
2/19/2012	10:11:19 PM	SiCl4 pre valve closed
2/19/2012	10:11:19 PM	SiCl4 post valve closed
2/19/2012	10:11:19 PM	Bypass valve closed
2/19/2012	10:11:19 PM	Bubbler valve closed
2/19/2012	10:11:19 PM	Main Vac valve opened
2/19/2012	10:11:19 PM	Helium MFC set to  0.000000
2/19/2012	10:11:19 PM	H2 MFC set to  0.000000
2/19/2012	10:11:19 PM	BCl3 MFC set to  0.000000
2/19/2012	10:11:19 PM	PH3 MFC set to  0.000000
2/19/2012	10:11:19 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:11:19 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:11:19 PM	Tube furnace set to 150
2/19/2012	10:11:49 PM	H2 valve closed
2/19/2012	10:11:49 PM	BCl3 valve closed
2/19/2012	10:11:49 PM	PH3 valve closed
2/19/2012	10:11:49 PM	SiCl4 pre valve closed
2/19/2012	10:11:49 PM	SiCl4 post valve closed
2/19/2012	10:11:49 PM	Bypass valve closed
2/19/2012	10:11:49 PM	Bubbler valve closed
2/19/2012	10:11:49 PM	Helium valve opened
2/19/2012	10:11:49 PM	Main Vac valve opened
2/19/2012	10:11:49 PM	Helium MFC set to  20.000000
2/19/2012	10:11:49 PM	H2 MFC set to  0.000000
2/19/2012	10:11:49 PM	BCl3 MFC set to  0.000000
2/19/2012	10:11:49 PM	PH3 MFC set to  0.000000
2/19/2012	10:11:49 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:11:49 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:11:49 PM	Tube furnace set to 150
2/19/2012	10:12:20 PM	Helium valve closed
2/19/2012	10:12:20 PM	H2 valve closed
2/19/2012	10:12:20 PM	BCl3 valve closed
2/19/2012	10:12:20 PM	PH3 valve closed
2/19/2012	10:12:20 PM	SiCl4 pre valve closed
2/19/2012	10:12:20 PM	SiCl4 post valve closed
2/19/2012	10:12:20 PM	Bypass valve closed
2/19/2012	10:12:20 PM	Bubbler valve closed
2/19/2012	10:12:20 PM	Main Vac valve opened
2/19/2012	10:12:20 PM	Helium MFC set to  0.000000
2/19/2012	10:12:20 PM	H2 MFC set to  0.000000
2/19/2012	10:12:20 PM	BCl3 MFC set to  0.000000
2/19/2012	10:12:20 PM	PH3 MFC set to  0.000000
2/19/2012	10:12:20 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:12:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:12:20 PM	Tube furnace set to 150
2/19/2012	10:12:50 PM	H2 valve closed
2/19/2012	10:12:50 PM	BCl3 valve closed
2/19/2012	10:12:50 PM	PH3 valve closed
2/19/2012	10:12:50 PM	SiCl4 pre valve closed
2/19/2012	10:12:50 PM	SiCl4 post valve closed
2/19/2012	10:12:50 PM	Bypass valve closed
2/19/2012	10:12:50 PM	Bubbler valve closed
2/19/2012	10:12:50 PM	Helium valve opened
2/19/2012	10:12:50 PM	Main Vac valve opened
2/19/2012	10:12:50 PM	Helium MFC set to  20.000000
2/19/2012	10:12:50 PM	H2 MFC set to  0.000000
2/19/2012	10:12:50 PM	BCl3 MFC set to  0.000000
2/19/2012	10:12:50 PM	PH3 MFC set to  0.000000
2/19/2012	10:12:50 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:12:50 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:12:50 PM	Tube furnace set to 150
2/19/2012	10:13:20 PM	Helium valve closed
2/19/2012	10:13:20 PM	H2 valve closed
2/19/2012	10:13:20 PM	BCl3 valve closed
2/19/2012	10:13:20 PM	PH3 valve closed
2/19/2012	10:13:20 PM	SiCl4 pre valve closed
2/19/2012	10:13:20 PM	SiCl4 post valve closed
2/19/2012	10:13:20 PM	Bypass valve closed
2/19/2012	10:13:20 PM	Bubbler valve closed
2/19/2012	10:13:20 PM	Main Vac valve opened
2/19/2012	10:13:20 PM	Helium MFC set to  0.000000
2/19/2012	10:13:20 PM	H2 MFC set to  0.000000
2/19/2012	10:13:20 PM	BCl3 MFC set to  0.000000
2/19/2012	10:13:20 PM	PH3 MFC set to  0.000000
2/19/2012	10:13:20 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:13:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:13:20 PM	Tube furnace set to 150
2/19/2012	10:13:50 PM	H2 valve closed
2/19/2012	10:13:50 PM	BCl3 valve closed
2/19/2012	10:13:50 PM	PH3 valve closed
2/19/2012	10:13:50 PM	SiCl4 pre valve closed
2/19/2012	10:13:50 PM	SiCl4 post valve closed
2/19/2012	10:13:50 PM	Bypass valve closed
2/19/2012	10:13:50 PM	Bubbler valve closed
2/19/2012	10:13:50 PM	Helium valve opened
2/19/2012	10:13:50 PM	Main Vac valve opened
2/19/2012	10:13:50 PM	Helium MFC set to  20.000000
2/19/2012	10:13:50 PM	H2 MFC set to  0.000000
2/19/2012	10:13:50 PM	BCl3 MFC set to  0.000000
2/19/2012	10:13:50 PM	PH3 MFC set to  0.000000
2/19/2012	10:13:50 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:13:50 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:13:50 PM	Tube furnace set to 150
2/19/2012	10:14:20 PM	Helium valve closed
2/19/2012	10:14:20 PM	H2 valve closed
2/19/2012	10:14:20 PM	BCl3 valve closed
2/19/2012	10:14:20 PM	PH3 valve closed
2/19/2012	10:14:20 PM	SiCl4 pre valve closed
2/19/2012	10:14:20 PM	SiCl4 post valve closed
2/19/2012	10:14:20 PM	Bypass valve closed
2/19/2012	10:14:20 PM	Bubbler valve closed
2/19/2012	10:14:20 PM	Main Vac valve opened
2/19/2012	10:14:20 PM	Helium MFC set to  0.000000
2/19/2012	10:14:20 PM	H2 MFC set to  0.000000
2/19/2012	10:14:20 PM	BCl3 MFC set to  0.000000
2/19/2012	10:14:20 PM	PH3 MFC set to  0.000000
2/19/2012	10:14:20 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:14:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:14:21 PM	Tube furnace set to 150
2/19/2012	10:14:51 PM	H2 valve closed
2/19/2012	10:14:51 PM	BCl3 valve closed
2/19/2012	10:14:51 PM	PH3 valve closed
2/19/2012	10:14:51 PM	SiCl4 pre valve closed
2/19/2012	10:14:51 PM	SiCl4 post valve closed
2/19/2012	10:14:51 PM	Bypass valve closed
2/19/2012	10:14:51 PM	Bubbler valve closed
2/19/2012	10:14:51 PM	Helium valve opened
2/19/2012	10:14:51 PM	Main Vac valve opened
2/19/2012	10:14:51 PM	Helium MFC set to  20.000000
2/19/2012	10:14:51 PM	H2 MFC set to  0.000000
2/19/2012	10:14:51 PM	BCl3 MFC set to  0.000000
2/19/2012	10:14:51 PM	PH3 MFC set to  0.000000
2/19/2012	10:14:51 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:14:51 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:14:51 PM	Tube furnace set to 150
2/19/2012	10:15:21 PM	Helium valve closed
2/19/2012	10:15:21 PM	H2 valve closed
2/19/2012	10:15:21 PM	BCl3 valve closed
2/19/2012	10:15:21 PM	PH3 valve closed
2/19/2012	10:15:21 PM	SiCl4 pre valve closed
2/19/2012	10:15:21 PM	SiCl4 post valve closed
2/19/2012	10:15:21 PM	Bypass valve closed
2/19/2012	10:15:21 PM	Bubbler valve closed
2/19/2012	10:15:21 PM	Main Vac valve opened
2/19/2012	10:15:21 PM	Helium MFC set to  0.000000
2/19/2012	10:15:21 PM	H2 MFC set to  0.000000
2/19/2012	10:15:21 PM	BCl3 MFC set to  0.000000
2/19/2012	10:15:21 PM	PH3 MFC set to  0.000000
2/19/2012	10:15:21 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:15:21 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:15:21 PM	Tube furnace set to 150
2/19/2012	10:15:51 PM	H2 valve closed
2/19/2012	10:15:51 PM	BCl3 valve closed
2/19/2012	10:15:51 PM	PH3 valve closed
2/19/2012	10:15:51 PM	SiCl4 pre valve closed
2/19/2012	10:15:51 PM	SiCl4 post valve closed
2/19/2012	10:15:51 PM	Bypass valve closed
2/19/2012	10:15:51 PM	Bubbler valve closed
2/19/2012	10:15:51 PM	Helium valve opened
2/19/2012	10:15:51 PM	Main Vac valve opened
2/19/2012	10:15:51 PM	Helium MFC set to  20.000000
2/19/2012	10:15:51 PM	H2 MFC set to  0.000000
2/19/2012	10:15:51 PM	BCl3 MFC set to  0.000000
2/19/2012	10:15:51 PM	PH3 MFC set to  0.000000
2/19/2012	10:15:51 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:15:51 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:15:51 PM	Tube furnace set to 150
2/19/2012	10:16:21 PM	Helium valve closed
2/19/2012	10:16:21 PM	H2 valve closed
2/19/2012	10:16:21 PM	BCl3 valve closed
2/19/2012	10:16:21 PM	PH3 valve closed
2/19/2012	10:16:21 PM	SiCl4 pre valve closed
2/19/2012	10:16:21 PM	SiCl4 post valve closed
2/19/2012	10:16:21 PM	Bypass valve closed
2/19/2012	10:16:21 PM	Bubbler valve closed
2/19/2012	10:16:21 PM	Main Vac valve opened
2/19/2012	10:16:21 PM	Helium MFC set to  0.000000
2/19/2012	10:16:21 PM	H2 MFC set to  0.000000
2/19/2012	10:16:21 PM	BCl3 MFC set to  0.000000
2/19/2012	10:16:21 PM	PH3 MFC set to  0.000000
2/19/2012	10:16:21 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:16:21 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:16:21 PM	Tube furnace set to 150
2/19/2012	10:16:51 PM	H2 valve closed
2/19/2012	10:16:51 PM	BCl3 valve closed
2/19/2012	10:16:51 PM	PH3 valve closed
2/19/2012	10:16:51 PM	SiCl4 pre valve closed
2/19/2012	10:16:51 PM	SiCl4 post valve closed
2/19/2012	10:16:51 PM	Bypass valve closed
2/19/2012	10:16:51 PM	Bubbler valve closed
2/19/2012	10:16:51 PM	Helium valve opened
2/19/2012	10:16:51 PM	Main Vac valve opened
2/19/2012	10:16:51 PM	Helium MFC set to  20.000000
2/19/2012	10:16:51 PM	H2 MFC set to  0.000000
2/19/2012	10:16:51 PM	BCl3 MFC set to  0.000000
2/19/2012	10:16:51 PM	PH3 MFC set to  0.000000
2/19/2012	10:16:51 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:16:51 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:16:52 PM	Tube furnace set to 150
2/19/2012	10:17:22 PM	Helium valve closed
2/19/2012	10:17:22 PM	H2 valve closed
2/19/2012	10:17:22 PM	BCl3 valve closed
2/19/2012	10:17:22 PM	PH3 valve closed
2/19/2012	10:17:22 PM	SiCl4 pre valve closed
2/19/2012	10:17:22 PM	SiCl4 post valve closed
2/19/2012	10:17:22 PM	Bypass valve closed
2/19/2012	10:17:22 PM	Bubbler valve closed
2/19/2012	10:17:22 PM	Main Vac valve opened
2/19/2012	10:17:22 PM	Helium MFC set to  0.000000
2/19/2012	10:17:22 PM	H2 MFC set to  0.000000
2/19/2012	10:17:22 PM	BCl3 MFC set to  0.000000
2/19/2012	10:17:22 PM	PH3 MFC set to  0.000000
2/19/2012	10:17:22 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:17:22 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:17:22 PM	Tube furnace set to 150
2/19/2012	10:17:52 PM	H2 valve closed
2/19/2012	10:17:52 PM	BCl3 valve closed
2/19/2012	10:17:52 PM	PH3 valve closed
2/19/2012	10:17:52 PM	SiCl4 pre valve closed
2/19/2012	10:17:52 PM	SiCl4 post valve closed
2/19/2012	10:17:52 PM	Bypass valve closed
2/19/2012	10:17:52 PM	Bubbler valve closed
2/19/2012	10:17:52 PM	Helium valve opened
2/19/2012	10:17:52 PM	Main Vac valve opened
2/19/2012	10:17:52 PM	Helium MFC set to  20.000000
2/19/2012	10:17:52 PM	H2 MFC set to  0.000000
2/19/2012	10:17:52 PM	BCl3 MFC set to  0.000000
2/19/2012	10:17:52 PM	PH3 MFC set to  0.000000
2/19/2012	10:17:52 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:17:52 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:17:52 PM	Tube furnace set to 150
2/19/2012	10:18:22 PM	Helium valve closed
2/19/2012	10:18:22 PM	H2 valve closed
2/19/2012	10:18:22 PM	BCl3 valve closed
2/19/2012	10:18:22 PM	PH3 valve closed
2/19/2012	10:18:22 PM	SiCl4 pre valve closed
2/19/2012	10:18:22 PM	SiCl4 post valve closed
2/19/2012	10:18:22 PM	Bypass valve closed
2/19/2012	10:18:22 PM	Bubbler valve closed
2/19/2012	10:18:22 PM	Main Vac valve opened
2/19/2012	10:18:22 PM	Helium MFC set to  0.000000
2/19/2012	10:18:22 PM	H2 MFC set to  0.000000
2/19/2012	10:18:22 PM	BCl3 MFC set to  0.000000
2/19/2012	10:18:22 PM	PH3 MFC set to  0.000000
2/19/2012	10:18:22 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:18:22 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:18:22 PM	Tube furnace set to 150
2/19/2012	10:18:52 PM	H2 valve closed
2/19/2012	10:18:52 PM	BCl3 valve closed
2/19/2012	10:18:52 PM	PH3 valve closed
2/19/2012	10:18:52 PM	SiCl4 pre valve closed
2/19/2012	10:18:52 PM	SiCl4 post valve closed
2/19/2012	10:18:52 PM	Bypass valve closed
2/19/2012	10:18:52 PM	Bubbler valve closed
2/19/2012	10:18:52 PM	Helium valve opened
2/19/2012	10:18:52 PM	Main Vac valve opened
2/19/2012	10:18:52 PM	Helium MFC set to  20.000000
2/19/2012	10:18:52 PM	H2 MFC set to  0.000000
2/19/2012	10:18:52 PM	BCl3 MFC set to  0.000000
2/19/2012	10:18:52 PM	PH3 MFC set to  0.000000
2/19/2012	10:18:52 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:18:52 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:18:52 PM	Tube furnace set to 150
2/19/2012	10:19:22 PM	Helium valve closed
2/19/2012	10:19:22 PM	H2 valve closed
2/19/2012	10:19:22 PM	BCl3 valve closed
2/19/2012	10:19:22 PM	PH3 valve closed
2/19/2012	10:19:22 PM	SiCl4 pre valve closed
2/19/2012	10:19:22 PM	SiCl4 post valve closed
2/19/2012	10:19:22 PM	Bypass valve closed
2/19/2012	10:19:22 PM	Bubbler valve closed
2/19/2012	10:19:22 PM	Main Vac valve opened
2/19/2012	10:19:22 PM	Helium MFC set to  0.000000
2/19/2012	10:19:22 PM	H2 MFC set to  0.000000
2/19/2012	10:19:22 PM	BCl3 MFC set to  0.000000
2/19/2012	10:19:22 PM	PH3 MFC set to  0.000000
2/19/2012	10:19:22 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:19:22 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:19:23 PM	Tube furnace set to 150
2/19/2012	10:19:53 PM	H2 valve closed
2/19/2012	10:19:53 PM	BCl3 valve closed
2/19/2012	10:19:53 PM	PH3 valve closed
2/19/2012	10:19:53 PM	SiCl4 pre valve closed
2/19/2012	10:19:53 PM	SiCl4 post valve closed
2/19/2012	10:19:53 PM	Bypass valve closed
2/19/2012	10:19:53 PM	Bubbler valve closed
2/19/2012	10:19:53 PM	Helium valve opened
2/19/2012	10:19:53 PM	Main Vac valve opened
2/19/2012	10:19:53 PM	Helium MFC set to  20.000000
2/19/2012	10:19:53 PM	H2 MFC set to  0.000000
2/19/2012	10:19:53 PM	BCl3 MFC set to  0.000000
2/19/2012	10:19:53 PM	PH3 MFC set to  0.000000
2/19/2012	10:19:53 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:19:53 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:19:53 PM	Tube furnace set to 150
2/19/2012	10:20:23 PM	Helium valve closed
2/19/2012	10:20:23 PM	H2 valve closed
2/19/2012	10:20:23 PM	BCl3 valve closed
2/19/2012	10:20:23 PM	PH3 valve closed
2/19/2012	10:20:23 PM	SiCl4 pre valve closed
2/19/2012	10:20:23 PM	SiCl4 post valve closed
2/19/2012	10:20:23 PM	Bypass valve closed
2/19/2012	10:20:23 PM	Bubbler valve closed
2/19/2012	10:20:23 PM	Main Vac valve opened
2/19/2012	10:20:23 PM	Helium MFC set to  0.000000
2/19/2012	10:20:23 PM	H2 MFC set to  0.000000
2/19/2012	10:20:23 PM	BCl3 MFC set to  0.000000
2/19/2012	10:20:23 PM	PH3 MFC set to  0.000000
2/19/2012	10:20:23 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:20:23 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:20:23 PM	Tube furnace set to 150
2/19/2012	10:20:24 PM	Run finished at 10:20 PM
2/19/2012	10:21:28 PM	Main Vac valve closed
2/19/2012	10:21:41 PM	Main Vac valve opened
2/19/2012	10:22:17 PM	Recipe started at 10:22 PM
2/19/2012	10:22:17 PM	Helium valve closed
2/19/2012	10:22:17 PM	H2 valve closed
2/19/2012	10:22:17 PM	BCl3 valve closed
2/19/2012	10:22:17 PM	PH3 valve closed
2/19/2012	10:22:17 PM	SiCl4 pre valve closed
2/19/2012	10:22:17 PM	SiCl4 post valve closed
2/19/2012	10:22:17 PM	Main Vac valve closed
2/19/2012	10:22:17 PM	Bypass valve closed
2/19/2012	10:22:17 PM	Bubbler valve closed
2/19/2012	10:22:17 PM	Helium MFC set to  0.000000
2/19/2012	10:22:17 PM	H2 MFC set to  0.000000
2/19/2012	10:22:17 PM	BCl3 MFC set to  0.000000
2/19/2012	10:22:17 PM	PH3 MFC set to  0.000000
2/19/2012	10:22:17 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:22:17 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:22:17 PM	Tube furnace set to 0
2/19/2012	10:22:20 PM	Helium valve closed
2/19/2012	10:22:20 PM	BCl3 valve closed
2/19/2012	10:22:20 PM	PH3 valve closed
2/19/2012	10:22:20 PM	SiCl4 pre valve closed
2/19/2012	10:22:20 PM	SiCl4 post valve closed
2/19/2012	10:22:20 PM	Main Vac valve closed
2/19/2012	10:22:20 PM	Bypass valve closed
2/19/2012	10:22:20 PM	Bubbler valve closed
2/19/2012	10:22:20 PM	H2 valve opened
2/19/2012	10:22:20 PM	Helium MFC set to  0.000000
2/19/2012	10:22:20 PM	H2 MFC set to  500.000000
2/19/2012	10:22:20 PM	BCl3 MFC set to  0.000000
2/19/2012	10:22:20 PM	PH3 MFC set to  0.000000
2/19/2012	10:22:20 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:22:20 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:22:20 PM	Tube furnace set to 0
2/19/2012	10:23:24 PM	Helium valve closed
2/19/2012	10:23:24 PM	BCl3 valve closed
2/19/2012	10:23:24 PM	PH3 valve closed
2/19/2012	10:23:24 PM	SiCl4 pre valve closed
2/19/2012	10:23:24 PM	SiCl4 post valve closed
2/19/2012	10:23:24 PM	Main Vac valve closed
2/19/2012	10:23:24 PM	Bypass valve closed
2/19/2012	10:23:24 PM	H2 valve opened
2/19/2012	10:23:24 PM	Bubbler valve opened
2/19/2012	10:23:24 PM	Helium MFC set to  0.000000
2/19/2012	10:23:24 PM	H2 MFC set to  500.000000
2/19/2012	10:23:24 PM	BCl3 MFC set to  0.000000
2/19/2012	10:23:24 PM	PH3 MFC set to  0.000000
2/19/2012	10:23:24 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:23:24 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:23:24 PM	Tube furnace set to 0
2/19/2012	10:23:25 PM	Helium valve closed
2/19/2012	10:23:25 PM	BCl3 valve closed
2/19/2012	10:23:25 PM	PH3 valve closed
2/19/2012	10:23:25 PM	SiCl4 pre valve closed
2/19/2012	10:23:25 PM	SiCl4 post valve closed
2/19/2012	10:23:25 PM	Main Vac valve closed
2/19/2012	10:23:25 PM	Bypass valve closed
2/19/2012	10:23:25 PM	H2 valve opened
2/19/2012	10:23:25 PM	Bubbler valve opened
2/19/2012	10:23:25 PM	Helium MFC set to  0.000000
2/19/2012	10:23:25 PM	H2 MFC set to  500.000000
2/19/2012	10:23:25 PM	BCl3 MFC set to  0.000000
2/19/2012	10:23:25 PM	PH3 MFC set to  0.000000
2/19/2012	10:23:25 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:23:25 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:23:25 PM	Tube furnace set to 1000
2/19/2012	10:43:25 PM	Helium valve closed
2/19/2012	10:43:25 PM	PH3 valve closed
2/19/2012	10:43:25 PM	Main Vac valve closed
2/19/2012	10:43:25 PM	Bypass valve closed
2/19/2012	10:43:25 PM	H2 valve opened
2/19/2012	10:43:25 PM	BCl3 valve opened
2/19/2012	10:43:25 PM	SiCl4 pre valve opened
2/19/2012	10:43:25 PM	SiCl4 post valve opened
2/19/2012	10:43:25 PM	Bubbler valve opened
2/19/2012	10:43:25 PM	Helium MFC set to  0.000000
2/19/2012	10:43:25 PM	H2 MFC set to  500.000000
2/19/2012	10:43:25 PM	BCl3 MFC set to  20.000000
2/19/2012	10:43:25 PM	PH3 MFC set to  0.000000
2/19/2012	10:43:25 PM	SiCl4 MFC set to  50.000000
2/19/2012	10:43:25 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:43:25 PM	Tube furnace set to 1000
2/19/2012	10:53:25 PM	Helium valve closed
2/19/2012	10:53:25 PM	BCl3 valve closed
2/19/2012	10:53:25 PM	PH3 valve closed
2/19/2012	10:53:25 PM	SiCl4 pre valve closed
2/19/2012	10:53:25 PM	SiCl4 post valve closed
2/19/2012	10:53:25 PM	Main Vac valve closed
2/19/2012	10:53:25 PM	Bypass valve closed
2/19/2012	10:53:25 PM	H2 valve opened
2/19/2012	10:53:25 PM	Bubbler valve opened
2/19/2012	10:53:25 PM	Helium MFC set to  0.000000
2/19/2012	10:53:25 PM	H2 MFC set to  500.000000
2/19/2012	10:53:25 PM	BCl3 MFC set to  0.000000
2/19/2012	10:53:25 PM	PH3 MFC set to  0.000000
2/19/2012	10:53:25 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:53:25 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:53:26 PM	Tube furnace set to 750
2/19/2012	10:58:26 PM	H2 valve closed
2/19/2012	10:58:26 PM	BCl3 valve closed
2/19/2012	10:58:26 PM	PH3 valve closed
2/19/2012	10:58:26 PM	SiCl4 pre valve closed
2/19/2012	10:58:26 PM	SiCl4 post valve closed
2/19/2012	10:58:26 PM	Main Vac valve closed
2/19/2012	10:58:26 PM	Bypass valve closed
2/19/2012	10:58:26 PM	Helium valve opened
2/19/2012	10:58:26 PM	Bubbler valve opened
2/19/2012	10:58:26 PM	Helium MFC set to  500.000000
2/19/2012	10:58:26 PM	H2 MFC set to  0.000000
2/19/2012	10:58:26 PM	BCl3 MFC set to  0.000000
2/19/2012	10:58:26 PM	PH3 MFC set to  0.000000
2/19/2012	10:58:26 PM	SiCl4 MFC set to  0.000000
2/19/2012	10:58:26 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	10:58:26 PM	Tube furnace set to 0
2/19/2012	11:18:26 PM	Helium valve closed
2/19/2012	11:18:26 PM	H2 valve closed
2/19/2012	11:18:26 PM	BCl3 valve closed
2/19/2012	11:18:26 PM	PH3 valve closed
2/19/2012	11:18:26 PM	SiCl4 pre valve closed
2/19/2012	11:18:26 PM	SiCl4 post valve closed
2/19/2012	11:18:26 PM	Main Vac valve closed
2/19/2012	11:18:26 PM	Bypass valve closed
2/19/2012	11:18:26 PM	Bubbler valve closed
2/19/2012	11:18:26 PM	Helium MFC set to  0.000000
2/19/2012	11:18:26 PM	H2 MFC set to  0.000000
2/19/2012	11:18:26 PM	BCl3 MFC set to  0.000000
2/19/2012	11:18:26 PM	PH3 MFC set to  0.000000
2/19/2012	11:18:26 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:18:26 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:18:26 PM	Tube furnace set to 0
2/19/2012	11:18:27 PM	Run finished at 11:18 PM
2/19/2012	11:22:41 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	11:22:42 PM	Recipe started at 11:22 PM
2/19/2012	11:22:42 PM	Helium valve closed
2/19/2012	11:22:42 PM	H2 valve closed
2/19/2012	11:22:42 PM	BCl3 valve closed
2/19/2012	11:22:42 PM	PH3 valve closed
2/19/2012	11:22:42 PM	SiCl4 pre valve closed
2/19/2012	11:22:42 PM	SiCl4 post valve closed
2/19/2012	11:22:42 PM	Main Vac valve closed
2/19/2012	11:22:42 PM	Bubbler valve closed
2/19/2012	11:22:42 PM	Bypass valve opened
2/19/2012	11:22:42 PM	Helium MFC set to  0.000000
2/19/2012	11:22:42 PM	H2 MFC set to  0.000000
2/19/2012	11:22:42 PM	BCl3 MFC set to  0.000000
2/19/2012	11:22:42 PM	PH3 MFC set to  0.000000
2/19/2012	11:22:42 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:22:42 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:22:42 PM	Tube furnace set to 0
2/19/2012	11:23:45 PM	Helium valve closed
2/19/2012	11:23:45 PM	H2 valve closed
2/19/2012	11:23:45 PM	BCl3 valve closed
2/19/2012	11:23:45 PM	PH3 valve closed
2/19/2012	11:23:45 PM	SiCl4 pre valve closed
2/19/2012	11:23:45 PM	SiCl4 post valve closed
2/19/2012	11:23:45 PM	Main Vac valve closed
2/19/2012	11:23:45 PM	Bubbler valve closed
2/19/2012	11:23:45 PM	Bypass valve opened
2/19/2012	11:23:45 PM	Helium MFC set to  0.000000
2/19/2012	11:23:45 PM	H2 MFC set to  0.000000
2/19/2012	11:23:45 PM	BCl3 MFC set to  0.000000
2/19/2012	11:23:45 PM	PH3 MFC set to  0.000000
2/19/2012	11:23:45 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:23:45 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:23:45 PM	Tube furnace set to 0
2/19/2012	11:24:45 PM	Helium valve closed
2/19/2012	11:24:45 PM	H2 valve closed
2/19/2012	11:24:45 PM	BCl3 valve closed
2/19/2012	11:24:45 PM	PH3 valve closed
2/19/2012	11:24:45 PM	SiCl4 pre valve closed
2/19/2012	11:24:45 PM	SiCl4 post valve closed
2/19/2012	11:24:45 PM	Bypass valve closed
2/19/2012	11:24:45 PM	Bubbler valve closed
2/19/2012	11:24:45 PM	Main Vac valve opened
2/19/2012	11:24:45 PM	Helium MFC set to  0.000000
2/19/2012	11:24:45 PM	H2 MFC set to  0.000000
2/19/2012	11:24:45 PM	BCl3 MFC set to  0.000000
2/19/2012	11:24:45 PM	PH3 MFC set to  0.000000
2/19/2012	11:24:45 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:24:45 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:24:45 PM	Tube furnace set to 0
2/19/2012	11:24:46 PM	Run finished at 11:24 PM
2/19/2012	11:24:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
2/19/2012	11:25:30 PM	Recipe started at 11:25 PM
2/19/2012	11:25:30 PM	Helium valve closed
2/19/2012	11:25:30 PM	H2 valve closed
2/19/2012	11:25:30 PM	BCl3 valve closed
2/19/2012	11:25:30 PM	PH3 valve closed
2/19/2012	11:25:30 PM	SiCl4 pre valve closed
2/19/2012	11:25:30 PM	SiCl4 post valve closed
2/19/2012	11:25:30 PM	Bypass valve closed
2/19/2012	11:25:30 PM	Bubbler valve closed
2/19/2012	11:25:30 PM	Main Vac valve opened
2/19/2012	11:25:30 PM	Helium MFC set to  0.000000
2/19/2012	11:25:30 PM	H2 MFC set to  0.000000
2/19/2012	11:25:30 PM	BCl3 MFC set to  0.000000
2/19/2012	11:25:30 PM	PH3 MFC set to  0.000000
2/19/2012	11:25:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:25:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:25:31 PM	Tube furnace set to 150
2/19/2012	11:26:01 PM	H2 valve closed
2/19/2012	11:26:01 PM	BCl3 valve closed
2/19/2012	11:26:01 PM	PH3 valve closed
2/19/2012	11:26:01 PM	SiCl4 pre valve closed
2/19/2012	11:26:01 PM	SiCl4 post valve closed
2/19/2012	11:26:01 PM	Bypass valve closed
2/19/2012	11:26:01 PM	Bubbler valve closed
2/19/2012	11:26:01 PM	Helium valve opened
2/19/2012	11:26:01 PM	Main Vac valve opened
2/19/2012	11:26:01 PM	Helium MFC set to  20.000000
2/19/2012	11:26:01 PM	H2 MFC set to  0.000000
2/19/2012	11:26:01 PM	BCl3 MFC set to  0.000000
2/19/2012	11:26:01 PM	PH3 MFC set to  0.000000
2/19/2012	11:26:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:26:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:26:01 PM	Tube furnace set to 150
2/19/2012	11:26:31 PM	Helium valve closed
2/19/2012	11:26:31 PM	H2 valve closed
2/19/2012	11:26:31 PM	BCl3 valve closed
2/19/2012	11:26:31 PM	PH3 valve closed
2/19/2012	11:26:31 PM	SiCl4 pre valve closed
2/19/2012	11:26:31 PM	SiCl4 post valve closed
2/19/2012	11:26:31 PM	Bypass valve closed
2/19/2012	11:26:31 PM	Bubbler valve closed
2/19/2012	11:26:31 PM	Main Vac valve opened
2/19/2012	11:26:31 PM	Helium MFC set to  0.000000
2/19/2012	11:26:31 PM	H2 MFC set to  0.000000
2/19/2012	11:26:31 PM	BCl3 MFC set to  0.000000
2/19/2012	11:26:31 PM	PH3 MFC set to  0.000000
2/19/2012	11:26:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:26:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:26:31 PM	Tube furnace set to 150
2/19/2012	11:27:01 PM	H2 valve closed
2/19/2012	11:27:01 PM	BCl3 valve closed
2/19/2012	11:27:01 PM	PH3 valve closed
2/19/2012	11:27:01 PM	SiCl4 pre valve closed
2/19/2012	11:27:01 PM	SiCl4 post valve closed
2/19/2012	11:27:01 PM	Bypass valve closed
2/19/2012	11:27:01 PM	Bubbler valve closed
2/19/2012	11:27:01 PM	Helium valve opened
2/19/2012	11:27:01 PM	Main Vac valve opened
2/19/2012	11:27:01 PM	Helium MFC set to  20.000000
2/19/2012	11:27:01 PM	H2 MFC set to  0.000000
2/19/2012	11:27:01 PM	BCl3 MFC set to  0.000000
2/19/2012	11:27:01 PM	PH3 MFC set to  0.000000
2/19/2012	11:27:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:27:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:27:01 PM	Tube furnace set to 150
2/19/2012	11:27:31 PM	Helium valve closed
2/19/2012	11:27:31 PM	H2 valve closed
2/19/2012	11:27:31 PM	BCl3 valve closed
2/19/2012	11:27:31 PM	PH3 valve closed
2/19/2012	11:27:31 PM	SiCl4 pre valve closed
2/19/2012	11:27:31 PM	SiCl4 post valve closed
2/19/2012	11:27:31 PM	Bypass valve closed
2/19/2012	11:27:31 PM	Bubbler valve closed
2/19/2012	11:27:31 PM	Main Vac valve opened
2/19/2012	11:27:31 PM	Helium MFC set to  0.000000
2/19/2012	11:27:31 PM	H2 MFC set to  0.000000
2/19/2012	11:27:31 PM	BCl3 MFC set to  0.000000
2/19/2012	11:27:31 PM	PH3 MFC set to  0.000000
2/19/2012	11:27:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:27:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:27:31 PM	Tube furnace set to 150
2/19/2012	11:28:01 PM	H2 valve closed
2/19/2012	11:28:01 PM	BCl3 valve closed
2/19/2012	11:28:01 PM	PH3 valve closed
2/19/2012	11:28:01 PM	SiCl4 pre valve closed
2/19/2012	11:28:01 PM	SiCl4 post valve closed
2/19/2012	11:28:01 PM	Bypass valve closed
2/19/2012	11:28:01 PM	Bubbler valve closed
2/19/2012	11:28:01 PM	Helium valve opened
2/19/2012	11:28:01 PM	Main Vac valve opened
2/19/2012	11:28:01 PM	Helium MFC set to  20.000000
2/19/2012	11:28:01 PM	H2 MFC set to  0.000000
2/19/2012	11:28:01 PM	BCl3 MFC set to  0.000000
2/19/2012	11:28:01 PM	PH3 MFC set to  0.000000
2/19/2012	11:28:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:28:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:28:02 PM	Tube furnace set to 150
2/19/2012	11:28:32 PM	Helium valve closed
2/19/2012	11:28:32 PM	H2 valve closed
2/19/2012	11:28:32 PM	BCl3 valve closed
2/19/2012	11:28:32 PM	PH3 valve closed
2/19/2012	11:28:32 PM	SiCl4 pre valve closed
2/19/2012	11:28:32 PM	SiCl4 post valve closed
2/19/2012	11:28:32 PM	Bypass valve closed
2/19/2012	11:28:32 PM	Bubbler valve closed
2/19/2012	11:28:32 PM	Main Vac valve opened
2/19/2012	11:28:32 PM	Helium MFC set to  0.000000
2/19/2012	11:28:32 PM	H2 MFC set to  0.000000
2/19/2012	11:28:32 PM	BCl3 MFC set to  0.000000
2/19/2012	11:28:32 PM	PH3 MFC set to  0.000000
2/19/2012	11:28:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:28:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:28:32 PM	Tube furnace set to 150
2/19/2012	11:29:02 PM	H2 valve closed
2/19/2012	11:29:02 PM	BCl3 valve closed
2/19/2012	11:29:02 PM	PH3 valve closed
2/19/2012	11:29:02 PM	SiCl4 pre valve closed
2/19/2012	11:29:02 PM	SiCl4 post valve closed
2/19/2012	11:29:02 PM	Bypass valve closed
2/19/2012	11:29:02 PM	Bubbler valve closed
2/19/2012	11:29:02 PM	Helium valve opened
2/19/2012	11:29:02 PM	Main Vac valve opened
2/19/2012	11:29:02 PM	Helium MFC set to  20.000000
2/19/2012	11:29:02 PM	H2 MFC set to  0.000000
2/19/2012	11:29:02 PM	BCl3 MFC set to  0.000000
2/19/2012	11:29:02 PM	PH3 MFC set to  0.000000
2/19/2012	11:29:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:29:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:29:02 PM	Tube furnace set to 150
2/19/2012	11:29:32 PM	Helium valve closed
2/19/2012	11:29:32 PM	H2 valve closed
2/19/2012	11:29:32 PM	BCl3 valve closed
2/19/2012	11:29:32 PM	PH3 valve closed
2/19/2012	11:29:32 PM	SiCl4 pre valve closed
2/19/2012	11:29:32 PM	SiCl4 post valve closed
2/19/2012	11:29:32 PM	Bypass valve closed
2/19/2012	11:29:32 PM	Bubbler valve closed
2/19/2012	11:29:32 PM	Main Vac valve opened
2/19/2012	11:29:32 PM	Helium MFC set to  0.000000
2/19/2012	11:29:32 PM	H2 MFC set to  0.000000
2/19/2012	11:29:32 PM	BCl3 MFC set to  0.000000
2/19/2012	11:29:32 PM	PH3 MFC set to  0.000000
2/19/2012	11:29:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:29:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:29:32 PM	Tube furnace set to 150
2/19/2012	11:30:02 PM	H2 valve closed
2/19/2012	11:30:02 PM	BCl3 valve closed
2/19/2012	11:30:02 PM	PH3 valve closed
2/19/2012	11:30:02 PM	SiCl4 pre valve closed
2/19/2012	11:30:02 PM	SiCl4 post valve closed
2/19/2012	11:30:02 PM	Bypass valve closed
2/19/2012	11:30:02 PM	Bubbler valve closed
2/19/2012	11:30:02 PM	Helium valve opened
2/19/2012	11:30:02 PM	Main Vac valve opened
2/19/2012	11:30:02 PM	Helium MFC set to  20.000000
2/19/2012	11:30:02 PM	H2 MFC set to  0.000000
2/19/2012	11:30:02 PM	BCl3 MFC set to  0.000000
2/19/2012	11:30:02 PM	PH3 MFC set to  0.000000
2/19/2012	11:30:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:30:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:30:02 PM	Tube furnace set to 150
2/19/2012	11:30:32 PM	Helium valve closed
2/19/2012	11:30:32 PM	H2 valve closed
2/19/2012	11:30:32 PM	BCl3 valve closed
2/19/2012	11:30:32 PM	PH3 valve closed
2/19/2012	11:30:32 PM	SiCl4 pre valve closed
2/19/2012	11:30:32 PM	SiCl4 post valve closed
2/19/2012	11:30:32 PM	Bypass valve closed
2/19/2012	11:30:32 PM	Bubbler valve closed
2/19/2012	11:30:32 PM	Main Vac valve opened
2/19/2012	11:30:32 PM	Helium MFC set to  0.000000
2/19/2012	11:30:32 PM	H2 MFC set to  0.000000
2/19/2012	11:30:32 PM	BCl3 MFC set to  0.000000
2/19/2012	11:30:32 PM	PH3 MFC set to  0.000000
2/19/2012	11:30:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:30:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:30:33 PM	Tube furnace set to 150
2/19/2012	11:31:03 PM	H2 valve closed
2/19/2012	11:31:03 PM	BCl3 valve closed
2/19/2012	11:31:03 PM	PH3 valve closed
2/19/2012	11:31:03 PM	SiCl4 pre valve closed
2/19/2012	11:31:03 PM	SiCl4 post valve closed
2/19/2012	11:31:03 PM	Bypass valve closed
2/19/2012	11:31:03 PM	Bubbler valve closed
2/19/2012	11:31:03 PM	Helium valve opened
2/19/2012	11:31:03 PM	Main Vac valve opened
2/19/2012	11:31:03 PM	Helium MFC set to  20.000000
2/19/2012	11:31:03 PM	H2 MFC set to  0.000000
2/19/2012	11:31:03 PM	BCl3 MFC set to  0.000000
2/19/2012	11:31:03 PM	PH3 MFC set to  0.000000
2/19/2012	11:31:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:31:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:31:03 PM	Tube furnace set to 150
2/19/2012	11:31:33 PM	Helium valve closed
2/19/2012	11:31:33 PM	H2 valve closed
2/19/2012	11:31:33 PM	BCl3 valve closed
2/19/2012	11:31:33 PM	PH3 valve closed
2/19/2012	11:31:33 PM	SiCl4 pre valve closed
2/19/2012	11:31:33 PM	SiCl4 post valve closed
2/19/2012	11:31:33 PM	Bypass valve closed
2/19/2012	11:31:33 PM	Bubbler valve closed
2/19/2012	11:31:33 PM	Main Vac valve opened
2/19/2012	11:31:33 PM	Helium MFC set to  0.000000
2/19/2012	11:31:33 PM	H2 MFC set to  0.000000
2/19/2012	11:31:33 PM	BCl3 MFC set to  0.000000
2/19/2012	11:31:33 PM	PH3 MFC set to  0.000000
2/19/2012	11:31:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:31:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:31:33 PM	Tube furnace set to 150
2/19/2012	11:32:03 PM	H2 valve closed
2/19/2012	11:32:03 PM	BCl3 valve closed
2/19/2012	11:32:03 PM	PH3 valve closed
2/19/2012	11:32:03 PM	SiCl4 pre valve closed
2/19/2012	11:32:03 PM	SiCl4 post valve closed
2/19/2012	11:32:03 PM	Bypass valve closed
2/19/2012	11:32:03 PM	Bubbler valve closed
2/19/2012	11:32:03 PM	Helium valve opened
2/19/2012	11:32:03 PM	Main Vac valve opened
2/19/2012	11:32:03 PM	Helium MFC set to  20.000000
2/19/2012	11:32:03 PM	H2 MFC set to  0.000000
2/19/2012	11:32:03 PM	BCl3 MFC set to  0.000000
2/19/2012	11:32:03 PM	PH3 MFC set to  0.000000
2/19/2012	11:32:03 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:32:03 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:32:03 PM	Tube furnace set to 150
2/19/2012	11:32:33 PM	Helium valve closed
2/19/2012	11:32:33 PM	H2 valve closed
2/19/2012	11:32:33 PM	BCl3 valve closed
2/19/2012	11:32:33 PM	PH3 valve closed
2/19/2012	11:32:33 PM	SiCl4 pre valve closed
2/19/2012	11:32:33 PM	SiCl4 post valve closed
2/19/2012	11:32:33 PM	Bypass valve closed
2/19/2012	11:32:33 PM	Bubbler valve closed
2/19/2012	11:32:33 PM	Main Vac valve opened
2/19/2012	11:32:33 PM	Helium MFC set to  0.000000
2/19/2012	11:32:33 PM	H2 MFC set to  0.000000
2/19/2012	11:32:33 PM	BCl3 MFC set to  0.000000
2/19/2012	11:32:33 PM	PH3 MFC set to  0.000000
2/19/2012	11:32:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:32:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:32:33 PM	Tube furnace set to 150
2/19/2012	11:33:03 PM	H2 valve closed
2/19/2012	11:33:03 PM	BCl3 valve closed
2/19/2012	11:33:03 PM	PH3 valve closed
2/19/2012	11:33:03 PM	SiCl4 pre valve closed
2/19/2012	11:33:04 PM	SiCl4 post valve closed
2/19/2012	11:33:04 PM	Bypass valve closed
2/19/2012	11:33:04 PM	Bubbler valve closed
2/19/2012	11:33:04 PM	Helium valve opened
2/19/2012	11:33:04 PM	Main Vac valve opened
2/19/2012	11:33:04 PM	Helium MFC set to  20.000000
2/19/2012	11:33:04 PM	H2 MFC set to  0.000000
2/19/2012	11:33:04 PM	BCl3 MFC set to  0.000000
2/19/2012	11:33:04 PM	PH3 MFC set to  0.000000
2/19/2012	11:33:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:33:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:33:04 PM	Tube furnace set to 150
2/19/2012	11:33:34 PM	Helium valve closed
2/19/2012	11:33:34 PM	H2 valve closed
2/19/2012	11:33:34 PM	BCl3 valve closed
2/19/2012	11:33:34 PM	PH3 valve closed
2/19/2012	11:33:34 PM	SiCl4 pre valve closed
2/19/2012	11:33:34 PM	SiCl4 post valve closed
2/19/2012	11:33:34 PM	Bypass valve closed
2/19/2012	11:33:34 PM	Bubbler valve closed
2/19/2012	11:33:34 PM	Main Vac valve opened
2/19/2012	11:33:34 PM	Helium MFC set to  0.000000
2/19/2012	11:33:34 PM	H2 MFC set to  0.000000
2/19/2012	11:33:34 PM	BCl3 MFC set to  0.000000
2/19/2012	11:33:34 PM	PH3 MFC set to  0.000000
2/19/2012	11:33:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:33:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:33:34 PM	Tube furnace set to 150
2/19/2012	11:34:04 PM	H2 valve closed
2/19/2012	11:34:04 PM	BCl3 valve closed
2/19/2012	11:34:04 PM	PH3 valve closed
2/19/2012	11:34:04 PM	SiCl4 pre valve closed
2/19/2012	11:34:04 PM	SiCl4 post valve closed
2/19/2012	11:34:04 PM	Bypass valve closed
2/19/2012	11:34:04 PM	Bubbler valve closed
2/19/2012	11:34:04 PM	Helium valve opened
2/19/2012	11:34:04 PM	Main Vac valve opened
2/19/2012	11:34:04 PM	Helium MFC set to  20.000000
2/19/2012	11:34:04 PM	H2 MFC set to  0.000000
2/19/2012	11:34:04 PM	BCl3 MFC set to  0.000000
2/19/2012	11:34:04 PM	PH3 MFC set to  0.000000
2/19/2012	11:34:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:34:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:34:04 PM	Tube furnace set to 150
2/19/2012	11:34:34 PM	Helium valve closed
2/19/2012	11:34:34 PM	H2 valve closed
2/19/2012	11:34:34 PM	BCl3 valve closed
2/19/2012	11:34:34 PM	PH3 valve closed
2/19/2012	11:34:34 PM	SiCl4 pre valve closed
2/19/2012	11:34:34 PM	SiCl4 post valve closed
2/19/2012	11:34:34 PM	Bypass valve closed
2/19/2012	11:34:34 PM	Bubbler valve closed
2/19/2012	11:34:34 PM	Main Vac valve opened
2/19/2012	11:34:34 PM	Helium MFC set to  0.000000
2/19/2012	11:34:34 PM	H2 MFC set to  0.000000
2/19/2012	11:34:34 PM	BCl3 MFC set to  0.000000
2/19/2012	11:34:34 PM	PH3 MFC set to  0.000000
2/19/2012	11:34:34 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:34:34 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:34:34 PM	Tube furnace set to 150
2/19/2012	11:35:04 PM	H2 valve closed
2/19/2012	11:35:04 PM	BCl3 valve closed
2/19/2012	11:35:04 PM	PH3 valve closed
2/19/2012	11:35:04 PM	SiCl4 pre valve closed
2/19/2012	11:35:04 PM	SiCl4 post valve closed
2/19/2012	11:35:04 PM	Bypass valve closed
2/19/2012	11:35:04 PM	Bubbler valve closed
2/19/2012	11:35:04 PM	Helium valve opened
2/19/2012	11:35:04 PM	Main Vac valve opened
2/19/2012	11:35:04 PM	Helium MFC set to  20.000000
2/19/2012	11:35:04 PM	H2 MFC set to  0.000000
2/19/2012	11:35:04 PM	BCl3 MFC set to  0.000000
2/19/2012	11:35:04 PM	PH3 MFC set to  0.000000
2/19/2012	11:35:04 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:35:04 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:35:05 PM	Tube furnace set to 150
2/19/2012	11:35:35 PM	Helium valve closed
2/19/2012	11:35:35 PM	H2 valve closed
2/19/2012	11:35:35 PM	BCl3 valve closed
2/19/2012	11:35:35 PM	PH3 valve closed
2/19/2012	11:35:35 PM	SiCl4 pre valve closed
2/19/2012	11:35:35 PM	SiCl4 post valve closed
2/19/2012	11:35:35 PM	Bypass valve closed
2/19/2012	11:35:35 PM	Bubbler valve closed
2/19/2012	11:35:35 PM	Main Vac valve opened
2/19/2012	11:35:35 PM	Helium MFC set to  0.000000
2/19/2012	11:35:35 PM	H2 MFC set to  0.000000
2/19/2012	11:35:35 PM	BCl3 MFC set to  0.000000
2/19/2012	11:35:35 PM	PH3 MFC set to  0.000000
2/19/2012	11:35:35 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:35:35 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:35:35 PM	Tube furnace set to 150
2/19/2012	11:35:36 PM	Run finished at 11:35 PM
2/19/2012	11:36:58 PM	Recipe started at 11:36 PM
2/19/2012	11:36:58 PM	Helium valve closed
2/19/2012	11:36:58 PM	H2 valve closed
2/19/2012	11:36:58 PM	BCl3 valve closed
2/19/2012	11:36:58 PM	PH3 valve closed
2/19/2012	11:36:58 PM	SiCl4 pre valve closed
2/19/2012	11:36:58 PM	SiCl4 post valve closed
2/19/2012	11:36:58 PM	Bypass valve closed
2/19/2012	11:36:58 PM	Bubbler valve closed
2/19/2012	11:36:58 PM	Main Vac valve opened
2/19/2012	11:36:58 PM	Helium MFC set to  0.000000
2/19/2012	11:36:58 PM	H2 MFC set to  0.000000
2/19/2012	11:36:58 PM	BCl3 MFC set to  0.000000
2/19/2012	11:36:58 PM	PH3 MFC set to  0.000000
2/19/2012	11:36:58 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:36:58 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:36:58 PM	Tube furnace set to 180
2/19/2012	11:37:58 PM	H2 valve closed
2/19/2012	11:37:58 PM	BCl3 valve closed
2/19/2012	11:37:59 PM	PH3 valve closed
2/19/2012	11:37:59 PM	SiCl4 pre valve closed
2/19/2012	11:37:59 PM	SiCl4 post valve closed
2/19/2012	11:37:59 PM	Bypass valve closed
2/19/2012	11:37:59 PM	Bubbler valve closed
2/19/2012	11:37:59 PM	Helium valve opened
2/19/2012	11:37:59 PM	Main Vac valve opened
2/19/2012	11:37:59 PM	Helium MFC set to  10.000000
2/19/2012	11:37:59 PM	H2 MFC set to  0.000000
2/19/2012	11:37:59 PM	BCl3 MFC set to  0.000000
2/19/2012	11:37:59 PM	PH3 MFC set to  0.000000
2/19/2012	11:37:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:37:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:37:59 PM	Tube furnace set to 180
2/19/2012	11:38:29 PM	Helium valve closed
2/19/2012	11:38:29 PM	H2 valve closed
2/19/2012	11:38:29 PM	BCl3 valve closed
2/19/2012	11:38:29 PM	PH3 valve closed
2/19/2012	11:38:29 PM	SiCl4 pre valve closed
2/19/2012	11:38:29 PM	SiCl4 post valve closed
2/19/2012	11:38:29 PM	Bypass valve closed
2/19/2012	11:38:29 PM	Bubbler valve closed
2/19/2012	11:38:29 PM	Main Vac valve opened
2/19/2012	11:38:29 PM	Helium MFC set to  0.000000
2/19/2012	11:38:29 PM	H2 MFC set to  0.000000
2/19/2012	11:38:29 PM	BCl3 MFC set to  0.000000
2/19/2012	11:38:29 PM	PH3 MFC set to  0.000000
2/19/2012	11:38:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:38:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:38:29 PM	Tube furnace set to 180
2/19/2012	11:38:59 PM	H2 valve closed
2/19/2012	11:38:59 PM	BCl3 valve closed
2/19/2012	11:38:59 PM	PH3 valve closed
2/19/2012	11:38:59 PM	SiCl4 pre valve closed
2/19/2012	11:38:59 PM	SiCl4 post valve closed
2/19/2012	11:38:59 PM	Bypass valve closed
2/19/2012	11:38:59 PM	Bubbler valve closed
2/19/2012	11:38:59 PM	Helium valve opened
2/19/2012	11:38:59 PM	Main Vac valve opened
2/19/2012	11:38:59 PM	Helium MFC set to  10.000000
2/19/2012	11:38:59 PM	H2 MFC set to  0.000000
2/19/2012	11:38:59 PM	BCl3 MFC set to  0.000000
2/19/2012	11:38:59 PM	PH3 MFC set to  0.000000
2/19/2012	11:38:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:38:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:38:59 PM	Tube furnace set to 180
2/19/2012	11:39:29 PM	Helium valve closed
2/19/2012	11:39:29 PM	H2 valve closed
2/19/2012	11:39:29 PM	BCl3 valve closed
2/19/2012	11:39:29 PM	PH3 valve closed
2/19/2012	11:39:29 PM	SiCl4 pre valve closed
2/19/2012	11:39:29 PM	SiCl4 post valve closed
2/19/2012	11:39:29 PM	Bypass valve closed
2/19/2012	11:39:29 PM	Bubbler valve closed
2/19/2012	11:39:29 PM	Main Vac valve opened
2/19/2012	11:39:29 PM	Helium MFC set to  0.000000
2/19/2012	11:39:29 PM	H2 MFC set to  0.000000
2/19/2012	11:39:29 PM	BCl3 MFC set to  0.000000
2/19/2012	11:39:29 PM	PH3 MFC set to  0.000000
2/19/2012	11:39:29 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:39:29 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:39:29 PM	Tube furnace set to 180
2/19/2012	11:39:59 PM	H2 valve closed
2/19/2012	11:39:59 PM	BCl3 valve closed
2/19/2012	11:39:59 PM	PH3 valve closed
2/19/2012	11:39:59 PM	SiCl4 pre valve closed
2/19/2012	11:39:59 PM	SiCl4 post valve closed
2/19/2012	11:39:59 PM	Bypass valve closed
2/19/2012	11:39:59 PM	Bubbler valve closed
2/19/2012	11:39:59 PM	Helium valve opened
2/19/2012	11:39:59 PM	Main Vac valve opened
2/19/2012	11:39:59 PM	Helium MFC set to  10.000000
2/19/2012	11:39:59 PM	H2 MFC set to  0.000000
2/19/2012	11:39:59 PM	BCl3 MFC set to  0.000000
2/19/2012	11:39:59 PM	PH3 MFC set to  0.000000
2/19/2012	11:39:59 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:39:59 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:39:59 PM	Tube furnace set to 180
2/19/2012	11:40:30 PM	Helium valve closed
2/19/2012	11:40:30 PM	H2 valve closed
2/19/2012	11:40:30 PM	BCl3 valve closed
2/19/2012	11:40:30 PM	PH3 valve closed
2/19/2012	11:40:30 PM	SiCl4 pre valve closed
2/19/2012	11:40:30 PM	SiCl4 post valve closed
2/19/2012	11:40:30 PM	Bypass valve closed
2/19/2012	11:40:30 PM	Bubbler valve closed
2/19/2012	11:40:30 PM	Main Vac valve opened
2/19/2012	11:40:30 PM	Helium MFC set to  0.000000
2/19/2012	11:40:30 PM	H2 MFC set to  0.000000
2/19/2012	11:40:30 PM	BCl3 MFC set to  0.000000
2/19/2012	11:40:30 PM	PH3 MFC set to  0.000000
2/19/2012	11:40:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:40:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:40:30 PM	Tube furnace set to 180
2/19/2012	11:41:00 PM	H2 valve closed
2/19/2012	11:41:00 PM	BCl3 valve closed
2/19/2012	11:41:00 PM	PH3 valve closed
2/19/2012	11:41:00 PM	SiCl4 pre valve closed
2/19/2012	11:41:00 PM	SiCl4 post valve closed
2/19/2012	11:41:00 PM	Bypass valve closed
2/19/2012	11:41:00 PM	Bubbler valve closed
2/19/2012	11:41:00 PM	Helium valve opened
2/19/2012	11:41:00 PM	Main Vac valve opened
2/19/2012	11:41:00 PM	Helium MFC set to  10.000000
2/19/2012	11:41:00 PM	H2 MFC set to  0.000000
2/19/2012	11:41:00 PM	BCl3 MFC set to  0.000000
2/19/2012	11:41:00 PM	PH3 MFC set to  0.000000
2/19/2012	11:41:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:41:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:41:00 PM	Tube furnace set to 180
2/19/2012	11:41:30 PM	Helium valve closed
2/19/2012	11:41:30 PM	H2 valve closed
2/19/2012	11:41:30 PM	BCl3 valve closed
2/19/2012	11:41:30 PM	PH3 valve closed
2/19/2012	11:41:30 PM	SiCl4 pre valve closed
2/19/2012	11:41:30 PM	SiCl4 post valve closed
2/19/2012	11:41:30 PM	Bypass valve closed
2/19/2012	11:41:30 PM	Bubbler valve closed
2/19/2012	11:41:30 PM	Main Vac valve opened
2/19/2012	11:41:30 PM	Helium MFC set to  0.000000
2/19/2012	11:41:30 PM	H2 MFC set to  0.000000
2/19/2012	11:41:30 PM	BCl3 MFC set to  0.000000
2/19/2012	11:41:30 PM	PH3 MFC set to  0.000000
2/19/2012	11:41:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:41:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:41:30 PM	Tube furnace set to 180
2/19/2012	11:42:00 PM	H2 valve closed
2/19/2012	11:42:00 PM	BCl3 valve closed
2/19/2012	11:42:00 PM	PH3 valve closed
2/19/2012	11:42:00 PM	SiCl4 pre valve closed
2/19/2012	11:42:00 PM	SiCl4 post valve closed
2/19/2012	11:42:00 PM	Bypass valve closed
2/19/2012	11:42:00 PM	Bubbler valve closed
2/19/2012	11:42:00 PM	Helium valve opened
2/19/2012	11:42:00 PM	Main Vac valve opened
2/19/2012	11:42:00 PM	Helium MFC set to  10.000000
2/19/2012	11:42:00 PM	H2 MFC set to  0.000000
2/19/2012	11:42:00 PM	BCl3 MFC set to  0.000000
2/19/2012	11:42:00 PM	PH3 MFC set to  0.000000
2/19/2012	11:42:00 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:42:00 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:42:00 PM	Tube furnace set to 180
2/19/2012	11:42:30 PM	Helium valve closed
2/19/2012	11:42:30 PM	H2 valve closed
2/19/2012	11:42:30 PM	BCl3 valve closed
2/19/2012	11:42:30 PM	PH3 valve closed
2/19/2012	11:42:30 PM	SiCl4 pre valve closed
2/19/2012	11:42:30 PM	SiCl4 post valve closed
2/19/2012	11:42:30 PM	Bypass valve closed
2/19/2012	11:42:30 PM	Bubbler valve closed
2/19/2012	11:42:30 PM	Main Vac valve opened
2/19/2012	11:42:30 PM	Helium MFC set to  0.000000
2/19/2012	11:42:30 PM	H2 MFC set to  0.000000
2/19/2012	11:42:30 PM	BCl3 MFC set to  0.000000
2/19/2012	11:42:30 PM	PH3 MFC set to  0.000000
2/19/2012	11:42:30 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:42:30 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:42:31 PM	Tube furnace set to 180
2/19/2012	11:43:01 PM	H2 valve closed
2/19/2012	11:43:01 PM	BCl3 valve closed
2/19/2012	11:43:01 PM	PH3 valve closed
2/19/2012	11:43:01 PM	SiCl4 pre valve closed
2/19/2012	11:43:01 PM	SiCl4 post valve closed
2/19/2012	11:43:01 PM	Bypass valve closed
2/19/2012	11:43:01 PM	Bubbler valve closed
2/19/2012	11:43:01 PM	Helium valve opened
2/19/2012	11:43:01 PM	Main Vac valve opened
2/19/2012	11:43:01 PM	Helium MFC set to  10.000000
2/19/2012	11:43:01 PM	H2 MFC set to  0.000000
2/19/2012	11:43:01 PM	BCl3 MFC set to  0.000000
2/19/2012	11:43:01 PM	PH3 MFC set to  0.000000
2/19/2012	11:43:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:43:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:43:01 PM	Tube furnace set to 180
2/19/2012	11:43:31 PM	Helium valve closed
2/19/2012	11:43:31 PM	H2 valve closed
2/19/2012	11:43:31 PM	BCl3 valve closed
2/19/2012	11:43:31 PM	PH3 valve closed
2/19/2012	11:43:31 PM	SiCl4 pre valve closed
2/19/2012	11:43:31 PM	SiCl4 post valve closed
2/19/2012	11:43:31 PM	Bypass valve closed
2/19/2012	11:43:31 PM	Bubbler valve closed
2/19/2012	11:43:31 PM	Main Vac valve opened
2/19/2012	11:43:31 PM	Helium MFC set to  0.000000
2/19/2012	11:43:31 PM	H2 MFC set to  0.000000
2/19/2012	11:43:31 PM	BCl3 MFC set to  0.000000
2/19/2012	11:43:31 PM	PH3 MFC set to  0.000000
2/19/2012	11:43:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:43:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:43:31 PM	Tube furnace set to 180
2/19/2012	11:44:01 PM	H2 valve closed
2/19/2012	11:44:01 PM	BCl3 valve closed
2/19/2012	11:44:01 PM	PH3 valve closed
2/19/2012	11:44:01 PM	SiCl4 pre valve closed
2/19/2012	11:44:01 PM	SiCl4 post valve closed
2/19/2012	11:44:01 PM	Bypass valve closed
2/19/2012	11:44:01 PM	Bubbler valve closed
2/19/2012	11:44:01 PM	Helium valve opened
2/19/2012	11:44:01 PM	Main Vac valve opened
2/19/2012	11:44:01 PM	Helium MFC set to  10.000000
2/19/2012	11:44:01 PM	H2 MFC set to  0.000000
2/19/2012	11:44:01 PM	BCl3 MFC set to  0.000000
2/19/2012	11:44:01 PM	PH3 MFC set to  0.000000
2/19/2012	11:44:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:44:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:44:01 PM	Tube furnace set to 180
2/19/2012	11:44:31 PM	Helium valve closed
2/19/2012	11:44:31 PM	H2 valve closed
2/19/2012	11:44:31 PM	BCl3 valve closed
2/19/2012	11:44:31 PM	PH3 valve closed
2/19/2012	11:44:31 PM	SiCl4 pre valve closed
2/19/2012	11:44:31 PM	SiCl4 post valve closed
2/19/2012	11:44:31 PM	Bypass valve closed
2/19/2012	11:44:31 PM	Bubbler valve closed
2/19/2012	11:44:31 PM	Main Vac valve opened
2/19/2012	11:44:31 PM	Helium MFC set to  0.000000
2/19/2012	11:44:31 PM	H2 MFC set to  0.000000
2/19/2012	11:44:31 PM	BCl3 MFC set to  0.000000
2/19/2012	11:44:31 PM	PH3 MFC set to  0.000000
2/19/2012	11:44:31 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:44:31 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:44:31 PM	Tube furnace set to 180
2/19/2012	11:45:01 PM	H2 valve closed
2/19/2012	11:45:01 PM	BCl3 valve closed
2/19/2012	11:45:01 PM	PH3 valve closed
2/19/2012	11:45:01 PM	SiCl4 pre valve closed
2/19/2012	11:45:01 PM	SiCl4 post valve closed
2/19/2012	11:45:01 PM	Bypass valve closed
2/19/2012	11:45:01 PM	Bubbler valve closed
2/19/2012	11:45:01 PM	Helium valve opened
2/19/2012	11:45:01 PM	Main Vac valve opened
2/19/2012	11:45:01 PM	Helium MFC set to  10.000000
2/19/2012	11:45:01 PM	H2 MFC set to  0.000000
2/19/2012	11:45:01 PM	BCl3 MFC set to  0.000000
2/19/2012	11:45:01 PM	PH3 MFC set to  0.000000
2/19/2012	11:45:01 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:45:01 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:45:02 PM	Tube furnace set to 180
2/19/2012	11:45:32 PM	Helium valve closed
2/19/2012	11:45:32 PM	H2 valve closed
2/19/2012	11:45:32 PM	BCl3 valve closed
2/19/2012	11:45:32 PM	PH3 valve closed
2/19/2012	11:45:32 PM	SiCl4 pre valve closed
2/19/2012	11:45:32 PM	SiCl4 post valve closed
2/19/2012	11:45:32 PM	Bypass valve closed
2/19/2012	11:45:32 PM	Bubbler valve closed
2/19/2012	11:45:32 PM	Main Vac valve opened
2/19/2012	11:45:32 PM	Helium MFC set to  0.000000
2/19/2012	11:45:32 PM	H2 MFC set to  0.000000
2/19/2012	11:45:32 PM	BCl3 MFC set to  0.000000
2/19/2012	11:45:32 PM	PH3 MFC set to  0.000000
2/19/2012	11:45:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:45:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:45:32 PM	Tube furnace set to 180
2/19/2012	11:46:02 PM	H2 valve closed
2/19/2012	11:46:02 PM	BCl3 valve closed
2/19/2012	11:46:02 PM	PH3 valve closed
2/19/2012	11:46:02 PM	SiCl4 pre valve closed
2/19/2012	11:46:02 PM	SiCl4 post valve closed
2/19/2012	11:46:02 PM	Bypass valve closed
2/19/2012	11:46:02 PM	Bubbler valve closed
2/19/2012	11:46:02 PM	Helium valve opened
2/19/2012	11:46:02 PM	Main Vac valve opened
2/19/2012	11:46:02 PM	Helium MFC set to  10.000000
2/19/2012	11:46:02 PM	H2 MFC set to  0.000000
2/19/2012	11:46:02 PM	BCl3 MFC set to  0.000000
2/19/2012	11:46:02 PM	PH3 MFC set to  0.000000
2/19/2012	11:46:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:46:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:46:02 PM	Tube furnace set to 180
2/19/2012	11:46:32 PM	Helium valve closed
2/19/2012	11:46:32 PM	H2 valve closed
2/19/2012	11:46:32 PM	BCl3 valve closed
2/19/2012	11:46:32 PM	PH3 valve closed
2/19/2012	11:46:32 PM	SiCl4 pre valve closed
2/19/2012	11:46:32 PM	SiCl4 post valve closed
2/19/2012	11:46:32 PM	Bypass valve closed
2/19/2012	11:46:32 PM	Bubbler valve closed
2/19/2012	11:46:32 PM	Main Vac valve opened
2/19/2012	11:46:32 PM	Helium MFC set to  0.000000
2/19/2012	11:46:32 PM	H2 MFC set to  0.000000
2/19/2012	11:46:32 PM	BCl3 MFC set to  0.000000
2/19/2012	11:46:32 PM	PH3 MFC set to  0.000000
2/19/2012	11:46:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:46:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:46:32 PM	Tube furnace set to 180
2/19/2012	11:47:02 PM	H2 valve closed
2/19/2012	11:47:02 PM	BCl3 valve closed
2/19/2012	11:47:02 PM	PH3 valve closed
2/19/2012	11:47:02 PM	SiCl4 pre valve closed
2/19/2012	11:47:02 PM	SiCl4 post valve closed
2/19/2012	11:47:02 PM	Bypass valve closed
2/19/2012	11:47:02 PM	Bubbler valve closed
2/19/2012	11:47:02 PM	Helium valve opened
2/19/2012	11:47:02 PM	Main Vac valve opened
2/19/2012	11:47:02 PM	Helium MFC set to  10.000000
2/19/2012	11:47:02 PM	H2 MFC set to  0.000000
2/19/2012	11:47:02 PM	BCl3 MFC set to  0.000000
2/19/2012	11:47:02 PM	PH3 MFC set to  0.000000
2/19/2012	11:47:02 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:47:02 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:47:02 PM	Tube furnace set to 180
2/19/2012	11:47:32 PM	Helium valve closed
2/19/2012	11:47:32 PM	H2 valve closed
2/19/2012	11:47:32 PM	BCl3 valve closed
2/19/2012	11:47:32 PM	PH3 valve closed
2/19/2012	11:47:32 PM	SiCl4 pre valve closed
2/19/2012	11:47:32 PM	SiCl4 post valve closed
2/19/2012	11:47:32 PM	Bypass valve closed
2/19/2012	11:47:32 PM	Bubbler valve closed
2/19/2012	11:47:32 PM	Main Vac valve opened
2/19/2012	11:47:32 PM	Helium MFC set to  0.000000
2/19/2012	11:47:32 PM	H2 MFC set to  0.000000
2/19/2012	11:47:32 PM	BCl3 MFC set to  0.000000
2/19/2012	11:47:32 PM	PH3 MFC set to  0.000000
2/19/2012	11:47:32 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:47:32 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:47:33 PM	Tube furnace set to 180
2/19/2012	11:49:33 PM	Helium valve closed
2/19/2012	11:49:33 PM	BCl3 valve closed
2/19/2012	11:49:33 PM	PH3 valve closed
2/19/2012	11:49:33 PM	SiCl4 pre valve closed
2/19/2012	11:49:33 PM	SiCl4 post valve closed
2/19/2012	11:49:33 PM	Main Vac valve closed
2/19/2012	11:49:33 PM	Bypass valve closed
2/19/2012	11:49:33 PM	Bubbler valve closed
2/19/2012	11:49:33 PM	H2 valve opened
2/19/2012	11:49:33 PM	Helium MFC set to  0.000000
2/19/2012	11:49:33 PM	H2 MFC set to  500.000000
2/19/2012	11:49:33 PM	BCl3 MFC set to  0.000000
2/19/2012	11:49:33 PM	PH3 MFC set to  0.000000
2/19/2012	11:49:33 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:49:33 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:49:33 PM	Tube furnace set to 1000
2/19/2012	11:50:36 PM	Helium valve closed
2/19/2012	11:50:36 PM	BCl3 valve closed
2/19/2012	11:50:36 PM	PH3 valve closed
2/19/2012	11:50:36 PM	SiCl4 pre valve closed
2/19/2012	11:50:36 PM	SiCl4 post valve closed
2/19/2012	11:50:36 PM	Main Vac valve closed
2/19/2012	11:50:36 PM	Bypass valve closed
2/19/2012	11:50:36 PM	H2 valve opened
2/19/2012	11:50:36 PM	Bubbler valve opened
2/19/2012	11:50:36 PM	Helium MFC set to  0.000000
2/19/2012	11:50:36 PM	H2 MFC set to  500.000000
2/19/2012	11:50:36 PM	BCl3 MFC set to  0.000000
2/19/2012	11:50:36 PM	PH3 MFC set to  0.000000
2/19/2012	11:50:36 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:50:36 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:50:36 PM	Tube furnace set to 1000
2/19/2012	11:50:37 PM	Helium valve closed
2/19/2012	11:50:37 PM	BCl3 valve closed
2/19/2012	11:50:37 PM	PH3 valve closed
2/19/2012	11:50:37 PM	SiCl4 pre valve closed
2/19/2012	11:50:37 PM	SiCl4 post valve closed
2/19/2012	11:50:37 PM	Main Vac valve closed
2/19/2012	11:50:38 PM	Bypass valve closed
2/19/2012	11:50:38 PM	H2 valve opened
2/19/2012	11:50:38 PM	Bubbler valve opened
2/19/2012	11:50:38 PM	Helium MFC set to  0.000000
2/19/2012	11:50:38 PM	H2 MFC set to  500.000000
2/19/2012	11:50:38 PM	BCl3 MFC set to  0.000000
2/19/2012	11:50:38 PM	PH3 MFC set to  0.000000
2/19/2012	11:50:38 PM	SiCl4 MFC set to  0.000000
2/19/2012	11:50:38 PM	Bypass solenoid MFC set to  0.000000
2/19/2012	11:50:38 PM	Tube furnace set to 1000
